Ni irihe hame rya tekiniki ya hollow cathode ibikoresho bikomeye byo gutwikira？

Ion isobanura ko reaction cyangwa ibikoresho byavumbuwe bishyirwa kuri substrate hamwe na ion bombe ya ion ya gaz cyangwa ibikoresho byahumutse mugihe ibikoresho byavutse bitandukanijwe cyangwa gaze isohoka mucyumba cya vacuum. Ihame rya tekiniki ryibikoresho bikomeye byo gutwikira ni igikoresho cya cathode ion, ni tekinoroji ya cathode isohora.

Kubijyanye n'ihame ryo gusohora imyanda ya cathode: Ubuhanga bwo kubitsa bwa cathode ya cathode ikoresha isohoka rya cathode ishyushye kugirango itange urumuri rwa plasma, kandi cathode ni umuyoboro wa tantalum wuzuye. Cathode na anode ifasha byegeranye, aribyo nkingi ebyiri zaka umuriro wa arc.

Imbunda ya cathode isohora imbunda yo gutwika mu buryo bubiri.
1.

2. umuyoboro wa tantalum usohora umubare munini wa electron, uzahindurwa uva "gusohora glow" uhindurwe "arc isohoka", iki gihe voltage iri munsi ya 30V-60V, hanyuma mugihe cyose cathode na anode hagati yumuriro w'amashanyarazi, urashobora kubyara plasma electron.

Ibikoresho byo gutwika Cathodic
1 、 Kunoza imiterere yimbunda yumwimerere, kuva mwambere ntarengwa ya 230A kugeza 280A.
2 rove Kunoza imiterere yumwimerere ya sisitemu yo gukonjesha, uhereye kumyimerere ya 4 machine imashini yamazi yimbeho ikonjesha kugeza ubushyuhe bwicyumba gikonjesha amazi, bikiza ikiguzi cyamashanyarazi kubakoresha.
3, Kunoza imiterere yumwimerere yoherejwe, yahinduwe muburyo bwo gukwirakwiza amazi ya magnetiki, ubushyuhe bwo hejuru ntibuzahuza ikizunguruka.
4, ahantu heza ho gutwikira ￠ 650X1100, irashobora kwakira 750 X 1250X600 ipfa kurenza urugero hamwe nabakora ibikoresho byo gukora broach ndende ndende, hamwe nubunini bunini cyane.

Imashini itwikiriye ya cathode ion ikoreshwa cyane mugusiga ibikoresho, ibishushanyo, indorerwamo nini, indorerwamo za pulasitike, ibyuma bya hobbing nibindi bicuruzwa.