Kwi-vacuum coating, ulawulo lomoya yenye yezona zinto ziphambili ezichaphazela umgangatho wefilimu kunye nokuzinza kwenkqubo. Nangona igumbi lokugquma lisebenza phantsi kwe-vacuum, indawo yokugquma ayisiyondawo "engenagesi" ngokupheleleyo. Iigesi eziseleyo, iigesi zenkqubo, iigesi ezisebenzayo, ukuhamba kwegesi, uxinzelelo lokusebenza, kunye neemeko zokumpompa zihlala zisebenzisana ne-plasma kunye neentlobo ze-deposition.
Kwimveliso yokwenyani, iziphene ezininzi zokugquma ezibonakala ngathi zinxulumene nethagethi, i-cathode, i-substrate, okanye umbane ekugqibeleni zinokulandelwa kulawulo lwemozulu olungazinzanga. Iingxaki ezinje ngombala wefilimu ongazinzanga, ukunamathela okungekuhle, ukumelana nefilimu okungaqhelekanga, i-arcing egqithisileyo, ubukhulu befilimu obungalinganiyo, imingxuma ye-pin, kunye notshintsho lwe-batch-to-batch zihlala zinxulunyaniswa ngokusondeleyo notshintsho kwimo yenkqubo.
Ke ngoko, kwiinkqubo ze-PVD zoshishino, ulawulo lomoya akufuneki luthathwe njengokulungisa nje imitha yokuhamba kwegesi. Yinkqubo edibeneyo ebandakanya uxinzelelo lwesiseko, ukwakheka kwegesi eseleyo, ukuhamba kwenkqubo-igesi, uxinzelelo olusebenzayo, uxinzelelo oluyinxenye yegesi, ukuqhuba kwepompo, iimeko zeplasma, kunye nempendulo yegesi esebenzayo.
1. Inyathelo Lokuqala Asikuko Ukujova Igesi, Kodwa Kukulawula I-Base Vacuum
Impazamo eqhelekileyo kwimveliso kukugxila kwiiparamitha zenkqubo-gesi ngelixa ujonga imeko yegumbi le-vacuum ngokwalo.
Ngaphambi kokuba kungeniswe iigesi zenkqubo, igumbi lokugquma kufuneka lifikelele kuxinzelelo olusisiseko olufanelekileyo. Uxinzelelo olusisiseko oluphantsi ngokwaneleyo lunceda ekunciphiseni ioksijini eseleyo, umphunga wamanzi, iihydrocarbons, kunye nezinye izinto ezingcolisayo. Ezi gesi eziseleyo zinokuthatha inxaxheba kwinkqubo yokubeka kwaye zifakwe kwifilimu ekhulayo, nto leyo echaphazela ukwakheka kwefilimu, isakhiwo se-microstructure, ukunamathela, kunye neempawu ze-optical okanye zombane.
Oku kubaluleke kakhulu kwiinkqubo ze-PVD ezisabelayo. Umzekelo, xa kufakwa i-nitrides okanye ii-oxides, igesi esabelayo ecetywayo kufuneka yahlulwe kwi-oksijini engalawulwayo okanye umphunga wamanzi oseleyo kwigumbi. Ngaphandle koko, umoya osabelayo unokwahluka kakhulu kwindlela yokupheka nangona umlawuli wokuhamba kobuninzi usebenza ngokuqhelekileyo.
Kwimveliso ebonakalayo, ukuba iresiphi efanayo ngequbuliso ivelisa iziphumo ezahlukeneyo zokugquma, umbuzo wokuqala akufuneki uhlale usithi ingaba amandla ekujoliswe kuwo atshintshile na. Kwakhona kuyimfuneko ukujonga ukuba uxinzelelo lwesiseko, ixesha lokumpompa, ucoceko lwegumbi, kunye neemeko zegesi eziseleyo zitshintshile na.
2. Ukuziphatha kwePump-Down yiNgcebiso ebalulekileyo yeNkqubo
Inkqubo yokufunxa umoya esempilweni kufuneka ibe neempawu zokufunxa umoya ezizinzileyo neziphindaphindwayo.
Ukuba igumbi lithatha ixesha elide kakhulu kunesiqhelo ukufikelela kuxinzelelo olufunekayo lwesiseko, oku kunokubonisa ukuphuma kwegesi engakumbi, ungcoliseko, ukuvuza kwe-vacuum, ukusebenza kwepompo eyonakeleyo, okanye ukufuma okugqithisileyo ngaphakathi kwigumbi.
Imithombo eqhelekileyo yokukhupha igesi ibandakanya izinto ezisetyenziswa kwi-substrate, izinto ezisetyenziswa kwi-fixtures, ii-polymer residues, i-vacuum grease, iindawo zegumbi ezingcolisiweyo, kunye nokufuma okufunxiweyo. Ezinye izinto zinokuqhubeka nokukhupha iigesi emva kokuba igumbi lifikelele kuxinzelelo olubonakala luvumelekile, nto leyo ebangela iimeko zenkqubo ezingazinzanga ngexesha lokufakwa.
Ngoko ke, ubudlelwane phakathi kwexesha lokuphuma kwepompo, uxinzelelo lokugqibela, izinga lokunyuka koxinzelelo, kunye nokuzinza kwenkqubo kunokubonelela ngolwazi oluxabisekileyo malunga nemeko yenkqubo ye-vacuum.
Kwizixhobo zokuvelisa, ukujonga indlela yokunyuka koxinzelelo emva kokuzihlukanisa kwinkqubo yokumpompa kunokunceda ukwahlula phakathi kokuvuza kokwenyani kunye nokuphuma kwegesi okuqhelekileyo. Oku kuluncedo ngakumbi ngexesha lokusombulula iingxaki.
3. Uxinzelelo Lokusebenza Lumisela Imeko Yothutho
Emva kokufumana i-vacuum efanelekileyo yesiseko, igesi yenkqubo ifakwa kwaye igumbi lingena kulawulo loxinzelelo olusebenzayo.
Uxinzelelo olusebenzayo luchaphazela ngokuthe ngqo indlela ephakathi ekhululekileyo yeeathom ezitshizayo, ii-ion, kunye nee-elektroni. Ngenxa yoko luchaphazela iimpawu zeplasma, izinga lokufakwa, i-ionization, ukusasazeka kwamasuntswana, kunye nokusasazwa kwe-angular kwe-deposition flux.
Xa uxinzelelo luphantsi, iintlobo ezitshileyo zinokuhamba kwigumbi zingangqubani kangako, nto leyo ebangela ukuba kubekho ukujika kwendlela ethile. Oku kunokuba luncedo kwezinye izicelo kodwa kunokunyusa imiphumo yomthunzi kwizinto ezintsonkothileyo ezinemilinganiselo emithathu.
Njengoko uxinzelelo lusanda, ukungqubana phakathi kweentlobo zegesi ezifakwayo kunye neemolekyuli zegesi kuya kuxhaphaka. Ukujikeleza kwegesi kuya kusasazeka ngakumbi, oku kunokuphucula ukugubungela kwiindawo ezixineneyo kodwa kunokunciphisa ukusebenza kakuhle kwegesi kunye nokutshintsha imo yefilimu.
Ngenxa yoko, uxinzelelo olusebenzayo alufanele luthathwe njengexabiso ekufuneka "libekwe ngokuchanekileyo." Luguquko lwenkqubo oluchaphazela ngokuthe ngqo i-transport kinetics ye-deposition species.
4. Ukuhamba kweGesi kunye noxinzelelo azifani
Kwimisebenzi yePVD esebenzayo, ukuhamba kwegesi kudla ngokulawulwa kusetyenziswa isilawuli sokuhamba kobunzima (MFC), ngelixa uxinzelelo lwegumbi lumiselwa kukulinganisela phakathi kokufakwa kwegesi kunye nomthamo wokumpompa.
Lo mahluko ubaluleke kakhulu.
Izinga lokuhamba kwegesi elifanayo alisoloko livelisa uxinzelelo olufanayo lokusebenza phantsi kweemeko ezahlukeneyo zenkqubo ye-vacuum. Ukuba isantya sokumpompa, indawo ye-throttle-valve, ukuhamba kwegumbi, okanye indlela yangaphakathi yokuhamba kwegesi iyatshintsha, uxinzelelo oluvelayo nalo lunokutshintsha.
Umzekelo, ukuba ivalvu yokutshixa okanye inkqubo yokumpompa isebenza ngendlela engaqhelekanga, umqhubi unokunyusa ukuhamba kwegesi ukuze abuyisele ukuphambuka koxinzelelo. Nangona uxinzelelo lunokubuyela okwethutyana kwixabiso ekujoliswe kulo, imeko yokwenyani yokuhamba kwegesi kunye neplasma zisenokuba sele zitshintshile.
Ngoko ke, iinjineli zeenkqubo ezinamava ngokubanzi zijonga ukuhamba kwegesi kunye noxinzelelo lwegumbi kunye, endaweni yokusebenzisa nayiphi na iparameter ngokuzimeleyo njengesalathiso senkqubo kuphela.
5. Ulawulo lweGesi oluSebenzayo lunobuthathaka ngakumbi
Kwiinkqubo ze-PVD ezisabelayo ezifana ne-TiN, i-CrN, i-TiAlN, i-Al₂O₃, i-SiO₂, kunye nezinye izinto ezidityanisiweyo, ulawulo lwe-atmosphere luba nzima kakhulu.
Igesi ephendulayo ithatha inxaxheba ngokuthe ngqo ekwakhiweni kwefilimu. I-nitrogen, ioksijini, i-acetylene, i-methane, okanye ezinye iigesi eziphendulayo zinokusabela kunye nohlobo oluphumayo okanye olutshileyo ukuze kuchongwe ukwakheka kwefilimu yokugqibela.
Utshintsho oluncinci kuxinzelelo oluncinci lwegesi ephendulayo lunokubangela utshintsho olukhulu kwiimpawu zefilimu.
Umzekelo, ukuhamba ngokwaneleyo kwe-nitrogen kunokubangela i-nitridation engaphelelanga, ngelixa i-nitrogen egqithisileyo inokuchaphazela izinga lokufakwa, iimpawu ze-plasma, ukuziphatha kwethagethi, kunye nokwakheka kwefilimu. Kwi-reactive magnetron sputtering, ukungeniswa kwe-reactive-gas egqithisileyo kunokukhokelela kwityhefu yethagethi, apho umaleko odibeneyo uvela kumphezulu wethagethi kwaye utshintshe iimpawu ze-sputtering.
Yingakho ukutshiza okusabelayo kudla ngokufuna ulawulo lwenkqubo oluntsonkothileyo kunokufakwa kwesinyithi okuqhelekileyo.
6. Ityhefu ekujoliswe kuyo yingxaki eqhelekileyo yokulawula umoya
Kwi-reactive magnetron sputtering, ityhefu ekujoliswe kuyo yenye yezona ngxaki zixhaphakileyo ezinxulumene nolawulo lomoya.
Xa uxinzelelo olungaphelelanga lwegesi ephendulayo lusanda ngaphaya komgama othile, umphezulu wento ekujoliswe kuyo unokugqunywa ngumaleko odibeneyo. Into ekujoliswe kuyo emva koko itshintsha ukusuka kwimeko yokutshiza yesinyithi ukuya kwimeko yetyhefu.
Olu tshintsho lunokubangela utshintsho kwisantya sokutshiza, i-voltage yokukhupha, i-discharge current, i-secondary-electron emission, isantya sokufaka, kunye nokwakheka kwefilimu.
Ingxaki iba nzima ngakumbi kuba ubudlelwane phakathi kokuhamba kwegesi ephendulayo kunye nemeko ekujoliswe kuyo budla ngokuba yinto engeyoyamgca. Utshintsho oluncinci ekuhambeni kwegesi lunokubangela utshintsho olukhulu kakhulu kwimeko yenkqubo.
Kwimveliso ephezulu, ukuthembela kuphela kumsinga wegesi ophendulayo osisigxina kusenokunganeli. Iinkqubo eziphucukileyo ngakumbi zingasebenzisa ulawulo oluvaliweyo olusekelwe ekukhutshweni kwe-optical, iimpawu zokukhupha, umlinganiselo woxinzelelo oluncinci, okanye ezinye iimpawu zenkqubo ukuzinzisa ifestile yokufaka i-reactive.
7. Ukucoceka kwegumbi kuchaphazela ngokuthe ngqo ukuzinza komoya
Ulawulo lomoya aluxhomekekanga kuphela kwinkqubo yokubonelela ngegesi. Imeko yangaphakathi yegumbi lokugquma ibaluleke ngokulinganayo.
Ngexesha lemijikelo yemveliso ephindaphindwayo, izinto zokugquma ziyaqokelelana kancinci kancinci kwiindonga zegumbi, kwiikhaka, kwiindawo zokugcina izinto, nakwezinye izinto zangaphakathi. Ezi zidiphozithi zinokuba yimithombo yongcoliseko lwamasuntswana okanye ukuphuma kwegesi. Ezinye iidiphozithi zinokusabela kwiigesi zenkqubo okanye zikhuphe iigesi ezifunxwe ngaphambili ngexesha lokufudumeza okulandelayo kunye nokusebenza kweplasma.
Oku kunokutshintsha kancinci kancinci imeko-bume yegumbi nangona iresiphi yenkqubo ingatshintshi.
Ngenxa yesi sizathu, ukucocwa rhoqo kwegumbi, ukutshintshwa kwekhaka, ukugcinwa kwezinto ezisetyenziswayo, kunye nokuhlolwa kwe-vacuum-seal zizinto ezibalulekileyo ekulawuleni umoya.
Inkqubo ye-PVD ezinzileyo ayisiyonto nje ebangelwa yindlela yokwenza iresiphi ezinzileyo. Ixhomekeke ekugcineni imeko-bume ezinzileyo ngaphakathi kwigumbi.
8. Ukusasazwa kweGesi Kubalulekile njengobungakanani beGesi
Enye ingxaki esebenzayo kukuba isixa siphela segesi esingena kwigumbi asiqinisekisi ukuba kukho imeko efanayo yenkqubo.
Uyilo kunye nendawo yokungena kwegesi, intloko yeshawa, i-baffle, i-pump port, i-throttle valve, kunye ne-substrate holder zigqiba indlela igesi esasazwa ngayo ngaphakathi kwigumbi.
Ukusasazwa kakubi kwegesi kunokudala umahluko wendawo kuxinzelelo lwegesi olusabelayo okanye uxinano lweplasma. Isiphumo sinokuba ziifilimu ezahlukeneyo okanye ubukhulu kwiindawo ezahlukeneyo kwi-substrate.
Oku kubaluleke kakhulu kwiinkqubo zokugquma ezinkulu kunye nezixhobo zokuvelisa ezinomthamo ophezulu wokulayisha.
Ke ngoko, xa kulungiswa umatshini wokugquma i-vacuum, uyilo lokuhamba kwegesi kufuneka luqwalaselwe kunye noqwalaselo lwe-plasma-source, ujikelezo lwe-substrate, i-geometry yokupompa, kunye nolwakhiwo lwegumbi.
9. Xa i-Coating itshintsha ngequbuliso, jonga i-atmosphere kuqala
Kwimveliso yokwenyani, iingxaki zokugquma zihlala zibonakala njengotshintsho olukhawulezileyo kumbala, ubulukhuni, ukunamathela, ubukhulu befilimu, okanye ukusebenza kombane.
Xa oku kusenzeka, kuyathandeka ukulungisa ngoko nangoko amandla okubeka, ukukhetha kwe-substrate, okanye ixesha lokubeka. Nangona kunjalo, izinto eziguquguqukayo ezinxulumene nomoya kufuneka zihlolwe kuqala.
Indlela yokusombulula iingxaki esebenzayo kukuthelekisa idatha yemveliso yangoku nemeko yenkqubo eqhelekileyo: uxinzelelo lwesiseko, ixesha lokupompoza, uxinzelelo lokusebenza, ukuhamba kwegesi yenkqubo, ukuhamba kwegesi esebenzayo, indawo ye-throttle-valve, i-discharge voltage/current, ubushushu be-substrate, kunye nesantya sokufakwa.
Ukuba enye yezi parameters itshintshile, inokubonelela ngengcaciso ethe ngqo kunokutshintsha nje iresiphi yokugquma.
Ngokukodwa, ukuba indlela igesi ejikeleziswa ngayo ayitshintshanga kodwa uxinzelelo lwegumbi lutshintshile, ingxaki isenokuba kwinkqubo yokumpompa, ivalvu yokulawula uxinzelelo, unikezelo lwegesi, ukuhamba kwegumbi, okanye imeko yokuvuza, kunokuba ibe kwimpahla yokugquma ngokwayo.
10. Ulawulo lweMozulu Ekugqibeleni yingxaki yoLawulo lweNkqubo
Amava asebenzisekayo aqokelelwe kwi-vacuum coating yemizi-mveliso abonisa ukuba ulawulo lomoya alunakwahlulwa kwinkqubo ye-vacuum iyonke.
Iimpompo zevacuum zimisela amandla okumpompa kwegumbi. Inkqubo yokuhambisa igesi imisela igalelo legesi. Ivalvu ye-throttle ilawula ubudlelwane phakathi kokuhamba kwegesi kunye noxinzelelo lwegumbi. Umthombo weplasma umisela indlela igesi efakwa ngayo i-ion kwaye isebenzisana neentlobo ze-deposition. Inkqubo ye-substrate imisela indlela i-workpiece esebenzisana ngayo ne-plasma.
Ezi nkqubo zisebenza ngaxeshanye, kwaye utshintsho kwiparameter enye lunokuchaphazela ezinye ezininzi.
Ngoko ke, inkqubo yePVD evuthiweyo kufuneka iseke ifestile yenkqubo ezinzileyo endaweni yokuxhomekeka kwiparameter enye esisigxina. Injongo kukuqinisekisa ukuba uxinzelelo lwe-vacuum, ukuhamba kwegesi, iimpawu zeplasma, iimeko ze-substrate, kunye neeparameter zokubeka zihlala ngaphakathi koluhlu olulawulwayo kuyo yonke imveliso.
Isiphelo
Ulawulo lomoya yenye yezinto ezisisiseko zokugquma nge-vacuum ezizinzileyo. Ukusuka kuxinzelelo olusisiseko kunye nolawulo lwegesi eseleyo ukuya kuxinzelelo olusebenzayo, ukuhamba kwegesi, uxinzelelo oluncinci lwegesi esabelayo, ubuthi obujoliswe kuyo, kunye nokucoceka kwegumbi, into nganye inokuchaphazela ukugquma kokugqibela.
Kwindawo eqhelekileyo yokubeka i-PVD, iimeko zomoya ezizinzileyo zibonelela ngesiseko sokukhula kwefilimu okuphindaphindwayo. Kwinkqubo yokukhupha umoya ophendulayo kunye nezinye iinkqubo ezincediswa yi-plasma, ulawulo oluchanekileyo lomoya luba lubaluleke ngakumbi kuba ukwakheka kwegesi kubandakanyeka ngokuthe ngqo ekwakhiweni kwefilimu.
Injongo yokwenyani yolawulo lomoya-bume ayikokugcina nje uxinzelelo oluthile okanye ixabiso lokuhamba kwegesi. Kukuseka indawo yokumisa ezinzileyo nephinda-phinda apho iplasma, iintlobo zokumisa, i-substrate, kunye nomoya ophendulayo zihlala zikwimeko elawulwayo.
Kwizixhobo zokugquma i-vacuum cleaner zoshishino, oku kufuna uyilo oludibeneyo lwenkqubo yokumpompa i-vacuum, inkqubo yokuhambisa igesi, inkqubo yokulawula uxinzelelo, umthombo we-plasma, ulwakhiwo lwegumbi, kunye nesoftware yokulawula inkqubo.
-Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuumI-Zhenhua Vacuum
Ixesha lokuthumela: Agasti-08-2026