Ukusputtering nge-vacuum magnetron kufaneleka kakhulu ekugqokeni okubonakalayo. Eqinisweni, le nqubo ingabeka amafilimu amancane anoma yiziphi izinto ze-oxide, carbide, kanye ne-nitride. Ngaphezu kwalokho, le nqubo ifaneleka kakhulu ekubekweni kwezakhiwo zefilimu ezinezingqimba eziningi, kufaka phakathi imiklamo yokukhanya, amafilimu ombala, izembatho ezingagugi, ama-nano-laminate, izembatho ze-superlattice, amafilimu okufaka umswakama, njll. Kusukela ngo-1970, izibonelo zokubekwa kwefilimu ye-optical ezisezingeni eliphezulu zenzelwe izinto ezahlukahlukene zesendlalelo sefilimu ye-optical. Lezi zinto zifaka izinto zokuhambisa ezibonakalayo, ama-semiconductor, ama-polymer, ama-oxide, ama-carbide, kanye nama-nitride, kuyilapho ama-fluoride esetshenziswa ezinqubweni ezifana nokugqoka okuhwamukayo.
Inzuzo eyinhloko yenqubo yokuphalaza i-magnetron ukusebenzisa izinqubo zokumboza ezisabelayo noma ezingasabelayo ukufaka izendlalelo zalezi zinto kanye nokulawula kahle ukwakheka kwesendlalelo, ukujiya kwefilimu, ukufana kobukhulu befilimu kanye nezakhiwo zemishini zesendlalelo. Inqubo inezici ezilandelayo.
1、Izinga elikhulu lokufakwa. Ngenxa yokusetshenziswa kwama-electrode e-magnetron asheshayo, kungatholakala ukugeleza okukhulu kwe-ion, okuthuthukisa ngempumelelo izinga lokufakwa kanye nezinga lokufakwa kwale nqubo yokumboza. Uma kuqhathaniswa nezinye izinqubo zokufakwa ko ...
2. Ukusebenza kahle kwamandla aphezulu. Inhloso yokushaya i-Magnetron ngokuvamile ikhetha i-voltage engaphakathi kwebanga lika-200V-1000V, ngokuvamile ingama-600V, ngoba i-voltage engu-600V ingaphakathi kwebanga elisebenza kahle kakhulu lokusebenza kahle kwamandla.
3. Amandla aphansi okuphalaza. I-voltage eqondiwe ye-magnetron isetshenziswa iphansi, kanti insimu yamagnetic ivimba i-plasma eduze kwe-cathode, okuvimbela izinhlayiya ezishaja amandla aphezulu ukuthi zingangeni kwi-substrate.
4、Izinga lokushisa eliphansi le-substrate. I-anode ingasetshenziswa ukuqondisa ama-electron akhiqizwa ngesikhathi sokukhishwa, asikho isidingo sokusekelwa kwe-substrate ukuze kuqedwe, okunganciphisa ngempumelelo ukuqhunyiswa kwama-electron kwe-substrate. Ngakho-ke izinga lokushisa le-substrate liphansi, okuyinto efanele kakhulu kwezinye izingxenye zepulasitiki ezingamelani kakhulu nokugqoka kwezinga lokushisa eliphezulu.
5, Ukuchoma ubuso bethagethi lokubhoboza i-Magnetron akuhambisani. Ukuchoma ubuso bethagethi lokubhoboza i-Magnetron okungalingani kubangelwa insimu yamagnetic engalingani yethagethi. Indawo yesilinganiso sokuchoma esiqondiwe inkulu, ngakho-ke izinga lokusetshenziswa okusebenzayo kwethagethi liphansi (izinga lokusetshenziswa elingu-20-30% kuphela). Ngakho-ke, ukuze kuthuthukiswe ukusetshenziswa kwethagethi, ukusatshalaliswa kwensimu yamagnetic kudinga ukushintshwa ngezindlela ezithile, noma ukusetshenziswa kwamagnethi ahamba ku-cathode kungathuthukisa nokusetshenziswa kwethagethi.
6、Ithagethi Ehlanganisiwe. Ingenza ifilimu ye-alloy yokumboza okuqondiwe okuhlanganisiwe. Njengamanje, ukusetshenziswa kwenqubo yokubhoboza okuqondiwe okuhlanganisiwe kwe-magnetron sekufakwe ngempumelelo ku-Ta-Ti alloy, (Tb-Dy)-Fe kanye ne-Gb-Co alloy film. Isakhiwo sethagethi esihlanganisiwe sinezinhlobo ezine, ngokulandelana, yithagethi eyindilinga ehlanganisiwe, ithagethi ehlanganisiwe eyisikwele, ithagethi encane ehlanganisiwe eyisikwele kanye nethagethi ehlanganisiwe ehlanganisiwe. Ukusetshenziswa kwesakhiwo sethagethi esihlanganisiwe kungcono.
7. Uhla olubanzi lwezicelo. Inqubo yokukhipha i-Magnetron ingabeka izakhi eziningi, ezivamile yilezi: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, njll.
Ukugxusha nge-Magnetron kungenye yezinqubo zokugxusha ezisetshenziswa kakhulu ukuthola amafilimu asezingeni eliphezulu. Nge-cathode entsha, inokusetshenziswa okuphezulu kanye nesilinganiso esiphezulu sokugxusha. Inqubo yokugxusha nge-vacuum magnetron Technology manje isetshenziswa kabanzi ekugxusheni kwezingxenye ezinkulu. Le nqubo ayisetshenziselwa kuphela ukufakwa kwefilimu enezingqimba eyodwa, kodwa futhi nokugxusha ngefilimu enezingqimba eziningi, ngaphezu kwalokho, isetshenziswa futhi enqubweni yokugoqa yokugxusha ifilimu yokupakisha, ifilimu yokukhanya, i-lamination kanye nokunye ukugxusha kwefilimu.
Isikhathi sokuthunyelwe: Meyi-31-2024