Mgbasa nke Magnetron na-agụnye mbufe plasma mwepu, ebumnuche etching, ntinye ihe nkiri dị mkpa na usoro ndị ọzọ, oghere ndọta na usoro ịgbasa magnetron ga-enwe mmetụta. Na magnetron sputtering usoro gbakwunyere orthogonal magnetik, ndị electrons bụ isiokwu ọrụ nke Lorentz ike na-eme gburugburu trajectory ije, ga-enwe mgbe niile nkukota iji nwayọọ nwayọọ kwaga anode, n'ihi na nkukota na-eme ka akụkụ nke electrons iru anode mgbe ike bụ obere, okpomọkụ nke bombardment na mkpụrụ bụkwa bụghị nnukwu. Na mgbakwunye, n'ihi na nke eletrọn site lekwasịrị magnetik ubi mgbochi, na lekwasịrị n'elu nke magnetik mmetụta nke mpaghara nke dị n'ime ihapu runway a obere mpaghara nso nke eletrọn ịta bụ nnọọ elu, na na magnetik mmetụta nke mpaghara n'èzí mkpụrụ n'elu, karịsịa n'ebe magnetik dị nso n'elu, na electron ịta n'ihi mgbasa nke ukwuu ala na dịtụ iche nkesa gas, na ọbụna spikeu ọnọdụ nkesa nke ukwuu ala na dịtụ iche nke gas, na ọbụna spikeu ọnọdụ abụọ. nke usoro ịdị ukwuu). Obere njupụta nke electrons na-atụ bọmbụ n'elu mkpụrụ ahụ, nke mere na bọmbụ nke mkpụrụ ahụ kpatara site na ịrị elu okpomọkụ dị ala, nke bụ isi usoro magnetron sputtering substrate okpomọkụ ịrị elu dị ala. Tụkwasị na nke ahụ, ọ bụrụ na ọ bụ naanị eletrik eletrik, ndị electrons na-erute anode mgbe a dị anya dị mkpirikpi, na ihe gbasara nke puru omume nke nkukota na gas na-arụ ọrụ bụ naanị 63.8%. Na gbakwunye magnetik ubi, electrons na usoro nke na-akpụ akpụ na anode ime gburugburu ngagharị, magnetik ubi agbụ na ịgbatị trajectory nke electrons, ukwuu mma ihe gbasara nke puru omume nke nkukota nke electrons na-arụ ọrụ gas, nke ukwuu na-akwalite omume nke ionization, ionization na mgbe ahụ ọzọ na-emepụta electrons nwekwara ike isonyere usoro nke probability nke nkukota ọtụtụ site na probability nke nchikota nke ọtụtụ n'ime ha. ịdị ukwuu, iji ike nke electrons na-arụ ọrụ nke ọma, ma si otú a na-emepụta njupụta dị elu The plasma njupụta na-abawanye na anomalous ọkụ mwepu nke plasma. Ọnụego nke ịgbasa atom site na ebumnuche na-abawanye, na ntupu ebumpụta ụwa kpatara site na bombu nke ebumnuche site na ion dị mma na-arụ ọrụ nke ọma, nke bụ ihe kpatara ọnụ ọgụgụ dị elu nke ntinye sputtering magnetron. Ke adianade do, ọnụnọ nke magnetik ubi nwekwara ike ime ka sputtering usoro na-arụ ọrụ na ala ikuku mgbali, ala 1 maka ikuku mgbali nwere ike ime ka ions na n'ọbọ oyi akwa mpaghara iji belata nkukota, bombardment nke lekwasịrị na a dịtụ nnukwu kinetic ume, na ụbọchị na-enwe ike belata sputtered lekwasịrị atoms na-anọpụ iche gas nkukota, iji gbochie ndị lekwasịrị anya atọm na-agbasasị n'elu ngwaọrụ site na-agbasasị n'elu mgbidi ma ọ bụ gbasasịa n'elu ngwaọrụ. ọnụego na mma nke mkpa ihe nkiri ntinye.
Ebe ndọta e lekwasịrị anya nwere ike igbochi trajectory nke electrons nke ọma, nke n'aka nke ya na-emetụta njirimara plasma na etching nke ion na ebumnuche.
Chọpụta: mụbaa ịdị n'otu nke ebe ndọta ebumnuche nwere ike ịbawanye ịdị n'otu nke etching elu ebumnuche, si otú a na-emeziwanye ojiji nke ihe ebumnuche; nkesa oghere elektrọnịkị nwere ezi uche nwekwara ike melite nkwụsi ike nke usoro ịgbasa mmiri. Ya mere, maka ebumnuche ịgbasa magnetron, nha na nkesa nke oghere ndọta dị oke mkpa.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Dec-14-2023