Nrog rau kev loj hlob ntawm sputtering txheej, tshwj xeeb tshaj yog magnetron sputtering txheej tshuab, tam sim no, rau txhua yam khoom siv tuaj yeem npaj los ntawm ion bombardment phiajcim zaj duab xis, vim hais tias lub hom phiaj yog sputtered nyob rau hauv cov txheej txheem ntawm txheej rau qee yam substrate, qhov zoo ntawm cov zaj duab xis ntsuas muaj ib qho tseem ceeb, yog li ntawd, qhov yuav tsum tau rau lub hom phiaj cov ntaub ntawv kuj tseem nruj dua. Hauv kev xaiv cov khoom siv, ntxiv rau kev siv cov yeeb yaj kiab nws tus kheej yuav tsum tau xaiv, yuav tsum tau xav txog cov teeb meem hauv qab no:
Cov khoom siv lub hom phiaj yuav tsum muaj lub zog zoo txhua yam thiab tshuaj lom neeg ruaj ntseg tom qab zaj duab xis;
Lub hom phiaj thiab lub substrate yuav tsum tau ua kom ruaj khov ua ke, txwv tsis pub nws yuav tsum tau coj mus rau hauv lub substrate muaj ib tug zoo ua ke ntawm daim nyias nyias txheej, thawj sputtering ib puag ncig zaj duab xis thiab ces qhov kev npaj ntawm yuav tsum tau membrane txheej;
Raws li cov tshuaj tiv thaiv sputtering rau hauv cov khoom siv membrane yuav tsum yooj yim rau kev hnov mob nrog cov pa los tsim cov yeeb yaj kiab sib xyaw.
Raws li qhov ua tau raws li qhov yuav tsum tau ua ntawm daim nyias nyias, qhov sib txawv ntawm cov coefficient ntawm thermal expansion ntawm lub hom phiaj cov khoom thiab cov substrate yog me me li sai tau, thiaj li yuav txo tau ntawm thermal stress ntawm sputtered membrane.
Raws li kev siv thiab kev ua tau zoo ntawm daim nyias nyias, lub hom phiaj cov khoom yuav tsum ua kom tau raws li qhov purity, impurity cov ntsiab lus, cov khoom sib xws, machining raug thiab lwm yam kev cai.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Jan-09-2024