Mhedzisiro yeMaitiro Akasiyana Ekubuda Mukati meMachira

Mukuita kwekuputira vacuum, chimiro che microfilms thin films chinoita basa rakakosha pakuona hunhu hwadzo hwemuchina, mashandiro e optical, uye kuramba ngura. Chimiro che microfilms chinonyanya kukanganiswa nezvinhu zvakaita sekuwanda kwefirimu, saizi ye grain, stress state, uye surface roughness. Aya ma parameter, zvakare, anonyanya kudzorwa ne discharge mode inoshandiswa panguva ye deposition. Ma discharge modes anonyanya kushandiswa mu thin film deposition ndeaya Direct Current (DC) discharge, Radio Frequency (RF) discharge, Medium Frequency (MF) discharge, uye Pulsed DC discharge. Imwe neimwe yeaya discharge modes inokanganisa hunhu hweplasma uye kugoverwa kwesimba, izvo zvinokanganisa zvikuru microstructure ye deposited film. Chinyorwa chino chinotaura kuti discharge modes dzakasiyana dzinokanganisa sei grain morphology, kufanana kwefirimu, stress state, uye firimu density.

Kubuda Kwemagetsi Kwakananga (DC) uye Mhedzisiro Yayo Pamagadzirirwo Emafirimu

Kuburitsa DC ndiyo imwe yenzira dzinonyanya kushandiswa pakuburitsa masimbi, kunyanya pakuburitsa mafirimu esimbi. Kuburitsa DC kunoshanda nekugadzira munda wemagetsi pakati pechinhu chakanangana nechinhu chakabatana nacho, zvichiita kuti maerekitironi nemaion zviroverane zvoisa zvinhu pachinhu chakabatana nacho.

Zvimiro zveUnyanzvi:

Kukwira kwemvura kwakanyanya: Kwakakodzera kukurumidza kuisa mafirimu esimbi.

Kuwanda kweplasma kwakaderera: Mhedzisiro mumafirimu ane saizi yakakura uye chimiro chakaomarara.

Kushushikana kwakanyanya: Kushushikana kwemukati mefirimu kunogona kunge kwakakwira, izvo zvinogona kukanganisa kunamira uye kugara kwenguva refu kwefirimu.

Mhedzisiro paMicrostructure:

Saizi yezviyo: Kubuda kweDC kunowanzo konzera mafirimu ane saizi huru dzezviyo.

Kuwanda kwemafirimu: Firimu iri rinowanzova risina kusimba, riine maburi uye maburi anogona kudonha.

Kushushikana kwemukati: Firimu iri rinowanzo ratidza kushushikana kwemukati kwakanyanya, izvo zvinogona kutungamira kumatambudziko akadai sekubvisa ganda kana kukanganiswa mune mamwe mashandisirwo.

Kubuda kweRadio Frequency (RF) uye Mhedzisiro Yayo paMicrostructure yeFirimu

Kuburitsa RF kunoshandisa magetsi anochinja-chinja ane mafrequency akawanda kugadzira plasma, uye kunonyanya kushandiswa pakubvisa zvinhu zvinodzivirira kupisa zvakaita sema oxides nema nitrides. Kuburitsa RF kunobatsira pakubvisa flue isina kufambisa mvura nekuti inodzivirira kuungana kwechaja pachinangwa, zvichiita kuti plasma igare yakasimba.

Zvimiro zveUnyanzvi:

Kuwanda kweplasma: Zvinoita kuti pave nekuputira kwakafanana.

Yakakodzera zvinhu zvisingafambise mhepo: Kuburitsa RF kwakanakira kushandisa zvinhu zvinodzivirira kupisa senge ma oxides nema nitrides.

Kuderera kwekuiswa kwemvura: Nekuda kwesimba rakaderera rekubuda kwemvura, kuburitswa kweRF kunowanzoita kuti huwandu hwekuiswa kwemvura huve hwakaderera.

Mhedzisiro paMicrostructure:

Saizi yetsanga: RF discharge inogadzira mafirimu ane tsanga diki, izvo zvinowedzera huwandu hwemafirimu uye mashandiro ekuona.

Kushushikana: Firimu iri rinowanzova nekushushikana kwemukati kwakaderera, sezvo kufanana kweplasma kunoderedza kusiyana kwekushushikana.

Hunhu hwepamusoro: Firimu iri rinowanzova nepamusoro pakanyatsotsvedzerera, zvichiita kuti rive rakakodzera machira e optical, ma dielectric films, uye ma workable thin films.

Kubuda Kwenguva Yepakati (MF) uye Mhedzisiro Yayo Pamagadzirirwo Emafirimu

Kuburitsa MF kunoshanda pakati pe10–200 kHz uye kunowanzo shandiswa mukugadzira simbi uye mukuita kuti flue ishande. Kuburitsa MF kunogadzira plasma yakasimba pasi pesimba rakawanda uye kunokwanisa kupa mwero wepamusoro wekuisa plasma.

Zvimiro zveUnyanzvi:

Kuwanda kwesimba: Kunobvumira kukurumidza kuisa mapombi uye mhedzisiro yakasimba yekudonha kwemvura.

Kurasikirwa kwe ionization kushoma: Kana tichienzanisa nekubuda kweRF, kubuda kweMF kunoita kuti kurasikirwa kwe ionization kuve kushoma, zvichiita kuti kushanda zvakanaka kwekuisa ionization kuve nani.

Kuwanda kwemafuta anobuda: MF discharge yakakodzera machira ekugadzira munzvimbo huru mumaindasitiri.

Mhedzisiro paMicrostructure:

Saizi yetsanga: Firimu iri rinowanzo ratidza tsanga diki uye huwandu hwadzo huri nani.

Kufanana: Mafirimu anoiswa neMF discharge anowanzova nechimiro chakafanana.

Kushushikana: Nekuda kwehuwandu hwesimba rakawanda, mafirimu eMF anoburitsa zvinhu anoratidza kushushikana kwakaderera kwemukati, izvo zvinoita kuti pamusoro payo pave nerunako uye kushanda zvakanaka kwekuisa zvinhu.

Kubuda kweDC kwakapwanyika uye mhedzisiro yayo pakugadzirwa kwemafirimu

Kuburitsa simba remagetsi rinoita se "pulsed DC discharge" inzira inosanganisira kudzora simba remagetsi rinoshandisa "pulsed power supply control", rinowanzoshandiswa mukushandiswa kwema "ion bombardment" ane simba guru. Iyi nzira yekuburitsa simba inonyanya kubatsira pakuwana huwandu hwakawanda hwema "ion" uye mhedzisiro inoshanda ye "sputtering", ukuwo ichipawo mwero wepamusoro we "deposition".

Zvimiro zveUnyanzvi:

Simba rekufema: Simba repamusoro-soro panguva yekufema rinoita kuti pave nehuwandu hwakawanda hwekuisa mweya.

Kudzikiswa kwearc kwakavandudzwa: Kubuda kweDC kwakapwanyika kunobatsira kuderedza mhedzisiro yearc, izvo zvinobatsira zvikuru pakubuda kwearc nesimba guru.

Kushanda zvakanaka kwekubvisa mapombi: Kuburitsa mapombi eDC anopusha simba zvishoma, zvichipa simba rakawanda rekubvisa mapombi nekushandisa simba shoma.

Mhedzisiro paMicrostructure:

Saizi yetsanga: Mafirimu anogadzirwa ne pulsed DC discharge anowanzova nesaizi yetsanga iri pakati nepakati, achienzanisa huwandu hwemafirimu uye hunoenderana.

Kunamatira mufirimu: Mafirimu anowanzo ratidza kunamatira kwakasimba kune substrate, nekuda kwekuputirwa kwemaion ane simba rakawanda.

Kusapfeka: Mafirimu eDC ane pulsed anowanzo ratidza kusapfeka zvakanaka nekuda kwekuputirwa kwemaion akawanda panguva yekuiswa.

Kuenzanisa kweMaitiro Ekuburitsa Zvinhu paFirimu Microstructure