Indima yeMagnetic Field kwiMagnetron Sputtering

I-Magnetron sputtering ikakhulu ibandakanya ukuthuthwa kweplasma, ukuchongwa kwethagethi, ukufakwa kwefilimu encinci kunye nezinye iinkqubo, indawo yamagnetic kwinkqubo yokutshiza imagnetron iya kuba nefuthe. Kwi-magnetron sputtering system plus orthogonal magnetic field, ii-electron ziphantsi kwendima ye-Lorentz force kwaye zenze i-spiral trajectory intshukumo, kufuneka zityhutyhe rhoqo ukuze zihambe ngokuthe ngcembe kwi-anode, ngenxa yongquzulwano yenza inxalenye yee-electron ukufikelela kwi-anode emva kokuba amandla amancinci, ubushushu bebhombu kwi-substrate abuyiyo enkulu. Ukongeza, ngenxa yothintelo lwe-elektroni kwithagethi yomhlaba wemagnethi, kumphezulu ekujoliswe kuwo wempembelelo kazibuthe yommandla ongaphakathi komgaqo weenqwelo-moya, olu luhlu luncinci lwengingqi loxinaniso lwe-electron luphezulu kakhulu, kwaye kwimpembelelo yemagnethi yommandla ongaphandle komphezulu we-substrate, ngakumbi kude nemagnethi kufuphi nomphezulu, ugxininiso lwe-electron ngenxa yokusasazwa kwe-elektroni esezantsi kakhulu kunye neemeko ezilinganayo zokuhambisa i-dipos esebenzayo, kunye ne-diposputer esebenza phantsi kweemeko ezimbini. Umahluko woxinzelelo lomyalelo wobukhulu). Ukuxinana okuphantsi kwee-electron ezibetha umphezulu we-substrate, ukwenzela ukuba ibhombu ye-substrate ebangelwa ukunyuka kobushushu obuphantsi, eyona ndlela iphambili ye-magnetron sputtering substrate yokunyuka kweqondo lokushisa liphantsi. Ukongeza, ukuba kukho intsimi yombane kuphela, ii-electron zifikelela kwi-anode emva komgama omfutshane kakhulu, kwaye amathuba okungqubana negesi esebenzayo yi-63.8% kuphela. Kwaye ukongeza intsimi kazibuthe, ii-electron kwinkqubo yokufudukela anode ukwenza intshukumo spiral, intsimi kazibuthe ebotshelelwe kunye nokwandisa trajectory eelektroni, kakhulu ukuphucula amathuba ukungqubana elektroni kunye neegesi ezisebenzayo, nto leyo ekhuthaza kakhulu ukwenzeka ionization, ionization kwaye emva koko ukuvelisa i-elekhtrons kwakhona ukujoyina inkqubo yokungqubana kwe-collision ye-collision eninzi, i-canbability eyandayo, i-protection ye-collision, ukusetyenziswa okusebenzayo kwamandla eelektroni, kwaye ngaloo ndlela ekubunjweni koxinzelelo oluphezulu Ubuninzi be-plasma buyanda ekuphumeni kokukhanya okungaqhelekanga kweplasma. Izinga lokufafaza ngaphandle kweeathom ukusuka koko kujoliswe kuko nalo linyukile, kwaye ukuchaphaza okujoliswe kuko okubangelwa kukubhobhoza kwethagethi koko kujoliswe kuko ngeeyoni ezilungileyo kusebenza ngakumbi, nto leyo esisizathu sezinga eliphezulu le-magnetron sputtering deposition. Ukongeza, ubukho bemagnethi bunokwenza inkqubo yokutshiza isebenze kuxinzelelo lomoya oluphantsi, i-1 ephantsi yoxinzelelo lomoya inokwenza i-ion kwingingqi yesheath yomaleko ukunciphisa ungquzulwano, ibhombu ekujoliswe kuyo ngamandla amakhulu ekinetic, kunye nosuku lokukwazi ukunciphisa iiathom ekujoliswe kuzo kunye nokungqubana kwerhasi engathathi hlangothi, ukunqanda i-athomu ejoliswe ngasemva ukuya kwisixhobo esijoliswe kwi-athomu ejoliswe ngasemva. umphezulu, ukuphucula izinga kunye nomgangatho wokubekwa kwefilimu encinci.

Intsimi yamagnetic ekujoliswe kuyo inokuthintela ngokufanelekileyo i-electronic trajectory, ethi ichaphazele iipropathi zeplasma kunye ne-ioning ye-ion ekujoliswe kuyo.

Umkhondo: ukwandisa ukufana kwethagethi yemagnethi ekujoliswe kuyo kunokwandisa ukufana kwendawo ekujoliswe kuyo, ngaloo ndlela kuphuculwe ukusetyenziswa kwezinto ekujoliswe kuzo; Ukuhanjiswa kwentsimi ye-electromagnetic efanelekileyo kunokuphucula ngokufanelekileyo uzinzo lwenkqubo yokutshiza. Ke ngoko, kwithagethi ye-magnetron sputtering, ubungakanani kunye nokuhanjiswa kwemagnethi kubaluleke kakhulu.

–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua