Ekumbozeni nge-vacuum, ukulawulwa komkhathi kungenye yezinto eziyisisekelo ezithinta ikhwalithi yefilimu kanye nokuqina kwenqubo. Nakuba igumbi lokumboza lisebenza ngaphansi kwe-vacuum, indawo yokufaka akuyona indawo "engenagesi" ngokuphelele. Amagesi asele, amagesi enqubo, amagesi asabelayo, ukugeleza kwegesi, ingcindezi yokusebenza, kanye nezimo zokupompa zihlala zixhumana ne-plasma kanye nezinhlobo zokufaka.
Ekukhiqizweni kwangempela, amaphutha amaningi okumboza abonakala ehlobene nethagethi, i-cathode, i-substrate, noma ukunikezwa kwamandla ekugcineni angalandelelwa emuva ekulawulweni komkhathi okungazinzile. Izinkinga ezifana nombala wefilimu ongazinzile, ukunamathela okungekuhle, ukumelana kwefilimu okungavamile, ukugoba ngokweqile, ukujiya kwefilimu okungalingani, imigodi, kanye nokwehluka kwe-batch-to-batch kuvame ukuhlotshaniswa eduze nezinguquko emoyeni wenqubo.
Ngakho-ke, ezinhlelweni ze-PVD zezimboni, ukulawulwa komkhathi akufanele kubhekwe njengokulungisa nje imitha yokugeleza kwegesi. Kuyinqubo ehlanganisiwe ehilela ingcindezi yesisekelo, ukwakheka kwegesi esele, ukugeleza kwenqubo-negesi, ingcindezi yokusebenza, ingcindezi engaphelele yegesi, ukuhanjiswa kwepompo, izimo ze-plasma, kanye nempendulo yegesi esabelayo.
1. Isinyathelo Sokuqala Akusikho Ukujova Ngegesi, Kodwa Ukulawula I-Base Vacuum
Iphutha elivamile ekukhiqizeni ukugxila kumapharamitha enqubo-gesi ngenkathi ubheka isimo segumbi le-vacuum uqobo.
Ngaphambi kokufaka amagesi enqubo, igumbi lokumboza kumele lifinyelele ingcindezi yesisekelo efanele. Ingcindezi yesisekelo ephansi ngokwanele isiza ukunciphisa i-oxygen esele, umhwamuko wamanzi, ama-hydrocarbon, kanye nezinye izinto ezingcolisayo. La magesi asele angabamba iqhaza enqubweni yokufaka futhi afakwe efilimini ekhulayo, okuthinta ukwakheka kwefilimu, isakhiwo esincane, ukunamathela, kanye nezakhiwo ze-optical noma zikagesi.
Lokhu kubaluleke kakhulu ezinqubweni ze-PVD ezisebenzayo. Isibonelo, lapho kufakwa ama-nitride noma ama-oxide, igesi ephendulayo ehlosiwe kumele ihlukaniswe nomoya-mpilo ongalawulwa noma umhwamuko wamanzi osele ekamelweni. Ngaphandle kwalokho, umoya-mpilo wangempela ophendulayo ungase uphambuke kakhulu ku-recipe yenqubo yize isilawuli sokugeleza kwesisindo sisebenza ngokujwayelekile.
Ekukhiqizeni okungokoqobo, uma iresiphi efanayo iveza imiphumela ehlukile yokumboza ngokuzumayo, umbuzo wokuqala akufanele uhlale uthi ingabe amandla aqondiwe ashintshile yini. Kubalulekile futhi ukuhlola ukuthi ingcindezi yesisekelo, isikhathi sokuphampa, ukuhlanzeka kwegumbi, kanye nezimo zegesi ezisele zishintshile yini.
2. Ukuziphatha Okusheshayo Kuyinkomba Yenqubo Ebalulekile
Uhlelo lwe-vacuum olunempilo kufanele lube nezici ezizinzile neziphindaphindwayo zokupompa.
Uma igumbi lithatha isikhathi eside kakhulu kunokujwayelekile ukufinyelela ingcindezi eyisisekelo edingekayo, lokhu kungabonisa ukuphuma kwegesi okwenyukayo, ukungcola, ukuvuza kwe-vacuum, ukusebenza kwephampu okonakele, noma umswakama owedlulele ngaphakathi ekamelweni.
Imithombo evamile yokukhipha uphethiloli ihlanganisa izinto ezisetshenziswa ngaphansi komhlaba, izinto ezisetshenziswayo, izinsalela ze-polymer, i-vacuum grease, izindawo zamakamelo ezingcolile, kanye nomswakama omuncwayo. Ezinye izinto zingase ziqhubeke nokukhipha amagesi ngemva kokuba igumbi selifinyelele ingcindezi ebonakala ivumelekile, okuholela ezimweni zenqubo ezingazinzile ngesikhathi sokufakwa.
Ngakho-ke, ubudlelwano phakathi kwesikhathi sokuphampa, ukucindezela okuphezulu, izinga lokunyuka kwengcindezi, kanye nokuqina kwenqubo kunganikeza ulwazi olubalulekile mayelana nesimo sesistimu ye-vacuum.
Ngemishini yokukhiqiza, ukuqapha ukuziphatha kokunyuka kwengcindezi ngemva kokuhlukaniswa nohlelo lokupompa kungasiza futhi ekuhlukaniseni phakathi kokuvuza kwangempela nokuphuma kwegesi okuvamile. Lokhu kuwusizo ikakhulukazi ngesikhathi sokuxazulula izinkinga.
3. Ingcindezi Yokusebenza Inquma Indawo Yokuthutha
Ngemva kokuthola i-vacuum eyisisekelo efanele, igesi yenqubo ifakwa bese igumbi lingena ohlelweni lokucindezela kokusebenza.
Ingcindezi yokusebenza ithonya ngqo indlela ekhululekile ephakathi yama-athomu aqhumayo, ama-ion, nama-electron. Ngakho-ke ithinta izici ze-plasma, izinga lokufakwa, i-ionization, ukuhlakazeka kwezinhlayiya, kanye nokusatshalaliswa kwe-angular kwe-deposition flux.
Uma ingcindezi iphansi kakhulu, izinhlobo ezinamathafa zingahamba ekamelweni ngokushayisana okuncane, okuholela ekuguqukeni kokubekwa kwezindawo ngendlela eqondile. Lokhu kungaba wusizo kwezinye izinhlelo zokusebenza kodwa kungandisa imiphumela yokufihla ezingxenyeni eziyinkimbinkimbi ezinezinhlangothi ezintathu.
Njengoba ingcindezi ikhula, ukushayisana phakathi kwezinhlobo zegesi kanye nama-molecule egesi kuba njalo. Ukushintshashintsha kokufakwa kwegesi kuba ukusabalala okukhulu, okungathuthukisa ukumbozwa ezindaweni ezigobile kodwa futhi kunganciphisa ukusebenza kahle kokufakwa kwegesi futhi kushintshe ukuma kwefilimu.
Ngenxa yalokho, ingcindezi yokusebenza akufanele ibhekwe njengenani elidinga "ukusethwa kahle." Kuyinguquko yenqubo ethinta ngqo i-kinetics yokuthutha kwezinhlobo zokubekwa.
4. Ukugeleza Kwegesi Nokucindezela Akuyona Into Efanayo
Ekusebenzeni kwe-PVD okusebenzayo, ukugeleza kwegesi kuvame ukulawulwa kusetshenziswa isilawuli sokugeleza kwesisindo (i-MFC), kuyilapho ingcindezi yegumbi inqunywa ibhalansi phakathi kokufakwa kwegesi kanye nomthamo wokupompa.
Lo mehluko ubaluleke kakhulu.
Izinga elifanayo lokugeleza kwegesi alikhiqizi ngempela ingcindezi efanayo yokusebenza ngaphansi kwezimo ezahlukene zesistimu ye-vacuum. Uma isivinini sokupompa, isikhundla se-throttle-valve, ukuhamba kwegumbi, noma indlela yangaphakathi yokugeleza kwegesi ishintsha, ingcindezi ephumayo nayo ingashintsha.
Isibonelo, uma i-throttle valve noma uhlelo lokupompa lusebenza ngendlela engajwayelekile, umqhubi angakhuphula ukugeleza kwegesi ukuze akhokhele ukuphambuka kwengcindezi. Nakuba ingcindezi ingabuyela okwesikhashana enanini eliqondiwe, ukugeleza kwegesi kwangempela kanye nezimo ze-plasma kungenzeka ukuthi sezishintshile kakade.
Ngakho-ke, onjiniyela bezinqubo abanolwazi ngokuvamile baqapha ukugeleza kwegesi kanye nengcindezi yegumbi ndawonye, kunokusebenzisa noma iyiphi ipharamitha ngokuzimela njengereferensi yenqubo kuphela.
5. Ukulawulwa Kwegesi Esabelayo Kuzwela Kakhulu
Ngezinqubo ze-PVD ezisebenzayo njenge-TiN, CrN, TiAlN, Al₂O₃, SiO₂, nezinye izembozo ezihlanganisiwe, ukulawulwa komkhathi kuba yinkimbinkimbi kakhulu.
Igesi ephendulayo ihlanganyela ngqo ekwakhekeni kwefilimu. I-nitrogen, i-oxygen, i-acetylene, i-methane, noma amanye amagesi aphendulayo angasabela nezinhlobo eziphefumulayo noma ezinamanzi ukuze kutholakale ukwakheka kwefilimu yokugcina.
Ngakho-ke ushintsho oluncane ekucindezelweni okungaphelele kwegesi ephendulayo lungabangela ushintsho olukhulu ezimpahleni zefilimu.
Isibonelo, ukugeleza kwe-nitrogen okunganele kungabangela i-nitridation engaphelele, kuyilapho i-nitrogen eningi kakhulu ingathinta izinga lokufakwa, izici ze-plasma, ukuziphatha kwe-target, kanye nokwakheka kwefilimu. Ekuqhumeni kwe-magnetron okusebenzayo, ukwethulwa kwe-reactive-gas ngokweqile kungaholela ebuthini be-target, lapho ungqimba oluhlanganisiwe lwakha khona ebusweni be-target futhi lushintshe izici ze-sputtering.
Yingakho ukusputter okusabelayo kuvame ukudinga ukulawulwa kwenqubo okuyinkimbinkimbi kakhulu kunokufakwa kwensimbi okuvamile.
6. Ukudakwa Okuqondiwe Kuyinkinga Ejwayelekile Yokulawula Umoya
Ekuqhumeni kwe-magnetron okusebenzayo, ubuthi obuqondiwe bungenye yezinkinga ezivame kakhulu ezihlobene nokulawulwa komkhathi.
Uma ingcindezi engaphelele yegesi esabelayo ikhuphuka ngaphezu kwebanga elithile, indawo eqondiwe ingambozwa ungqimba oluhlanganisiwe. Inhloso bese ishintsha isuka esimweni sokuchitheka kwensimbi iye esimweni sobuthi.
Lokhu kuguquka kungabangela izinguquko esilinganisweni sokuphalaza, i-voltage yokukhipha, i-discharge current, i-secondary-electron emission, izinga lokufaka, kanye nokwakheka kwefilimu.
Inkinga iba nzima kakhulu ngoba ubudlelwano phakathi kokugeleza kwegesi esabelayo kanye nesimo esiqondiwe ngokuvamile abuqondile. Ushintsho oluncane ekugelezeni kwegesi lungadala ushintsho olukhulu kakhulu esimweni senqubo.
Ekukhiqizweni okuphezulu, ukuthembela kuphela ekugelezeni kwegesi ephendulayo okungaguquki kungase kunganeli. Izinhlelo ezithuthukisiwe kakhulu zingasebenzisa ukulawulwa kwe-closed-loop okusekelwe ekukhishweni kokukhanya, izici zokukhipha, ukulinganisa kwengcindezi engaphelele, noma ezinye izimpawu zenqubo ukuze kuqiniswe iwindi lokufaka eliphendulayo.
7. Ukuhlanzeka Kwegumbi Kuthinta Ngokuqondile Ukuzinza Komoya
Ukulawulwa kwesimo sezulu akuxhomekile kuphela ohlelweni lokuhlinzeka ngegesi. Isimo sangaphakathi segumbi lokumboza sibaluleke ngokulinganayo.
Ngesikhathi sokukhiqiza okuphindaphindiwe, izinto zokumboza ziqoqana kancane kancane ezindongeni zegumbi, ezivikelweni, ezisekelweni ze-substrate, nakwezinye izingxenye zangaphakathi. Lawa ma-depositi angaba imithombo yokungcoliswa kwezinhlayiya noma ukuphuma kwegesi. Amanye ama-depositi angasabela namagesi enqubo noma akhiphe amagesi angeniswe ngaphambilini ngesikhathi sokushisa okulandelayo kanye nokusebenza kwe-plasma.
Lokhu kungashintsha kancane kancane isimo sangempela segumbi ngisho noma iresiphi yenqubo ingashintshi.
Ngenxa yalesi sizathu, ukuhlanza amakamelo njalo, ukushintshwa kwesihlangu, ukulungiswa kwezinto, kanye nokuhlolwa kwe-vacuum-seal kuyizingxenye ezibalulekile zokuphathwa komkhathi.
Inqubo ye-PVD ezinzile ayiwona nje umphumela weresiphi ezinzile. Incike ekugcineni indawo engokoqobo ezinzile ngaphakathi kwegumbi.
8. Ukusatshalaliswa Kwegesi Kubalulekile Njengobuningi Begesi
Enye inkinga engokoqobo ukuthi inani eliphelele legesi elingena ekamelweni aliqinisekisi isimo senqubo efanayo.
Umklamo kanye nendawo yokungena kwegesi, ishawa, i-baffle, i-pump port, i-throttle valve, kanye ne-substrate holder kunquma ukuthi igesi isatshalaliswa kanjani ngaphakathi kwegumbi.
Ukusatshalaliswa kwegesi okubi kungadala ukwehluka kwendawo ekugxilweni kwegesi esabelayo noma ubuningi be-plasma. Umphumela ungaba ukwakheka kwefilimu okuhlukile noma ukuqina ezindaweni ezahlukene ku-substrate.
Lokhu kubaluleke kakhulu ezinhlelweni zokumboza ezinkulu kanye nemishini yokukhiqiza enamandla okulayisha aphezulu.
Ngakho-ke, lapho kwenziwa ngcono umshini wokumboza nge-vacuum, ukwakheka kokugeleza kwegesi kufanele kucatshangelwe kanye nokucushwa komthombo we-plasma, ukujikeleza kwe-substrate, i-geometry yokupompa, kanye nesakhiwo segumbi.
9. Lapho Ukwembozwa Kushintsha Ngokungazelelwe, Hlola Umkhathi Kuqala
Ekukhiqizweni kwangempela, izinkinga zokumboza zivame ukubonakala njengokushintsha okungazelelwe kombala, ubulukhuni, ukunamathela, ukujiya kwefilimu, noma ukusebenza kukagesi.
Uma lokhu kwenzeka, kuyalingeka ukuthi kulungiswe ngokushesha amandla okubeka, ukukhetha kwe-substrate, noma isikhathi sokubeka. Kodwa-ke, iziguquguquko ezihlobene nomoya kufanele zihlolwe kuqala.
Uchungechunge lokuxazulula izinkinga olusebenzayo luwukuqhathanisa idatha yokukhiqiza yamanje nesimo senqubo evamile: ingcindezi yesisekelo, isikhathi sokuphampa, ingcindezi yokusebenza, ukugeleza kwenqubo-igesi, ukugeleza kwegesi esabelayo, isikhundla se-throttle-valve, i-voltage/current yokukhipha, izinga lokushisa le-substrate, kanye nesilinganiso sokufakwa.
Uma enye yalezi zinhlaka ishintshile, ingase inikeze incazelo eqondile kakhulu kunokushintsha nje iresiphi yokumboza.
Ikakhulukazi, uma ukusethwa kokugeleza kwegesi kungashintshi kodwa ingcindezi yegumbi ishintshile, inkinga ingase ibe sesistimu yokupompa, ivalvu yokulawula ingcindezi, ukuphakelwa kwegesi, ukuhamba kwegumbi, noma isimo sokuvuza, kunokuba kube sezinto ezimbozwayo ngokwazo.
10. Ukulawulwa Komkhathi Ekugcineni Kuyinkinga Yokulawula Uhlelo
Okuhlangenwe nakho okusebenzayo okuqoqwe kusukela ekumbozweni kwe-vacuum yezimboni kubonisa ukuthi ukulawulwa komkhathi akukwazi ukuhlukaniswa nohlelo lwe-vacuum oluphelele.
Amaphampu e-vacuum anquma ikhono lokupompa legumbi. Uhlelo lokulethwa kwegesi lunquma ukungena kwegesi. I-throttle valve ilawula ubudlelwano phakathi kokugeleza kwegesi kanye nomfutho wegumbi. Umthombo we-plasma unquma ukuthi igesi ifakwa kanjani i-ion futhi ixhumana kanjani nezinhlobo zokufakwa. Uhlelo lwe-substrate lunquma ukuthi umsebenzi uxhumana kanjani ne-plasma.
Lezi zinhlelo zisebenza ngesikhathi esisodwa, futhi ushintsho kupharamitha eyodwa lungathinta ezinye eziningana.
Ngakho-ke, inqubo ye-PVD evuthiwe kufanele isungule iwindi lenqubo elizinzile kunokuthembela kupharamitha eyodwa eqondile. Inhloso ukuqinisekisa ukuthi ingcindezi ye-vacuum, ukugeleza kwegesi, izici ze-plasma, izimo ze-substrate, kanye nemingcele yokufaka ihlala ngaphakathi kwebanga elilawulwayo kulo lonke ukukhiqizwa.
Isiphetho
Ukulawulwa kwesimo sezulu kungenye yezinto eziyisisekelo zokugqoka okuqinile kwe-vacuum. Kusukela ekucindezelweni kwesisekelo kanye nokuphathwa kwegesi esele kuya ekucindezelweni okusebenzayo, ukugeleza kwegesi, ukucindezela okungaphelele kwegesi esabelayo, ubuthi obuqondiwe, kanye nokuhlanzeka kwegumbi, into ngayinye ingathonya ukugqoka kokugcina.
Ukuze kufakwe i-PVD evamile, izimo zomkhathi ezizinzile zinikeza isisekelo sokukhula kwefilimu okuphindaphindwayo. Ukuze kusetshenziswe ama-sputter asabelayo kanye nezinye izinqubo ezisizwa yi-plasma, ukulawulwa komkhathi okunembile kuba yinto ebaluleke kakhulu ngoba ukwakheka kwegesi kuhlanganyela ngqo ekwakhiweni kwefilimu.
Ngakho-ke, inhloso yangempela yokulawula umkhathi akukhona nje ukugcina ingcindezi ethile noma inani lokugeleza kwegesi. Kuwukusungula indawo yokubeka ezinzile nephindaphindekayo lapho i-plasma, izinhlobo zokubeka, i-substrate, kanye nomoya osabelayo zihlala zisesimweni esilawulwayo.
Ngemishini yokumboza i-vacuum yezimboni, lokhu kudinga ukwakheka okuhlelekile kohlelo lokupompa i-vacuum, uhlelo lokulethwa kwegesi, uhlelo lokulawula ingcindezi, umthombo we-plasma, isakhiwo segumbi, kanye nesofthiwe yokulawula inqubo.
-Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuumI-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Agasti-08-2026