Kuputira Machine Kupinza Unyanzvi Hunhu

Kuputira magnetron mu vacuum kwakakodzera zvakanyanya kune machira ekugadzirisa anochinja. Kutaura zvazviri, maitiro aya anogona kuisa mafirimu matete echero oxide, carbide, uye nitride. Pamusoro pezvo, maitiro aya akakodzerawo zvakanyanya pakuiswa kwemafirimu akawanda, kusanganisira magadzirirwo e optical, mafirimu emavara, machira anodzivirira kupfeka, nano-laminates, machira e superlattice, mafirimu ekudzivirira kupisa, nezvimwewo. Kare muna 1970, mienzaniso ye optical film deposition yemhando yepamusoro yakagadzirwa kune akasiyana machira e optical film layer. Izvi zvinosanganisira zvinhu zvinofambisa zvinopenya, semiconductors, polymers, oxides, carbides, uye nitrides, nepo fluorides ichishandiswa mumabasa akadai se evaporative coating.

Chinhu chikuru chinobatsira pakugadzira magnetron sputtering ndechekushandisa maitiro ekugadzira kana kuti kwete ekugadzira zvinhu izvi kuti zviunganidzwe uye kudzora tsime remusanganiswa wezvikamu, ukobvu hwefirimu, kufanana kweukobvu hwefirimu uye hunhu hwemakanika ezvikamu izvi. Maitiro acho ane hunhu hunotevera.

1、Kuwanda kwekuisa ma ion. Nekuda kwekushandiswa kwema electrodes emagnetron anomhanya zvakanyanya, kuyerera kwema ion akawanda kunogona kuwanikwa, zvichivandudza mwero wekuisa ma ion uye mwero wekuisa ma sputtering weiyi coating process. Kana tichienzanisa nedzimwe nzira dzekuisa ma sputtering, magnetron sputtering ine simba rakawanda uye goho guru, uye inoshandiswa zvakanyanya mukugadzirwa kwemaindasitiri akasiyana-siyana.

2. Kushanda nesimba kwakanyanya. Chinangwa cheMagnetron sputtering chinowanzo sarudza voltage iri pakati pe200V-1000V, kazhinji i600V, nekuti voltage ye600V iri pakati pesimba rayo repamusoro-soro.

3. Simba risingapfuuri. Magnetron target voltage inoshandiswa yakaderera, uye simba remagineti rinovhara plasma iri pedyo ne cathode, izvo zvinodzivirira zvidimbu zvine simba rakawanda kuti zvisapinde mu substrate.

4、Kupisa kwepasi pevhu. Anode inogona kushandiswa kutungamira maerekitironi anogadzirwa panguva yekubuda, hapana chikonzero chekutsigira kwevhu kuti ripedzwe, izvo zvinogona kuderedza kubhomba kwemaerekitironi evhu pavhu. Saka tembiricha yevhu pavhu yakaderera, izvo zvakanaka kune mamwe mapurasitiki asingadziviriri kupisa kwakanyanya.

5, Kucheka pamusoro pechinhu chinonamirwa neMagnetron hakusi kwakafanana. Kucheka pamusoro pechinhu chinonamirwa neMagnetron kusina kuenzana kunokonzerwa nemunda wemagineti usina kuenzana wechinhu chinonamirwa. Nzvimbo yemuchina wekunamirwa yakakura, zvekuti muchina wekushandisa unoshanda wakaderera (muchina wekushandisa we20-30% chete). Saka, kuti pave nekuvandudzwa kwemuchina wekushandisa, kugoverwa kwesimba remagineti kunofanirwa kuchinjwa nenzira dzakasiyana, kana kushandiswa kwemagineti anofamba mu cathode kunogonawo kuvandudza muchina wekushandisa.

6、Chinoumbwa neComposite. Chinogona kugadzira firimu recomposite target coating alloy. Parizvino, kushandiswa kwecomposite magnetron target sputtering process kwakabudirira paTa-Ti alloy, (Tb-Dy)-Fe uye Gb-Co alloy film. Chinoumbwa neComposite target chine mhando ina, zvichiteerana, chinoumbwa nedenderedzwa, chinoumbwa nemativi mana, chinoumbwa nemativi mana uye chinoumbwa nemativi mana. Kushandiswa kwechimiro chesector inlaid target kuri nani.

7. Mhando dzakasiyana dzemashandisirwo. Maitiro ekugadzira simbi yeMagnetron anogona kuisa zvinhu zvakawanda, zvakajairika ndeizvi: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, nezvimwewo.

Magnetron sputtering ndeimwe yenzira dzinonyanya kushandiswa dzekuputira kuti uwane mafirimu emhando yepamusoro. Ne cathode itsva, ine kushandiswa kwakanyanya uye chiyero chepamusoro chekuisa. Guangdong Zhenhua Technology vacuum magnetron sputtering coating process ikozvino inoshandiswa zvakanyanya mukuputira substrates dzenzvimbo hombe. Maitiro aya haangoshandiswi chete pakuputira firimu re single-layer, asiwo pakuputira firimu re multi-layer, pamusoro pezvo, anoshandiswawo mukuputira roll process yekuputira firimu, optical film, lamination nezvimwe zvekuputira firimu.