Lub tshuab nqus tsev magnetron sputtering yog qhov tsim nyog rau cov txheej txheem tso tawm reactive. Qhov tseeb, cov txheej txheem no tuaj yeem tso cov zaj duab xis nyias ntawm txhua yam oxide, carbide, thiab nitride. Tsis tas li ntawd, cov txheej txheem kuj tseem tsim nyog rau kev tso cov qauv zaj duab xis ntau txheej, suav nrog cov qauv tsim kho qhov muag, cov yeeb yaj kiab xim, cov txheej txheem tiv thaiv kev hnav, nano-laminates, superlattice coatings, cov yeeb yaj kiab rwb thaiv tsev, thiab lwm yam. Txij li thaum xyoo 1970, cov qauv tso tawm zaj duab xis zoo tau tsim rau ntau yam khoom siv txheej zaj duab xis. Cov ntaub ntawv no suav nrog cov ntaub ntawv conductive pob tshab, semiconductors, polymers, oxides, carbides, thiab nitrides, thaum fluorides siv rau hauv cov txheej txheem xws li evaporative coating.
Qhov zoo tshaj plaws ntawm cov txheej txheem magnetron sputtering yog siv cov txheej txheem reactive lossis non-reactive los tso cov khaubncaws sab nraud povtseg ntawm cov ntaub ntawv no thiab tswj qhov zoo ntawm cov txheej txheej, cov tuab ntawm zaj duab xis, cov tuab ntawm zaj duab xis thiab cov khoom siv kho tshuab ntawm cov txheej. Cov txheej txheem muaj cov yam ntxwv raws li nram no.
1, Tus nqi tso tawm loj. Vim yog siv cov electrodes magnetron ceev ceev, tuaj yeem tau txais cov ion ntws loj, ua kom zoo dua tus nqi tso tawm thiab tus nqi sputtering ntawm cov txheej txheem txheej no. Piv nrog rau lwm cov txheej txheem txheej sputtering, magnetron sputtering muaj peev xwm siab thiab cov txiaj ntsig siab, thiab siv dav hauv ntau yam kev lag luam.
2, Kev siv hluav taws xob zoo. Feem ntau, lub hom phiaj magnetron sputtering xaiv qhov voltage hauv qhov ntau ntawm 200V-1000V, feem ntau yog 600V, vim tias qhov voltage ntawm 600V tsuas yog nyob rau hauv qhov ntau ntawm kev siv hluav taws xob zoo tshaj plaws.
3. Lub zog sputtering qis. Lub zog magnetron target voltage raug siv qis, thiab lub magnetic field txwv cov plasma ze ntawm cathode, uas tiv thaiv cov khoom me me uas muaj zog dua los ntawm kev tawm mus rau ntawm lub substrate.
4. Qhov kub ntawm lub substrate qis. Lub anode siv tau los coj cov electrons uas tsim tawm thaum lub sijhawm tso tawm, tsis tas yuav tsum muaj kev txhawb nqa ntawm lub substrate kom tiav, uas tuaj yeem txo qhov kev tawm tsam ntawm cov electrons ntawm lub substrate. Yog li qhov kub ntawm lub substrate qis, uas zoo tagnrho rau qee cov yas substrates uas tsis tiv taus cov txheej txheem kub siab.
5, Magnetron sputtering lub hom phiaj nto etching tsis sib xws. Magnetron sputtering lub hom phiaj nto etching tsis sib xws yog tshwm sim los ntawm lub magnetic teb tsis sib xws ntawm lub hom phiaj. Qhov chaw ntawm lub hom phiaj etching tus nqi yog loj dua, yog li ntawd qhov kev siv tau zoo ntawm lub hom phiaj yog qis (tsuas yog 20-30% kev siv tus nqi). Yog li ntawd, txhawm rau txhim kho kev siv lub hom phiaj, qhov kev faib tawm ntawm lub magnetic teb yuav tsum tau hloov pauv los ntawm qee txoj kev, lossis kev siv cov hlau nplaum txav mus rau hauv cathode kuj tuaj yeem txhim kho kev siv lub hom phiaj.
6, Lub hom phiaj sib xyaw. Muaj peev xwm ua tau cov zaj duab xis txheej txheej sib xyaw. Tam sim no, kev siv cov txheej txheem sputtering magnetron sib xyaw tau ua tiav coated rau ntawm Ta-Ti alloy, (Tb-Dy) -Fe thiab Gb-Co alloy zaj duab xis. Cov qauv phiaj sib xyaw muaj plaub hom, feem, yog lub hom phiaj puag ncig, lub hom phiaj plaub fab, lub hom phiaj me me thiab lub hom phiaj sector inlaid. Kev siv cov qauv phiaj sector inlaid zoo dua.
7. Ntau yam kev siv. Cov txheej txheem magnetron sputtering tuaj yeem tso ntau yam khoom, cov uas feem ntau yog: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti, Zr, SiO, AlO, GaAs, U, W, SnO, thiab lwm yam.
Magnetron sputtering yog ib qho ntawm cov txheej txheem txheej txheem siv dav tshaj plaws kom tau txais cov yeeb yaj kiab zoo. Nrog lub cathode tshiab, nws muaj kev siv lub hom phiaj siab thiab tus nqi tso tawm siab. Guangdong Zhenhua Technology nqus tsev magnetron sputtering txheej txheem tam sim no siv dav hauv kev txheej txheem ntawm thaj chaw loj. Cov txheej txheem tsis yog tsuas yog siv rau kev tso tawm ib txheej zaj duab xis xwb, tab sis kuj rau ntau txheej zaj duab xis txheej, ntxiv rau, nws kuj siv rau hauv cov txheej txheem dov rau yob rau ntim zaj duab xis, zaj duab xis kho qhov muag, lamination thiab lwm yam txheej txheej zaj duab xis.
Lub sijhawm tshaj tawm: Tsib Hlis-31-2024