1. Inhloso ye-Chromium I-Chromium njengento yefilimu eqhumayo ayilula nje kuphela ukuyihlanganisa ne-substrate enokunamathela okuphezulu, kodwa futhi ne-chromium ne-oxide ukukhiqiza ifilimu ye-CrO3, izakhiwo zayo zomshini, ukumelana ne-asidi, nokuzinza kokushisa kungcono. Ngaphezu kwalokho, i-chromium esimweni sokungapheleli kwe-oxidation ingakhiqiza ifilimu yokumunca ebuthakathaka. I-Chromium enokuhlanzeka okungaphezu kuka-98% kubikwe ukuthi yenziwe yaba ama-target angunxande noma ama-target e-chromium angu-cylindrical. Ngaphezu kwalokho, ubuchwepheshe bokusebenzisa indlela yokusinta ukwenza i-target engunxande ye-chromium nabo buvuthiwe.
2. I-ITO target Ukulungiswa kwezinto eziqondiwe zefilimu ye-ITO ezazisetshenziswa esikhathini esidlule, ngokuvamile zazisetshenziswa izinto ze-In-Sn alloy ukwenza ama-target, bese kuba yinqubo yokumboza nge-oxygen, bese kukhiqiza ifilimu ye-ITO. Le ndlela inzima ukulawula igesi yokusabela futhi ayinakuphindwaphindwa okuhle. Ngakho-ke, eminyakeni yamuva nje ithathelwe indawo yi-ITO sintering target. Izinto eziqondiwe ze-ITO inqubo ejwayelekile ihambisana nesilinganiso sekhwalithi, ngokusebenzisa indlela yokugaya ibhola izoxutshwa ngokuphelele, bese kungezwa i-ejenti ekhethekile ye-organic powder composite ezoxutshwa ibe yisimo esidingekayo, futhi ngokusebenzisa ukucindezela okucindezelwe, bese kuba yipuleti emoyeni ku-100 ℃ / h izinga lokushisa lifike ku-1600 ℃ ngemuva kokubamba ihora eli-1, bese kuba yizinga lokupholisa lika-100 ℃ / h lehle liye ekamelweni lokushisa bese lenziwa. Izinga lokupholisa lika-100 ℃ / h lehle liye ekamelweni lokushisa bese lenziwa. Lapho kwenziwa ama-target, indiza eqondiwe iyadingeka ukuthi ipholishwe, ukuze kugwenywe izindawo ezishisayo enkambisweni yokuphalaza.
3. Igolide elihlosiwe le-alloy yegolide negolide, elikhazimula kahle, elinokumelana okuhle nokugqwala, liyizinto zokuhlobisa ezifanelekile zokumboza ubuso. Indlela yokufaka i-wet plating eyayisetshenziswa esikhathini esidlule incane, ayinamandla anele, ayinamandla okuguguleka, kanye nezinkinga zokungcoliswa koketshezi olungcolile, ngakho-ke, ngokungenakugwenywa ithathelwe indawo yi-dry plating. Uhlobo lwe-target lune-plane target, i-local composite target, i-tubular target, i-local composite tuber target nokunye. Indlela yalo yokulungiselela iwukusebenzisa umthamo wokuncibilikisa i-vacuum, i-pickling, i-cold rolling, i-annealing, i-fine rolling, i-shearing, i-surface cleaning, i-cold rolling composite package kanye nochungechunge lwezinqubo ezifana nokulungiselela inqubo. Lobu buchwepheshe budlule ekuhlolweni eShayina, ukusetshenziswa kwemiphumela emihle.
4. Inhloso yezinto ezisetshenziswayo ze-magnetic Inhloso yezinto ezisetshenziswayo ze-magnetic isetshenziswa kakhulu ekufakeni amakhanda kazibuthe efilimu encane, amadiski efilimu encane kanye namanye amadivayisi efilimu encane ye-magnetic. Ngenxa yokusebenzisa indlela yokuphalaza i-DC magnetron yezinto ezisetshenziswayo ze-magnetic, ukuphalaza i-magnetron kunzima kakhulu. Ngakho-ke, ama-CT target analokho okubizwa ngokuthi “uhlobo lwe-gap target” asetshenziselwa ukulungiselela ama-target anjalo. Isimiso siwukusika izikhala eziningi ebusweni bezinto ezisetshenziswayo ukuze uhlelo lwe-magnetic lukhiqizwe ebusweni be-magnetic material target ukuvuza kwensimu kazibuthe, ukuze ubuso obusetshenziswayo bukwazi ukwakha insimu kazibuthe eqondile futhi kufezwe injongo yefilimu yokuphalaza i-magnetron. Kuthiwa ubukhulu balobu buchwepheshe bungafinyelela ku-20mm.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Jan-24-2024