Njengoba intuthuko ekhulayo yokugqoka okunamathelayo, ikakhulukazi ubuchwepheshe bokugqoka okunamathelayo kwe-magnetron, njengamanje, kunoma iyiphi into ingalungiswa ngefilimu yokuhlonza i-ion, ngoba ithagethi igxotshwa enqubweni yokuyimboza ngohlobo oluthile lwe-substrate, ikhwalithi yefilimu elinganisiwe inomthelela obalulekile, ngakho-ke, izidingo zento eqondiwe nazo ziqinile kakhulu. Ekukhetheni izinto eziqondiwe, ngaphezu kokusetshenziswa kwefilimu uqobo kufanele kukhethwe, kufanele futhi kucatshangelwe lezi zinkinga ezilandelayo:
Izinto eziqondiwe kufanele zibe namandla amahle okusebenza kanye nokuqina kwamakhemikhali ngemva kwefilimu;
Inhloso kanye ne-substrate kumele kuhlanganiswe ngokuqinile, ngaphandle kwalokho kufanele kuthathwe ne-substrate inenhlanganisela enhle yengqimba ye-membrane, kuqala ikhiphe ifilimu eyisisekelo bese kulungiswa ungqimba lwe-membrane oludingekayo;
Njengokusabela okugeleza ku-membrane material kumele kube lula ukusabela negesi ukuze kukhiqizwe ifilimu ehlanganisiwe.
Ngaphansi kwesisekelo sokuhlangabezana nezidingo zokusebenza kwe-membrane, umehluko phakathi kwe-coefficient yokwanda kokushisa kwezinto eziqondiwe kanye ne-substrate mncane ngangokunokwenzeka, ukuze kuncishiswe ithonya lokucindezeleka kokushisa ku-membrane echithekile.
Ngokwezidingo zokusetshenziswa nokusebenza kwe-membrane, izinto eziqondiwe kumele zihlangabezane nobumsulwa, okuqukethwe ukungcola, ukufana kwezingxenye, ukunemba komshini kanye nezinye izidingo zobuchwepheshe.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Jan-09-2024