Udindo wa Magnetic Field mu Magnetron Sputtering

Magnetron sputtering makamaka kumaphatikizapo kutulutsa plasma zoyendera, chandamale etching, woonda filimu mafunsidwe ndi njira zina, mphamvu maginito pa magnetron sputtering ndondomeko adzakhala ndi chikoka. Mu magnetron sputtering dongosolo kuphatikiza orthogonal maginito, ma elekitironi amamvera udindo wa mphamvu Lorentz ndi kuchita ozungulira trajectory kayendedwe, ayenera kukumana zonse kugundana pang'onopang'ono kusamukira anode, chifukwa kugunda amapanga mbali ya ma elekitironi kufika anode pambuyo mphamvu yaing'ono, kutentha kwakukulu kwa bombardment pa gawo lapansi si. Komanso, chifukwa cha elekitironi ndi chandamale maginito zopinga, mu chandamale padziko maginito zotsatira za dera lomwe lili mkati kukhetsa msewu wonyamukira m'deralo ang'onoang'ono osiyanasiyana ma elekitironi ndende ndi mkulu kwambiri, ndi maginito zotsatira za dera kunja gawo lapansi pamwamba, makamaka kutali ndi maginito padziko lapansi, ndende ya elekitironi chifukwa kubalalitsidwa kwa m'munsi kwambiri ndi wofanana ndi kugawa yunifolomu, ndipo ngakhale loweruka kugawira yunifolomu ya dipobes, ndipo ngakhale kutsika yunifolomu kugawa, ndipo ngakhale kutsika yunifolomu kugawa. kusiyana kwa mphamvu ya dongosolo la magitude). The otsika kachulukidwe ma elekitironi bombarding padziko gawo lapansi, kotero kuti bombardment wa gawo lapansi chifukwa cha m'munsi kutentha kukwera, umene ndi waukulu limagwirira wa magnetron sputtering gawo lapansi kutentha kukwera ndi otsika. Kuonjezera apo, ngati pali magetsi okha, ma elekitironi amafika ku anode pambuyo pa mtunda waufupi kwambiri, ndipo mwayi wa kugunda ndi mpweya wogwira ntchito ndi 63,8% yokha. Ndipo kuwonjezera maginito, ma elekitironi m`kati kusamukira ku anode kuchita mozungulira zoyenda, ndi maginito womangidwa ndi kukulitsa trajectory wa ma elekitironi, kwambiri kuwongolera Mwina kugunda ma elekitironi ndi ntchito mpweya, amene amalimbikitsa kwambiri zimachitika ionization, ionization ndiyeno kachiwiri kutulutsa ma elekitironi komanso agwirizane ndondomeko ya kugunda kwa ma electron, kugunda kwa ma proteni angapo, kugwiritsa ntchito bwino mphamvu ya ma elekitironi, motero kupanga kachulukidwe kwambiri Kuchulukana kwa plasma kumawonjezera kutulutsa kowoneka bwino kwa plasma. Mlingo wa sputtering kunja maatomu pa chandamale komanso kuchuluka, ndi chandamale sputtering chifukwa bombardment chandamale ndi ayoni zabwino kwambiri, ndicho chifukwa mkulu mlingo wa magnetron sputtering mafunsidwe. Kuphatikiza apo, kukhalapo kwa maginito kungapangitsenso kuti sputtering igwire ntchito pamagetsi otsika, otsika 1 chifukwa cha kuthamanga kwa mpweya amatha kupanga ayoni m'dera la sheath kuti achepetse kugundana, kuphulika kwa chandamale ndi mphamvu yayikulu kwambiri ya kinetic, ndi tsiku loti athe kuchepetsa maatomu omwe amapukutidwa ndi kugundana kwa mpweya wosalowerera ndale, kuteteza chandamale chandamale chandamale chandamale kapena chandamale cha ma atomu obwerera kumbuyo. pamwamba, kusintha mlingo ndi khalidwe la woonda filimu mafunsidwe.

Mphamvu ya maginito yomwe chandamale imatha kuletsa njira ya ma elekitironi, yomwe imakhudzanso momwe madzi a m'magazi amagwirira ntchito komanso kutsekemera kwa ayoni pa chandamale.

Tsatanetsatane: kuonjezera kufanana kwa chandamale cha maginito kungathe kuonjezera kufanana kwa malo omwe chandamale, motero kupititsa patsogolo kagwiritsidwe ntchito ka zinthu zomwe mukufuna; Kugawa koyenera kwa ma elekitiroleti kungathenso kupititsa patsogolo kukhazikika kwa njira ya sputtering. Chifukwa chake, kwa chandamale cha magnetron sputtering, kukula ndi kugawa kwa maginito ndikofunikira kwambiri.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua