Ngā Pānga o ngā Aratau Tukunga Rerekē ki te Hanganga Moroiti o ngā Paninga

I roto i te tukanga paninga korehau, he mea nui te hanganga moroiti o ngā kiriata angiangi ki te whakatau i ō rātou āhuatanga miihini, te mahi whatu, me te ātete ki te waikura. Ko te hanganga moroiti te mea nui e pāngia ana e ngā āhuatanga pēnei i te kiato kiriata, te rahi o te witi, te āhua ahotea, me te taratara o te mata. Ko ēnei tawhā, i te taha, ka whakahaerea nuitia e te aratau tukunga e whakamahia ana i te wā e whakatakotoranga ana. Ko ngā aratau tukunga e whakamahia whānuitia ana i roto i te whakatakotoranga kiriata angiangi ko te tukunga Auaha Tika (DC), te tukunga Auautanga Reo Irirangi (RF), te tukunga Auautanga Waenga (MF), me te tukunga DC Pulsed. Ka pāngia ia o ēnei aratau tukunga e ngā āhuatanga plasma me te tohatoha pūngao, e pā nui ana ki te hanganga moroiti o te kiriata kua whakatakotoria. Ka matapakihia e tēnei tuhinga te pānga o ngā momo tukunga rerekē ki te āhua o te witi, te ōritetanga o te kiriata, te āhua ahotea, me te kiato o te kiriata.

Te Tukunga o te Auaha Tika (DC) me tōna Pānga ki te Hanganga Moroiti o te Kiriata

Ko te tukunga hiko DC tētahi o ngā tikanga pupuhi hiko e whakamahia whānuitia ana, inā koa i roto i te whakatakotoranga o ngā kiriata whakarewa. Ka mahi te tukunga hiko DC mā te waihanga i tētahi papa hiko i waenganui i te ūnga me te papa, ka meinga ngā irahiko me ngā katote kia tukinga, ka whakatakotoranga rauemi ki runga i te papa.

Ngā Āhuatanga Hangarau:

Te tere o te ruirui: He pai mō te whakatakotoranga tere o ngā kiriata whakarewa.

He iti te mātotoru o te parāoa toto: Ka puta he kiriata he nui te rahi o ngā kōpura, ā, he taratara te hanganga.

Te ahotea toenga teitei: Ka tino teitei te ahotea o roto i te kiriata, ka pā pea tēnei ki te piri me te roa o te kiriata.

Ngā Pānga ki te Hanganga Moroiti:

Rahi o te witi: Ko te tukunga DC ka hua ake he kiriata me ngā rahi witi nui ake.

Kiato o te kiriata: He iti ake te kiato o te kiriata, ā, tera pea he pūngao me ngā āputa.

Te ahotea ā-roto: He nui ake te ahotea ā-roto o te kiriata, ka ara ake pea tēnei i ngā take pēnei i te wehewehe, te piko rānei i ētahi whakamahinga.

Te Tukunga Auautanga Reo Irirangi (RF) me tōna Pānga ki te Hanganga Moroiti Kiriata

Ka whakamahia e te tukunga RF ngā mara hiko tauutuutu auau-tiketike hei whakaputa i te plasma, ā, e whakamahia whānuitia ana mō te whakapūpū i ngā rauemi ārai pēnei i ngā waikura me ngā nitride. He pai te tukunga RF mō te whakapūpū ūnga kore-arataki nā te mea ka karohia te kohikohi utu ki runga i te ūnga, ka whakarite kia pumau te whakaputanga plasma.

Ngā Āhuatanga Hangarau:

Te mātotorutanga o te parāoa toto: Ka hua ake he paninga ōrite ake.

He pai mō ngā ūnga kore-arahi: He tino pai te tukunga RF mō te pupuhi i ngā rauemi ārai pēnei i ngā waikura me ngā nitride.

Te tere whakatakotoranga iti iho: Nā te iti o te kaha pupuhi, ka puhoi ake te tere whakatakotoranga i te nuinga o te wā ka puta mai i te tukunga RF.

Ngā Pānga ki te Hanganga Moroiti:

Rahi o te witi: Ka puta he kiriata iti ake te rahi o te witi mā te tukunga RF, ka whakarei ake i te kiato o te kiriata me te mahi whatu.

Taumahatanga: He iti ake te taumahatanga o roto o te kiriata, nā te mea ka whakaitihia e te ōritetanga o te parāoa te rerekētanga o te taumahatanga.

Kounga mata: He maeneene ake te mata o te kiriata, he mea tino pai mō ngā paninga whatu, ngā kiriata dielectric, me ngā kiriata angiangi mahi.

Te Tukunga Auau Waenga (MF) me tōna Pānga ki te Hanganga Moroiti Kiriata

Ka mahi te tukunga MF i waenga i te 10–200 kHz, ā, he mea noa te whakamahi i roto i ngā paninga whakarewa me ngā tukanga pupuhi tauhohe. Ka whakaputa te tukunga MF i te plasma kaha ake i raro i ngā āhuatanga mana teitei ake, ā, ka taea te tuku i ngā reiti whakatakotoranga teitei ake.

Ngā Āhuatanga Hangarau:

Te mātotorutanga mana teitei ake: Ka taea te tere ake o ngā reiti whakatakotoranga me te kaha ake o ngā pānga pupuhi.

He iti ake ngā ngaronga ionization: Ki te whakatauritea ki te tukunga RF, he iti ake ngā ngaronga ionization e hua ake ana i te tukunga MF, ka pai ake te pai o te whakatakotoranga.

Te tere whakatakotoranga teitei: He pai te tukunga MF mō ngā paninga rohe nui i roto i te whakaputanga tauine ahumahi.

Ngā Pānga ki te Hanganga Moroiti:

Rahi o te witi: He iti ake ngā rahi o te witi i te nuinga o te wā, ā, he pai ake te matotoru o te kiri.

Te ōritetanga: Ko ngā kiriata i whakatakotoria me te tukunga MF he rite tonu te hanganga moroiti.

Taumahatanga: Nā te kaha o te mana, he iti ake te taumahatanga o roto o ngā kiriata tukunga MF, ā, ka pai ake te kounga o te mata me te pai o te whakatakotoranga.

Te Tukunga DC Pāhekoheko me tōna Pānga ki te Hanganga Kiriata

Ko te tukunga hiko pāorooro he tikanga e whakamahi ana i te mana whakahaere hiko pāorooro, e whakamahia ana i roto i ngā tono pupuhi katote kaha-teitei. He tino whai hua tēnei aratau tukunga mō te whakatutuki i te kiato katote teitei ake me ngā pānga pupuhi pai ake, me te whakarato hoki i te tere whakatakotoranga teitei ake.

Ngā Āhuatanga Hangarau:

Mana pāorooro: Mā te mana tihi teitei i te wā o ngā pāorooro ka taea ai ngā reiti whakatakotoranga teitei.

Te pehi pewa kua whakapaitia: Ka āwhina te tukunga DC pāorooro ki te whakaiti i ngā pānga pewa, he mea tino pai mō te pupuhi mana-tiketike.

Te pai o te pupuhi: He pai ake te penapena pūngao o te tukunga DC pulsed, he nui ake ngā reiti pupuhi me te iti o te whakapaunga hiko.

Ngā Pānga ki te Hanganga Moroiti:

Rahi o te witi: Ko ngā kiriata i hangaia e te tukunga DC pulsed he rahi witi waenga te nuinga, he taurite te kiato kiriata me te ōritetanga.

Te piri o te kiriata: He kaha te piri o ngā kiriata ki te papa, nā te pupuhitanga o te katote pūngao-tiketike.

Ātete kakahu: He maha ngā wā ka whakaatuhia e ngā kiriata DC pāorooro te ātete kakahu pai ake nā te nui o te pupuhi katote i te wā e whakatakotoranga ana.

Te Whakataurite i ngā Aratau Tukunga i runga i te Hanganga Kiriata