I-TiN iyisimbozo esiqinile sokuqala esisetshenziswa kumathuluzi okusika, ngezinzuzo ezifana namandla aphezulu, ubulukhuni obuphezulu, kanye nokumelana nokuguguleka. Yinto yokuqala yokugqoka eqinile esetshenziswa kakhulu kwezimboni futhi esetshenziswa kabanzi, esetshenziswa kabanzi kumathuluzi agqokiwe kanye nezimbobo ezimboziwe. Isimbozo esiqinile se-TiN ekuqaleni safakwa ku-1000 ℃ ngobuchwepheshe be-thermal CVD. Manje singatholakala ku-500 ℃ ngesimbozo se-cathodic arc ion, isimbozo se-Magnetron sputtering, isimbozo se-hollow cathode ion, isimbozo se-hot wire arc ion, i-PECVD kanye nobunye ubuchwepheshe. Lesi simbozo sisetshenziswe isikhathi eside ekucubungulweni kwezinto zensimbi eziqinile ebusweni kanye nokukhiqizwa kwesikhunta kwamathuluzi okwenza insimbi esheshayo kanye nezimbobo. Ukufaka i-TiN ku-500 ℃ kube yiphayona ekufakweni kwamathuluzi okusika agqokiwe kusetshenziswa ubuchwepheshe besimbozo se-ion. Kuye kwasungulwa izinhlobo ezahlukene zezingubo eziqinile ezinezingxenye ezahlukahlukene ngenxa yalesi sisekelo ukuze kuhlangatshezwane nezidingo zokuthuthukiswa komkhakha wokucubungula okusezingeni eliphezulu: izingubo eziqinile ezinobunzima obujwayelekile obuyi-binary, ternary, kanye ne-quaternary ngokusekelwe kuma-nitrides nama-carbide zakhiwe ngokusekelwe ku-TiN, kanye nezingubo ze-nano eziqinile ezisekelwe kulezi zingubo eziqinile, kanye nezingubo ze-intrinsic superhard ezinobunzima obuphezulu kakhulu.
Isibonakaliso esiyinhloko sokusebenza kwezimbozo eziqinile ubulukhuni. Ngokusho kobulukhuni bokumboza, izimbozo eziqinile zingahlukaniswa zibe izinhlobo ezintathu: izimbozo eziqinile ezivamile, izimbozo ze-nano eziqinile kakhulu, kanye nezimbozo ze-intrinsic superhard/extremely hard, njengoba kuboniswe kuthebula elilandelayo.
– Lesi sihloko sikhishwe yiGuangdong Zhenhua,umenzi wemishini yokubopha eqinile.
Isikhathi sokuthunyelwe: Juni-07-2023