Ku soo dhawoow Guangdong Zhenhua Technology Co., Ltd.
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Hordhac Farsamooyinka Caadiga ah ee Dhigashada Dahaarka Adag

Isha maqaalka:Zhenhua vacuum
Akhri:10
La daabacay:23-04-28

1. Farsamada CVD kulaylka

Dahaarka adag inta badan waa daahan dhoobada bir ah (TiN, iwm), kuwaas oo ka samaysan falcelinta birta ee daahan iyo falcelinta gaas.Markii hore, tignoolajiyada kulaylka ee CVD waxaa loo isticmaalay in lagu bixiyo tamarta firfircoonida ee falcelinta isku dhafka tamarta kulaylka heerkul sare oo 1000 ℃ ah.Heerkulkani wuxuu kaliya ku habboon yahay in la dhigo TiN iyo dahaarka kale ee adag ee qalabka carbide sibidhka.Ilaa hadda, weli waa tignoolajiyada muhiimka ah in lagu shubo TiN-Al20 dahaarka isku dhafan ee madaxyada qalabka carbide ee sibidhka ah.

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2. Dahaarka ion cathode godan iyo dahaarka arc ion silig kulul

Sannadihii 1980-aadkii, dahaarka cathode ion ee godan iyo daahan siligga kulul ee arc ion ayaa loo isticmaalay in lagu xareeyo qalabka goynta dahaarka leh.Labadan tikniyoolajiyada daahan ion-ka ah waa tikniyoolajiyadda dahaarka arc ee daahan, oo leh heerka ionization birta ilaa 20% ~ 40%.

3. Cathode arc ion daahan

Soo ifbaxa qulqulka cathodic arc ion ayaa horseeday horumarinta tignoolajiyada kaydinta dahaarka adag ee caaryada.Heerka ionization ee daahan cathodic arc ion waa 60% ~ 90%, taasoo u oggolaanaysa tiro badan oo ah biraha birta ah iyo ion gaaska falcelinta si ay u gaaraan dusha sare ee workpiece oo weli sii wadaan dhaqdhaqaaqa sare, taasoo keentay in dhigaalka falcelinta iyo samaynta daahan adag sida. TiNWaqtigan xaadirka ah, tignoolajiyada dahaarka cathodic arc ion waxaa inta badan loo isticmaalaa in lagu shubo dahaarka adag ee caaryada.

Isha cathode arc waa il uumi-dhal ah oo adag oo aan lahayn barkad dhalaalaysa oo go'an, iyo booska isha arc waxaa loo dhigi karaa si sabab la'aan ah, hagaajinta heerka isticmaalka booska qolka dahaarka iyo kordhinta awoodda rarka foornada.Qaababka ilaha cathode arc waxaa ka mid ah ilo yar oo cathode ah oo wareeg ah, ilaha arc ee tiirarka, iyo ilo fidsan oo waaweyn oo leydi ah.Qaybaha kala duwan ee ilaha yar yar ee arc, ilaha arc ee tiirarka, iyo ilaha waaweyn ee arc ayaa si gooni ah loo habayn karaa si loo dhigo filimo lakabyo badan iyo filimo badan oo nano ah.Dhanka kale, ay sabab u tahay heerka sare ee ionization biraha ee daahan cathodic arc ion, ions biraha nuugi karaan gaasaska falcelin dheeraad ah, taasoo keentay in kala duwan ee geedi socodka ballaaran iyo hawlgalka fudud si aad u hesho daahan adag aad u fiican.Si kastaba ha ahaatee, waxaa jira dhibco qallafsan oo ku jira qaab-dhismeed yar oo lakabka daahan ah oo laga helay daahan cathodic arc ion.Sanadihii la soo dhaafay, teknoolojiyad cusub oo badan ayaa soo baxay si loo nadiifiyo qaab dhismeedka lakabka filimka, taas oo wanaajisay tayada filimka dahaarka arc ion.

——Maqaalkan waxaa sii daayay Guangdong Zhenhua Technology, asoo saaraha mashiinada daahan indhaha.


Waqtiga boostada: Abriil-28-2023