Ukwaleka kwe-Ion kuthetha ukuba izinto ezisabelayo okanye izinto ezikhutshwa ngumphunga zifakwe kwi-substrate ngebhombu ye-ion yeeyoni zegesi okanye izinto ezikhutshwa ngumphunga ngelixa izinto ezikhutshwa ngumphunga zihlulwe okanye zikhutshwe igesi kwigumbi lokufunxa. Umgaqo wobugcisa wezixhobo zokugquma i-cathode elukhuni yi-cathode ion yokwaleka, eyitekhnoloji ye-cathode yokukhupha itekhnoloji.
Malunga nomgaqo wokukhutshwa kwe-cathode yokukhutshwa kwe-cathode evulekileyo: Indlela yokukhutshwa kwe-cathode evulekileyo isebenzisa ukukhutshwa kwe-cathode eshushu ukuvelisa i-plasma beam, kwaye i-cathode yityhubhu ye-tantalum engenanto. I-cathode kunye ne-anode encedisayo isondelene, ezi zibonda ezimbini ezitshisa ukukhutshwa kwe-arc.
Umpu wokukhupha i-cathode ongenanto uvutha ngeendlela ezimbini.
1, Ukusetyenziswa kwentsimi yombane yamatyeli aphezulu asetyenziswa kwityhubhu ye-cathode tantalum, ukuze i-cathode tantalum ityhubhu ye-argon ionization yegesi ibe yi-argon ion kwaye ibangelwe yityhubhu ye-tantalum ye-cathode ngokuqhubekayo iqhunyiswa yi-argon ion, de ubushushu ukufudumala ukuya kwinqanaba eliphantsi lobushushu be-electron emission kunye nokuvelisa i-plasma.
I-2, kwi-anode encedisayo kunye ne-cathode tantalum tube phakathi kokusetyenziswa kwe-voltage ye-300V DC, ityhubhu ye-cathode tantalum isadlula kwi-argon gas, kwi-1Pa-10Pa i-argon yoxinzelelo lwegesi ye-argon, i-anode encedisayo kunye ne-cathode tantalum tube glow discharge phenomenon, isizukulwana se-tantalum yebhobhobhobhobhobhobhobhobhobhobhobhobhobho rhoqo de kube yi-argon bombard. Ubushushu be-2300K-2400K, ityhubhu ye-cathode tantalum ikhupha inani elikhulu leelektroni, iya kutshintshwa ukusuka kwi-"glow discharge" ukuya kwi "arc discharge", ngeli xesha i-voltage iphantsi njenge-30V-60V, ngoko nje i-cathode kunye ne-anode phakathi kokunikezelwa kwamandla, unokuvelisa i-electron beam ye-plasma.
Izixhobo zokugquma kweCathodic
1, Ukuphucula ukwakhiwa kompu, ukusuka kowona mkhulu wangoku we-230A ukuya kuma-280A.
2, Ukuphucula inkqubo yokupholisa yesakhiwo sokuqala, ukusuka kwi-4 ℃ yoqobo yokupholisa umatshini wamanzi omkhenkce ukuya kwindawo yokushisa yokupholisa amanzi okupholisa, ukugcina iindleko zombane kubasebenzisi.
I-3, Ukuphucula i-original mechanical transmission structure, itshintshelwe kwi-magnetic fluid transmission structure, ubushushu obuphezulu abuyi kujongisa isakhelo esijikelezayo.
I-4, indawo yokwaleka esebenzayo ￠ 650X1100, inokwamkela i-750 X 1250X600 enkulu yokufa kunye nabavelisi bezixhobo ze-broach eyongezelelweyo, enomthamo omkhulu kakhulu.
Umatshini wokugquma we-cathode ion usetyenziswa ikakhulu ekubekweni kwezixhobo, ukubumba, ukubumba okukhulu kwesipili, ukubumba kweplastiki, iimela zokuhombisa kunye nezinye iimveliso.
Ixesha lokuposa: Nov-07-2022