TiN ni yo mwambaro ukomeye wa mbere ukoreshwa mu bikoresho byo gukata, ufite ibyiza nko gukomera cyane, gukomera cyane, no kudashira. Ni yo mwambaro ukomeye wa mbere wakoreshejwe mu nganda kandi ukoreshwa cyane, ukoreshwa cyane mu bikoresho bipfutse n'ibipfutse. Imwambaro ukomeye wa TiN wabanje gushyirwa kuri 1000 ℃ hakoreshejwe ikoranabuhanga rya CVD rishyushye. Ubu ushobora kuboneka kuri 500 ℃ ukoresheje imwambaro wa cathodic arc ion, imwambaro wa Magnetron sputtering, imwambaro wa hollow cathode ion, imwambaro wa hot wire arc ion, PECVD n'izindi koranabuhanga. Iyi mwambaro umaze igihe kinini ukoreshwa mu gutunganya ibikoresho by'icyuma bikomera hejuru no gukora ibumba ry'ibikoresho byo gukora ibyuma byihuta. Gushyira TiN kuri 500 ℃ byatumye habaho intandaro yo gushyira ibikoresho bipfutse hakoreshejwe ikoranabuhanga rya imwambaro wa ioni. Hakozwe ubwoko butandukanye bw'imyambaro ikomeye ifite ibice bitandukanye kugira ngo ihuze n'ibikenewe mu iterambere ry'inganda zitunganya ibintu ku rwego rwo hejuru: imyuka ikomeye ifite ubukana bwa binary, ternary, na quaternary isanzwe ishingiye kuri nitrides na carbides yakozwe hashingiwe kuri TiN, hamwe n'imyuka ikomeye cyane ishingiye kuri iyi myanda ikomeye, ndetse n'imyuka ikomeye cyane ifite ubukana bwinshi cyane.
Ikimenyetso cy'ingenzi cy'imikorere y'imyambaro ikomeye ni ubukana. Dukurikije ubukana bw'imyambaro ikomeye, imashini ikomeye ishobora kugabanywamo ubwoko butatu: imashini isanzwe ikomeye, imashini ikomeye cyane, n'imashini ikomeye cyane/imashini ikomeye cyane, nk'uko bigaragara mu mbonerahamwe ikurikira.
– Iyi nkuru yasohotse na Guangdong Zhenhua,uruganda rukora imashini zikora irangi rikomeye.
Igihe cyo kohereza: Kamena-07-2023