Hauv cov txheej txheem nqus tsev, cov qauv me me ntawm cov yeeb yaj kiab nyias ua lub luag haujlwm tseem ceeb hauv kev txiav txim siab lawv cov khoom siv kho tshuab, kev ua haujlwm pom kev, thiab kev tiv thaiv corrosion. Cov qauv me me feem ntau cuam tshuam los ntawm cov yam xws li qhov ceev ntawm zaj duab xis, qhov loj ntawm cov noob, lub xeev kev ntxhov siab, thiab qhov roughness ntawm qhov chaw. Cov kev ntsuas no, feem ntau, yog tswj hwm los ntawm hom kev tso tawm uas siv thaum lub sijhawm tso tawm. Cov hom kev tso tawm uas siv ntau tshaj plaws hauv kev tso tawm zaj duab xis nyias yog Kev Tso Tawm Tam Sim No (DC), Kev Tso Tawm Xov Tooj Cua Zaus (RF), Kev Tso Tawm Nruab Nrab Zaus (MF), thiab Kev Tso Tawm Pulsed DC. Txhua hom kev tso tawm no cuam tshuam rau cov yam ntxwv ntawm plasma thiab kev faib hluav taws xob, uas cuam tshuam rau cov qauv me me ntawm zaj duab xis tso tawm. Tsab xov xwm no tham txog yuav ua li cas cov hom kev tso tawm sib txawv cuam tshuam rau cov qauv noob, kev sib xws ntawm zaj duab xis, lub xeev kev ntxhov siab, thiab qhov ceev ntawm zaj duab xis.
Kev Tawm Tsam Tam Sim No (DC) thiab Nws Cov Nyhuv rau Cov Yeeb Yam Microstructure
DC discharge yog ib qho ntawm cov txheej txheem sputtering siv dav tshaj plaws, tshwj xeeb tshaj yog nyob rau hauv kev tso cov yeeb yaj kiab hlau. DC discharge ua haujlwm los ntawm kev tsim ib lub teb hluav taws xob ntawm lub hom phiaj thiab substrate, ua rau cov electrons thiab ions sib tsoo thiab tso cov khoom rau ntawm lub substrate.
Cov Nta Kev Txawj:
Tus nqi sputtering siab: Haum rau kev tso cov yeeb yaj kiab hlau sai.
Qhov ceev ntawm cov ntshav qis: Cov txiaj ntsig hauv cov yeeb yaj kiab nrog cov noob loj thiab cov qauv ntxhib dua.
Kev ntxhov siab ntau dhau: Kev ntxhov siab sab hauv zaj duab xis tuaj yeem siab heev, uas yuav cuam tshuam rau kev nplaum thiab kev ua haujlwm ntawm zaj duab xis.
Cov teebmeem ntawm Microstructure:
Qhov loj ntawm cov noob: DC tso tawm feem ntau ua rau cov yeeb yaj kiab nrog cov noob loj dua.
Zaj duab xis ceev: Zaj duab xis feem ntau tsis tshua ntom, nrog rau qhov porosity thiab voids.
Kev ntxhov siab sab hauv: Cov yeeb yaj kiab feem ntau ua rau muaj kev ntxhov siab sab hauv ntau dua, uas tuaj yeem ua rau muaj teeb meem xws li kev tawg lossis kev sib txhuam hauv qee daim ntawv thov.
Kev Tawm Tsam Xov Tooj Cua (RF) thiab Nws Cov Nyhuv rau Cov Yeeb Yam Microstructure
Kev tso tawm RF siv cov teb hluav taws xob hloov pauv ntau zaus los tsim cov plasma, thiab feem ntau siv rau kev sputtering cov ntaub ntawv rwb thaiv tsev xws li oxides thiab nitrides. Kev tso tawm RF yog qhov zoo rau kev sputtering tsis-conductive vim nws zam kev sib sau ua ke ntawm lub hom phiaj, ua kom ntseeg tau tias muaj kev tsim cov plasma ruaj khov.
Cov Nta Kev Txawj:
Qhov ceev ntawm cov ntshav siab dua: Ua rau muaj cov txheej txheem sib xws ntau dua.
Haum rau cov hom phiaj tsis conductive: RF discharge yog qhov zoo tagnrho rau sputtering insulating cov ntaub ntawv xws li oxides thiab nitrides.
Tus nqi tso tawm qis dua: Vim yog lub zog sputtering qis dua, RF tso tawm feem ntau ua rau cov nqi tso tawm qeeb dua.
Cov teebmeem ntawm Microstructure:
Qhov loj ntawm cov noob: RF tso tawm tsim cov yeeb yaj kiab nrog cov noob me dua, uas ua rau cov zaj duab xis ntom ntom thiab kev ua haujlwm pom kev zoo dua.
Kev Nyuaj Siab: Cov yeeb yaj kiab feem ntau muaj kev nyuaj siab sab hauv qis dua, vim tias qhov sib npaug ntawm cov plasma txo qhov kev hloov pauv ntawm kev ntxhov siab.
Qhov zoo ntawm qhov chaw: Cov yeeb yaj kiab feem ntau muaj qhov chaw du, ua rau nws zoo tagnrho rau cov txheej txheem kho qhov muag, cov yeeb yaj kiab dielectric, thiab cov yeeb yaj kiab nyias ua haujlwm.
Kev Tawm Tsam Nruab Nrab Zaus (MF) thiab Nws Cov Nyhuv rau Cov Yeeb Yam Microstructure
Kev tso tawm MF ua haujlwm nyob rau hauv qhov ntau ntawm 10–200 kHz thiab feem ntau siv rau hauv cov txheej txheem hlau thiab cov txheej txheem reactive sputtering. Kev tso tawm MF tsim cov plasma muaj zog dua nyob rau hauv cov xwm txheej muaj zog dua thiab muaj peev xwm xa cov nqi tso tawm siab dua.
Cov Nta Kev Txawj:
Lub zog ceev dua: Tso cai rau cov nqi tso tawm sai dua thiab muaj zog dua cov teebmeem sputtering.
Kev poob qis ionization: Piv rau RF tso tawm, MF tso tawm ua rau muaj kev poob qis ionization, txhim kho kev ua haujlwm ntawm kev tso tawm.
Tus nqi tso tawm siab: MF tso tawm yog qhov tsim nyog rau cov txheej txheem loj hauv kev tsim khoom lag luam.
Cov teebmeem ntawm Microstructure:
Qhov loj ntawm cov noob: Cov zaj duab xis feem ntau qhia txog cov noob me me thiab qhov ceev zoo dua.
Kev Sib Xws: Cov yeeb yaj kiab uas tso nrog MF tso tawm feem ntau muaj cov qauv microstructure sib xws dua.
Kev Nyuaj Siab: Vim yog qhov muaj zog ntau dua, MF cov yeeb yaj kiab tso tawm qhia txog kev nyuaj siab sab hauv qis dua, uas ua rau qhov zoo dua ntawm qhov chaw thiab kev ua haujlwm siab.
Pulsed DC Discharge thiab Nws Cov Nyhuv rau Film Microstructure
Kev tso tawm pulsed DC yog ib txoj kev siv uas muaj kev tswj hwm lub zog pulsed, feem ntau siv rau hauv cov ntawv thov ion bombardment uas muaj zog heev. Hom kev tso tawm no yog qhov tshwj xeeb tshaj yog rau kev ua tiav cov ion density siab dua thiab cov teebmeem sputtering zoo dua, thaum tseem muab cov nqi tso tawm siab dua.
Cov Nta Kev Txawj:
Lub zog pulsed: Lub zog siab tshaj plaws thaum lub sijhawm pulses ua rau muaj kev tso tawm siab.
Kev tiv thaiv arc zoo dua: Kev tso tawm pulsed DC pab txo cov teebmeem arcing, uas yog qhov tshwj xeeb tshaj yog rau cov hluav taws xob siab sputtering.
Kev ua haujlwm ntawm kev tawg: Kev tso tawm ntawm lub zog DC yog qhov txuag hluav taws xob ntau dua, muab cov nqi tawg siab nrog kev siv hluav taws xob tsawg.
Cov teebmeem ntawm Microstructure:
Qhov loj ntawm cov noob: Cov yeeb yaj kiab tsim los ntawm kev tso tawm DC feem ntau muaj qhov loj ntawm cov noob nruab nrab, sib npaug ntawm cov zaj duab xis ceev thiab kev sib xws.
Kev nplaum zaj duab xis: Cov yeeb yaj kiab feem ntau qhia txog kev nplaum zoo rau lub substrate, ua tsaug rau kev tawg ion zog siab.
Kev hnav tsis kam: Cov yeeb yaj kiab pulsed DC feem ntau qhia txog kev hnav tsis kam zoo dua vim yog qhov siab ion bombardment thaum lub sijhawm tso tawm.
Kev Sib Piv ntawm Cov Hom Kev Tawm Tsam ntawm Cov Yeeb Yam Microstructure
| Khoom sib piv | Kev Tso Tawm DC | Kev Tso Tawm RF | Kev Tso Tawm MF | Kev Tawm Dag Zog DC |
|---|---|---|---|---|
| Tus nqi sputtering | Siab | Qis | Siab | Siab |
| Qhov Ceev ntawm Plasma | Qis | Siab | Siab | Siab |
| Qhov Loj ntawm Cov Nplej | Loj | Me me | Me me | Nruab Nrab |
| Zaj duab xis ceev | Qis | Siab | Siab | Nruab Nrab |
| Kev Nyuaj Siab Sab Hauv | Siab | Qis | Qis | Qis |
| Qhov Zoo Ntawm Qhov Chaw | Rough | du | Cov khaub ncaws sib xws | Muaj zog |
| Daim Ntawv Thov Zoo Tshaj Plaws | Cov txheej txheem hlau | Cov yeeb yaj kiab kho qhov muag, dielectrics | Cov txheej txheem hlau, cov tshuaj reactive sputtering | Cov yeeb yaj kiab uas tiv taus kev hnav siab |
Xaus lus
Txoj kev tso tawm siv rau hauv cov txheej txheem nqus tsev ua lub luag haujlwm tseem ceeb hauv kev txiav txim siab qhov microstructure ntawm cov yeeb yaj kiab nyias, uas ua rau muaj kev ua tau zoo thiab kev ntseeg siab ntawm cov txheej. Thaum DC tso tawm muaj cov nqi sputtering siab, nws ua rau cov noob loj dua thiab kev ntxhov siab sab hauv siab dua, uas yuav cuam tshuam rau cov yeeb yaj kiab lub zog. Ntawm qhov tod tes, RF tso tawm muab kev sib npaug zoo dua thiab kev ntxhov siab qis dua tab sis ua haujlwm ntawm qhov qis dua sputtering, ua rau nws zoo tagnrho rau cov txheej txheem optical thiab dielectric. MF tso tawm sib npaug ntawm cov nqi tso tawm siab thiab kev sib npaug zoo microstructure, ua rau nws tsim nyog rau cov txheej txheem hlau hauv kev lag luam. Thaum kawg, Pulsed DC tso tawm yog qhov muaj txiaj ntsig zoo rau cov ntawv thov sputtering siab uas qhov kev nplaum zoo thiab kev tiv thaiv hnav yog qhov tseem ceeb.
Los ntawm kev nkag siab txog cov yam ntxwv tshwj xeeb ntawm txhua hom kev tso tawm, cov chaw tsim khoom tuaj yeem ua kom zoo dua lawv cov txheej txheem kom ua tiav cov yam ntxwv ntawm zaj duab xis rau ntau yam kev siv, txawm tias nws yog cov txheej txheem kho kom zoo nkauj, cov yeeb yaj kiab kho qhov muag, cov txheej txheem tiv thaiv kev hnav, lossis cov yeeb yaj kiab nyias ua haujlwm.
Lub sijhawm tshaj tawm: Lub Ib Hlis-27-2026