Ion txheej txhais tau hais tias cov reactants los yog evaporated cov ntaub ntawv tso rau ntawm lub substrate los ntawm lub ion bombardment ntawm cov roj ions los yog evaporated cov ntaub ntawv thaum cov ntaub ntawv evaporated yog dissociated los yog roj tawm hauv lub tshuab nqus tsev chamber. Lub hauv paus ntsiab lus ntawm hollow cathode hard txheej khoom yog hollow cathode ion txheej, uas yog ib tug hollow cathode paug deposition technology.
Hais txog lub hauv paus ntsiab lus ntawm hollow cathode paug deposition: Cov txheej txheem hollow cathode tawm deposition siv ib tug kub cathode paug los tsim ib tug plasma beam, thiab lub cathode yog ib tug hollow tantalum raj. Lub cathode thiab lub auxiliary anode yog nyob ze rau ib leeg, uas yog ob tug ncej uas ignite lub arc paug.
Lub hollow cathode tso tawm phom ignites nyob rau hauv ob txoj kev.
1, Kev siv hluav taws xob ntau zaus siv rau cathode tantalum raj, kom lub cathode tantalum raj argon gas ionization rau hauv argon ions thiab tom qab ntawd tshwm sim los ntawm cathode tantalum raj tsis tu ncua los ntawm argon ions, kom txog thaum lub tshav kub kom sov li qhov tsawg kawg nkaus tus qauv ntawm electron emission thiab tsim hluav taws xob.
2, Nyob rau hauv lub auxiliary anode thiab cathode tantalum raj ntawm daim ntawv thov ntawm txog 300V DC voltage, lub cathode tantalum raj tseem kis mus rau hauv cov roj argon, nyob rau hauv lub 1Pa-10Pa argon roj siab, lub auxiliary anode thiab cathode tantalum raj glow paug phenomenon tas li ntawm lub foob pob tawg. raj, kom txog rau thaum 2300K-2400K kub, lub cathode tantalum raj emits ib tug loj tus naj npawb ntawm electrons, yuav hloov los ntawm "glow paug" mus rau "arc paug", lub sij hawm no lub voltage yog tsawg li 30V-60V, ntev li ntev raws li cathode thiab anode ntawm lub hwj chim mov, koj muaj peev xwm tsim plasma electron.
Cathodic txheej khoom
1, Txhim kho tus qauv phom qub, los ntawm qhov siab tshaj plaws tam sim no ntawm 230A txog 280A.
2 、 Txhim kho cov txheej txheem txias txias, los ntawm thawj 4 ℃ dej khov tshuab ua kom txias rau chav txias dej txias, txuag cov nqi hluav taws xob rau cov neeg siv.
3, Txhim kho cov qauv kev sib txuas ntawm cov khoom qub, hloov mus rau cov dej sib nqus sib nqus, qhov kub thiab txias yuav tsis cuam tshuam cov rotating ncej.
4, qhov zoo txheej txheej ￠ 650X1100, tuaj yeem ua tau raws li 750 X 1250X600 qhov hnyav tuag thiab iav manufacturers ntawm qhov ntev ntev broach, nrog lub ntim loj heev.
Lub hollow cathode ion txheej tshuab yog tsuas yog siv rau hauv plating ntawm cov cuab yeej, pwm, daim iav loj pwm, yas pwm, hobbing riam thiab lwm yam khoom.
Post lub sij hawm: Nov-07-2022