Ukutshiza nge-vacuum magnetron kufanelekile ngokukodwa kwiingubo zokufaka ezisabelayo. Enyanisweni, le nkqubo inokufaka iifilimu ezincinci zazo naziphi na izinto ze-oxide, carbide, kunye ne-nitride. Ukongeza, le nkqubo ikwafaneleka ngakumbi ekufakweni kwezakhiwo zefilimu ezinamalayelo amaninzi, kubandakanya uyilo lwe-optical, iifilimu zemibala, iingubo ezingagugiyo, ii-nano-laminates, iingubo ze-superlattice, iifilimu zokufaka i-insulating, njl. Kwasekuqaleni kowe-1970, imizekelo yokubekwa kwefilimu ye-optical esemgangathweni ophezulu iye yaphuhliswa kwiindidi ezahlukeneyo zezixhobo zefilimu ye-optical. Ezi zinto ziquka izinto ezihambisayo ezibonakalayo, ii-semiconductors, iipolymers, ii-oxides, ii-carbides, kunye nee-nitrides, ngelixa ii-fluoride zisetyenziswa kwiinkqubo ezifana nengubo yokufuma.
Inzuzo ephambili yenkqubo yokutshiza i-magnetron kukusebenzisa iinkqubo zokugquma ezisabelayo okanye ezingasabelayo ukufaka iileya zezi zinto kunye nokulawula ulwakhiwo lweleya, ubukhulu befilimu, ukufana kobukhulu befilimu kunye neempawu zoomatshini zeleya. Le nkqubo ineempawu ezilandelayo.
1、Izinga elikhulu lokufumba. Ngenxa yokusetyenziswa kwee-electrode zemagnetron ezikhawulezayo, ukuhamba kwe-ion enkulu kunokufumaneka, nto leyo ephucula ngempumelelo izinga lokufumba kunye nezinga lokufumba kwale nkqubo yokufumba. Xa kuthelekiswa nezinye iinkqubo zokufumbatha ukufumba, ukufumbatha kwemagnetron kunomthamo ophezulu kunye nemveliso ephezulu, kwaye kusetyenziswa kakhulu kwimveliso eyahlukeneyo yemizi-mveliso.
2. Ukusebenza kakuhle kwamandla aphezulu. Ithagethi yokutshiza iMagnetron ikhetha i-voltage engaphakathi koluhlu lwe-200V-1000V, idla ngokuba yi-600V, kuba i-voltage ye-600V ingaphakathi koluhlu oluphezulu lokusebenza kakuhle kwamandla.
3. Amandla aphantsi okutshiza. I-voltage ye-magnetron isetyenziswa iphantsi, kwaye i-magnetic field ithintela i-plasma kufutshane ne-cathode, nto leyo ethintela amasuntswana anamandla aphezulu ukuba angangeni kwi-substrate.
4. Ubushushu obuphantsi be-substrate. I-anode ingasetyenziselwa ukukhokela ii-electron ezenziwe ngexesha lokukhupha, akukho mfuneko yokuxhaswa kwe-substrate ukuze igqitywe, nto leyo enokunciphisa ngempumelelo ukuqhushumba kwe-electron ye-substrate. Ngoko ke ubushushu be-substrate buphantsi, nto leyo efanelekileyo kakhulu kwezinye ii-substrate zeplastiki ezingamelaniyo kakhulu nobushushu obuphezulu.
5, Ukugrumba komphezulu wethagethi yokutshiza iMagnetron akulingani. Ukugrumba komphezulu wethagethi yokutshiza iMagnetron ngokungalinganiyo kubangelwa yintsimi yemagnethi engalinganiyo yethagethi. Indawo yesantya sokugrumba esijolise kuyo inkulu, ngoko ke izinga lokusetyenziswa ngokufanelekileyo kwethagethi liphantsi (izinga lokusetyenziswa yi-20-30% kuphela). Ke ngoko, ukuphucula ukusetyenziswa kwethagethi, ukusasazwa kwentsimi yemagnethi kufuneka kutshintshwe ngeendlela ezithile, okanye ukusetyenziswa kweemagnethi ezihamba kwi-cathode kunokuphucula ukusetyenziswa kwethagethi.
6, ithagethi edityanisiweyo. Ingenza ifilimu ye-alloy yokugquma ithagethi edityanisiweyo. Okwangoku, ukusetyenziswa kwenkqubo yokutshiza ithagethi edityanisiweyo yemagnetron kuye kwagqunywa ngempumelelo kwi-Ta-Ti alloy, (Tb-Dy)-Fe kunye ne-Gb-Co alloy film. Isakhiwo sethagethi edityanisiweyo sineentlobo ezine, ngokulandelelana, yithagethi ejikelezileyo edityanisiweyo, ithagethi edityanisiweyo eyisikwere, ithagethi encinci edityanisiweyo eyisikwere kunye nethagethi edityanisiweyo esisikwere. Ukusetyenziswa kwesakhiwo sethagethi edityanisiweyo esisikwere kungcono.
7. Uluhlu olubanzi lwezicelo. Inkqubo yokutshiza iMagnetron inokufaka izinto ezininzi, ezixhaphakileyo zezi: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, njl.
Ukutshiza ngeMagnetron yenye yezona nkqubo zokugquma ezisetyenziswa kakhulu ukufumana iifilimu ezikumgangatho ophezulu. Nge-cathode entsha, inokusetyenziswa okuphezulu kunye nesantya esiphezulu sokutshiza. Inkqubo yokutshiza nge-vacuum magnetron Technology ngoku isetyenziswa kakhulu ekutshizeni ii-substrates ezinkulu. Le nkqubo ayisetyenziselwa kuphela ukutshiza ngefilimu enye, kodwa ikwasetyenziselwa ukutshiza ngefilimu eneeleya ezininzi, ukongeza, ikwasetyenziswa kwinkqubo yokutshiza nge-roll ukuze ipakishwe ifilimu, ifilimu ye-optical, i-lamination kunye nezinye iifilimu.
Ixesha leposi: Meyi-31-2024