He tino pai te whakamahi i te korehau magnetron sputtering mō ngā paninga whakatakotoranga tauhohe. Inaa, ka taea e tēnei tukanga te whakatakoto i ngā kiriata angiangi o ngā rauemi waikura, karāhe, me te nitride. Hei tāpiri, he tino pai hoki te tukanga mō te whakatakoto i ngā hanganga kiriata maha-paparanga, tae atu ki ngā hoahoa whatu, ngā kiriata tae, ngā paninga ātete-kakahu, ngā nano-laminates, ngā paninga superlattice, ngā kiriata whakamahana, me ētahi atu. Mai anō i te tau 1970, kua whakawhanakehia ngā tauira whakatakoto kiriata whatu kounga teitei mō ngā momo rauemi paparanga kiriata whatu. Kei roto i ēnei rauemi ko ngā rauemi kawe mārama, ngā semiconductors, ngā polymers, ngā waikura, ngā karāhe, me ngā nitrides, ko ngā fluorides e whakamahia ana i roto i ngā tukanga pēnei i te paninga mimiti.
Ko te painga matua o te tukanga paninga magnetron ko te whakamahi i ngā tukanga paninga tauhohe, kore-tauhohe rānei hei whakatakoto i ngā paparanga o ēnei rauemi, me te whakahaere pai i te hanganga paparanga, te matotoru o te kiriata, te ōritetanga o te matotoru o te kiriata me ngā āhuatanga ā-pūkaha o te paparanga. Ko ngā āhuatanga o te tukanga e whai ake nei.
1, Te tere o te whakatakotoranga nui. Nā te whakamahinga o ngā irahiko magnetron tere-teitei, ka taea te whakaputa i te rere nui o te katote, ka pai ake te tere whakatakotoranga me te tere pupuhi o tēnei tukanga paninga. Ki te whakaritea ki ētahi atu tukanga paninga pupuhi, he nui te kaha me te hua o te pupuhi magnetron, ā, he whānuitia te whakamahinga i roto i ngā momo whakaputanga ahumahi.
2, Teitei te whai huatanga o te mana. Ko te whāinga hiko Magnetron sputtering e whiriwhiria ana i roto i te whānuitanga o te ngaohiko i waenga i te 200V-1000V, ko te tikanga he 600V, nā te mea ko te ngaohiko o te 600V kei roto noa i te whānuitanga whai huatanga teitei o te mana.
3. Pūngao pupuhi iti. Ka tukuna te ngaohiko ūnga magnetron ki raro, ā, ka herea te plasma e te papa aukume ki te taha o te cathode, ka ārai i ngā matūriki kua utua he kaha teitei ake kei rere ki runga i te papa.
4, He iti te pāmahana o te papa. Ka taea te whakamahi i te anode hei ārahi i ngā irahiko i puta i te wā e tukuna ana, kāore e hiahiatia te tautoko o te papa kia oti, ka taea ai te whakaiti i te pupuhi irahiko o te papa. Nō reira, he iti te pāmahana o te papa, he mea tino pai mō ētahi papa kirihou kāore i te tino ātete ki te paninga pāmahana teitei.
5, Kāore i te ōrite te whakairo o te mata o te ūnga e te Magnetron sputtering. Nā te kore ōrite o te papa aukume o te ūnga ka puta te kore ōrite o te whakairo o te mata o te ūnga e te Magnetron sputtering. He nui ake te taunga o te tere whakairo o te ūnga, nō reira he iti te tere whakamahinga whai hua o te ūnga (20-30% noa iho te tere whakamahinga). Nō reira, hei whakapai ake i te whakamahinga o te ūnga, me whakarerekē te tohatoha o te papa aukume mā ētahi tikanga, mā te whakamahi rānei i ngā aukume e neke ana i roto i te cathode ka taea hoki te whakapai ake i te whakamahinga o te ūnga.
6, Whāinga Whakakotahi. Ka taea te hanga kiriata koranu paninga whāinga whakakotahi. I tēnei wā, kua angitu te whakamahinga o te tukanga whakapūtanga whāinga magnetron whakakotahi ki te koranu Ta-Ti, (Tb-Dy)-Fe me te kiriata koranu Gb-Co. E whā ngā momo hanganga whāinga whakakotahi, ko te whāinga porowhita whakarārangi, te whāinga tapawhā whakarārangi, te whāinga tapawhā iti whakarārangi me te whāinga ā-rohe whakarārangi. He pai ake te whakamahinga o te hanganga whāinga ā-rohe whakarārangi.
7. He whānuitanga o ngā whakamahinga. Ka taea e te tukanga whakapūtanga Magnetron te whakatakoto i ngā huānga maha, ko ngā mea noa ko: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, me ētahi atu.
Ko te Magnetron sputtering tētahi o ngā tukanga paninga e whakamahia whānuitia ana hei whiwhi kiriata kounga teitei. Mā te whakamahi i tētahi cathode hou, he nui te whakamahinga o te ūnga me te tere whakatakotoranga teitei. Kua whakamahia whānuitia te tukanga paninga magnetron sputtering korehau a Guangdong Zhenhua Technology i roto i te paninga o ngā papa whenua whānui. Ehara i te mea ko te tukanga anake e whakamahia ana mō te whakatakotoranga kiriata paparanga kotahi, engari mō te paninga kiriata paparanga maha hoki, hei tāpiritanga, e whakamahia ana hoki i roto i te tukanga hurihuri ki te hurihuri mō te kiriata takai, te kiriata whatu, te whakapiri me ētahi atu paninga kiriata.
Wā tuku: Mei-31-2024