Ko te TiN te paninga mārō tuatahi i whakamahia i roto i ngā taputapu tapahi, me ōna painga pēnei i te kaha teitei, te pakeke teitei, me te ātete ki te kakahu. Koinei te rauemi paninga mārō ahumahi tuatahi, ā, he whānui te whakamahinga, he whānui te whakamahinga i roto i ngā taputapu paninga me ngā pokepoke paninga. I te tuatahi i whakatakotoria te paninga mārō TiN ki te 1000 ℃ mā te hangarau CVD wera. Ināianei ka taea te whiwhi i te 500 ℃ mā te paninga katote pewa katote, te paninga Magnetron sputtering, te paninga katote katote tuwhera, te paninga katote pewa waea wera, te PECVD me ētahi atu hangarau. Kua roa te whakamahinga o tēnei paninga i roto i te tukatuka rauemi whakarewa whakapakeke mata me te hanga pokepokea ai ngā taputapu hanga maitai tere-teitei me ngā pokepokea ai. Ko te whakatakoto i te TiN ki te 500 ℃ kua tīmata te whakatakoto i ngā taputapu tapahi paninga mā te whakamahi i te hangarau paninga katote. He maha ngā paninga mārō me ngā wāhanga rerekē kua whakawhanakehia i runga i tēnei kaupapa hei whakatutuki i ngā hiahia o te whanaketanga o te umanga tukatuka teitei: kua whakawhanakehia ngā paninga mārō me te mārō rua, toru, me te whā i runga i ngā nitrides me ngā carbides i runga i te TiN, me ngā paninga nano tino mārō i runga i ēnei paninga mārō, me ngā paninga tino mārō ā-roto me te mārō tino teitei.
Ko te tohu matua o te mahi a ngā paninga mārō ko te pakeke. E ai ki te pakeke o te paninga, ka taea te wehewehe i ngā paninga mārō ki ngā momo e toru: ngā paninga mārō noa, ngā paninga nano tino mārō, me ngā paninga tino mārō ā-roto/tino mārō, e whakaaturia ana i te ripanga e whai ake nei.
– I tukuna tēnei tuhinga e Guangdong Zhenhua,he kaihanga mīhini paninga mārō.
Wā tuku: Pipiri-07-2023