Vacuum magnetron sputtering dabara adaba karịsịa maka mkpuchi ihe ndị na-eme ka ihe dị n'ime ya dị nro. N'ezie, usoro a nwere ike itinye ihe nkiri dị gịrịgịrị nke ihe ọ bụla dị ka oxide, carbide, na nitride. Na mgbakwunye, usoro a dịkwa mma karịsịa maka itinye ihe owuwu ihe nkiri dị iche iche, gụnyere imewe anya, ihe nkiri agba, mkpuchi na-eguzogide iyi, nano-laminates, mkpuchi superlattice, ihe nkiri mkpuchi, wdg. Na mbido 1970, emepụtala ihe atụ nke itinye ihe nkiri anya dị elu maka ọtụtụ ihe eji eme ihe nkiri anya. Ihe ndị a gụnyere ihe ndị na-eduzi ihe doro anya, semiconductor, polymers, oxides, carbide, na nitrides, ebe a na-eji fluorides eme ihe na usoro dịka mkpuchi ikuku.
Isi uru nke usoro magnetron sputtering bụ iji usoro mkpuchi na-emegharị ahụ ma ọ bụ nke na-anaghị emeghachi omume tinye akwa nke ihe ndị a na njikwa nke ọma nke nhazi oyi akwa, ọkpụrụkpụ ihe nkiri, nha nhata ọkpụrụkpụ ihe nkiri na ihe onwunwe igwe nke oyi akwa ahụ. Usoro a nwere njirimara dịka ndị a.
1、Ọnụego ntinye buru ibu. N'ihi ojiji nke electrodes magnetron dị elu, enwere ike nweta nnukwu ion na-asọfe, na-eme ka ọnụego ntinye na ọnụego sputtering nke usoro mkpuchi a ka mma nke ọma. Ma e jiri ya tụnyere usoro mkpuchi sputtering ndị ọzọ, magnetron sputtering nwere ikike dị elu na mmepụta dị elu, a na-ejikwa ya nke ukwuu na mmepụta ụlọ ọrụ dị iche iche.
2, Ike dị elu. Ihe mgbaru ọsọ nke magnetron sputtering na-ahọrọkarị voltaji n'ime oke 200V-1000V, na-abụkarị 600V, n'ihi na voltaji nke 600V dị n'ime oke kachasị mma nke arụmọrụ ike.
3. Ike dị ala nke na-agbapụta. A na-etinye voltaji ebe magnetron dị ala, ebe magnet na-egbochi plasma dị nso na kathode ahụ, nke na-egbochi ihe ndị nwere ike dị elu ịbanye na substrate ahụ.
4, Okpomọkụ dị ala nke substrate. Enwere ike iji anode duzie elektrọn ndị a na-emepụta n'oge mwepụta, ọ dịghị mkpa ka nkwado substrate ahụ mezue, nke nwere ike ibelata mwakpo elektrọn nke substrate ahụ nke ọma. Ya mere, okpomọkụ substrate ahụ dị ala, nke dị mma maka ụfọdụ substrate plastik ndị na-anaghị eguzogide mkpuchi okpomọkụ dị elu.
5, Ịchacha elu ebe a na-etinye ihe na Magnetron sputtering abụghị otu. Ịchacha elu ebe a na-etinye ihe na Magnetron sputtering na-enweghị nhata na-akpata site na ebe a na-etinye ihe na-enweghị nhata nke ihe ahụ. Ebe a na-etinye ihe ...
6、Ebumnobi mejupụtara. Nwere ike ime ihe nkiri mkpuchi ihe mgbaru ọsọ mejupụtara. Ugbu a, ojiji nke usoro ihe owuwu magnetron target sputtering ejirila ihe nkiri alloy Ta-Ti, (Tb-Dy)-Fe na Gb-Co kpuchie nke ọma. Nhazi ihe owuwu mejupụtara nwere ụdị anọ, n'otu n'otu, bụ ihe mgbaru ọsọ gburugburu, ihe mgbaru ọsọ gburugburu, ihe mgbaru ọsọ gburugburu na-agbagharị agbagharị. Ojiji nke nhazi ihe mgbaru ọsọ mejupụtara ka mma.
7. Ngwa dị iche iche. Usoro nfụkasị magnetron nwere ike itinye ọtụtụ ihe, ndị a na-ahụkarị bụ: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, wdg.
Ịdọpụ Magnetron bụ otu n'ime usoro mkpuchi kachasị eji enweta ihe nkiri dị elu. Site na katode ọhụrụ, ọ nwere ojiji dị elu na ọnụego itinye ihe dị elu. Usoro mkpuchi magnetron vacuum nke Guangdong Zhenhua A na-eji usoro mkpuchi magnetron sputtering eme ihe ugbu a na mkpuchi nke nnukwu mpaghara. A naghị eji usoro a eme ihe naanị maka itinye ihe nkiri otu oyi akwa, kamakwa maka mkpuchi ihe nkiri ọtụtụ oyi akwa, na mgbakwunye, a na-ejikwa ya na usoro mpịakọta iji tụgharịa ihe nkiri nkwakọ ngwaahịa, ihe nkiri anya, lamination na mkpuchi ihe nkiri ndị ọzọ.
Oge ozi: Mee-31-2024