Ingaruka z'uburyo butandukanye bwo gusohora amazi ku miterere mito y'amabati

Mu gikorwa cyo gusiga irangi ry’ingufu, imiterere mito ya firime nto igira uruhare runini mu kugena imiterere yazo, imikorere y’urumuri, no kudahura n’ingufu. Imiterere mito iterwa ahanini n’ibintu nk’ubucucike bwa firime, ingano y’ibinyampeke, imiterere y’umuvuduko, n’ubukana bw’ubuso. Ibi bipimo, ahanini bigengwa n’uburyo bwo gusohora bukoreshwa mu gihe cyo gushyiramo firime nto. Uburyo bukoreshwa cyane mu gushyiramo firime nto ni Direct Current (DC), Radio Frequency (RF), Medium Frequency (MF), na Pulsed DC discharge. Buri buryo bwo gusohora firime bugira ingaruka ku miterere ya plasma n’ikwirakwizwa ry’ingufu, ibyo bigira ingaruka ku miterere mito ya firime yashyizwemo. Iyi nkuru ivuga ku buryo uburyo butandukanye bwo gusohora firime bugira ingaruka ku miterere y’ibinyampeke, imiterere y’ibinyampeke, imiterere y’umuvuduko, n’ubucucike bwa firime.

Isohoka ry'umuyoboro w'amashanyarazi utaziguye (DC) n'ingaruka zaryo ku miterere mito ya firime

Gusohora DC ni bumwe mu buryo bukoreshwa cyane mu gusohora amazi, cyane cyane mu gushyira filime z'icyuma. Gusohora DC bikora binyuze mu gukora amashanyarazi hagati y'ikintu kigamije n'icyangiritse, bigatuma electron na iyoni bihurirana bigashyira ibintu kuri substrate.

Ibiranga tekiniki:

Igipimo cyo gusukamo amazi kiri hejuru: Bikwiriye ko ibyuma bishyirwamo ibyuma vuba.

Ubucucike buke bwa plasma: Biboneka muri firime zifite ingano nini kandi zifite imiterere igoye.

Imihangayiko myinshi isigara: Imihangayiko y'imbere muri firime ishobora kuba myinshi, ibi bikaba byagira ingaruka ku gufatana no kuramba kwa firime.

Ingaruka ku miterere mito:

Ingano y'ibinyampeke: Gusohora amazi muri DC bikunze gutuma habaho uduce duto tw'ibinyampeke binini.

Ubucucike bwa firime: Ubusanzwe firime iba ifite ubucucike buke, ishobora kugira imyenge n'ubusa.

Imihangayiko y'imbere: Iyi filime ikunze kugaragaza imihangayiko myinshi y'imbere, ishobora gutera ibibazo nko gucikamo ibice cyangwa kugorana mu mikoreshereze imwe n'imwe.

Isohoka rya Radio Frequency (RF) n'ingaruka zaryo ku miterere mito ya firime

Gusohora RF bikoresha amashanyarazi asimburana cyane kugira ngo bikore plasma, kandi bikunze gukoreshwa mu gusohora ibikoresho bikingira nk'ibinyabutabire na nitride. Gusohora RF ni ingirakamaro mu gusohora amashanyarazi adakoresha amashanyarazi kuko birinda gusharira ku ntego, bigatuma plasma ikora neza.

Ibiranga tekiniki:

Ubucucike bwinshi bwa plasma: Bituma habaho irangi ringana.

Bikwiriye ahantu hatagerwa n'amashanyarazi: Gusohora RF ni byiza cyane mu gukoresha ibikoresho bikingira nk'ibinyabutabire na nitride.

Igipimo cyo gusohora amazi kiri hasi: Bitewe n'imbaraga nke zo gusohora amazi, gusohora amazi mu buryo bwa RF bikunze gutuma igipimo cyo gusohora amazi kiri hasi.

Ingaruka ku miterere mito:

Ingano y'ibinyampeke: RF isohora filime zifite ibinyampeke bito, ibyo bikaba byongera ubucucike bwa filime n'imikorere y'urumuri.

Stress: Ubusanzwe iyi filime igira stress nke imbere, kuko plasma ingana igabanya ihindagurika ry'stress.

Ubwiza bw'ubuso: Iyi filime ikunda kugira ubuso bworoshye, bigatuma iba nziza cyane ku bijyanye no gusiga irangi ry'urumuri, filime za dielectric, n'filime ntoya zikora neza.

Gusohora Ingufu Ziciriritse (MF) n'Ingaruka Zazo ku Miterere ya Filimi

Gusohora MF bikora hagati ya 10–200 kHz kandi bikunze gukoreshwa mu gusiga ibyuma no mu buryo bwo gusohora sputtering. Gusohora MF bikora plasma ikomeye mu gihe cy'imbaraga nyinshi kandi bishobora gutanga igipimo cyo hejuru cyo gushyiramo plasma.

Ibiranga tekiniki:

Ubucucike bw'ingufu nyinshi: Bituma habaho kwihuta kw'ibicuruzwa bishyirwa mu kirere ndetse n'ingaruka zikomeye zo kugisukamo.

Kugabanuka k'igihombo cya ionization: Ugereranije n'igihombo cya RF, igihombo cya MF gitera igihombo gito cya ionization, bigatuma imikorere y'ibice bishyirwa mu kirere irushaho kuba myiza.

Igipimo cyo hejuru cyo gushyiramo: Gusohora MF birakwiriye gukoreshwa mu gusiga irangi rinini mu nganda.

Ingaruka ku miterere mito:

Ingano y'ibinyampeke: Ubusanzwe agahu kagaragaza ibinyampeke bito kandi bifite ubucucike bwiza.

Ubusa: Filimi zibitswe hamwe n'imyanda ya MF muri rusange ziba zifite imiterere imwe.

Stress: Bitewe n'ubucucike bw'ingufu nyinshi, filime zo gusohora MF zigaragaza stress nkeya imbere, ibyo bigatuma ubuso burushaho kuba bwiza kandi bugatuma ibintu birushaho kuba byiza.

Isohoka rya DC rikozwe mu buryo bwa Pulsed n'ingaruka zaryo ku miterere mito ya filime

Gusohora amashanyarazi hakoreshejwe pulsed DC ni uburyo bukoresha uburyo bwo kugenzura amashanyarazi hakoreshejwe pulsed, bukunze gukoreshwa mu gukoresha ion nyinshi. Ubu buryo bwo gusohora amashanyarazi ni ingirakamaro cyane mu kugera ku bucucike bwinshi bwa ion no kugira ingaruka nziza zo gusohora amashanyarazi, ndetse bunatanga igipimo cyo hejuru cyo gushyiramo amashanyarazi.

Ibiranga tekiniki:

Ingufu ziterwa n'umuvuduko: Ingufu ziterwa n'umuvuduko mwinshi mu gihe cy'imivuduko zituma habaho igipimo cyo hejuru cyo gushyiramo umuvuduko.

Kugabanya umuvuduko w'umuvuduko: Gusohora umuvuduko wa DC bifasha kugabanya ingaruka zo gukubita umuvuduko, ibyo bikaba ingirakamaro cyane cyane mu gukubita umuvuduko w'umuvuduko mwinshi.

Ubushobozi bwo gusohora amazi: Gusohora amazi hakoreshejwe DC bikoresha ingufu nke, bitanga ingufu nyinshi kandi ikoreshwa ry'amashanyarazi riciriritse.

Ingaruka ku miterere mito:

Ingano y'ibinyampeke: Filimi zikorwa na pulsed DC discharge muri rusange zifite ubunini buringaniye bw'ibinyampeke, zipima ubucucike bwa firime n'uburyo bumwe.

Gufatana kwa firime: Ubusanzwe firime zigaragaza gufatana gukomeye kuri substrate, bitewe n'ingufu nyinshi za iyoni.

Ubudahangarwa: Filimi za DC zirimo pulsed zikunze kugaragaza ubudahangarwa bwiza bitewe n'uko iyoni nyinshi zikwirakwira mu gihe cyo kuzishyira mu mwanya wazo.

Kugereranya uburyo bwo gusohora filime ku miterere mito ya firime