Mukuvhara mhepo ne vacuum, kudzora mhepo ndeimwe yezvinhu zvinonyanya kukanganisa kunaka kwefirimu uye kugadzikana kwemaitiro. Kunyangwe imba yekufukidza ichishanda pasi pe vacuum, nzvimbo yekuviga haisi nzvimbo "isina gasi" zvachose. Magasi akasara, magasi ekugadzirisa, magasi anopindura, kuyerera kwegasi, kumanikidzwa kwekushanda, uye mamiriro ekupomba zvinogara zvichibatana neplasma uye mhando dzekuviga.
Mukugadzirwa chaiko, zvikanganiso zvakawanda zvekufukidza zvinoita sekunge zvine chekuita nechinangwa, cathode, substrate, kana magetsi zvinogona kuteverwa nekudzora mhepo isina kugadzikana. Matambudziko akadai seruvara rwefirimu risina kugadzikana, kunamira kusina kunaka, kusasimba kwefirimu isina kujairika, kutenderera kwakanyanya, ukobvu hwefirimu husina kuenzana, maburi epinki, uye kusiyana kwebatch-to-batch zvinowanzobatanidzwa zvakanyanya nekuchinja kwemhepo yemaitiro.
Saka, kune masisitimu ePVD eindasitiri, kudzora mhepo hakufanirwe kungoonekwa sekungogadzirisa mita yekuyerera kwegasi. Inzira yakarongeka inosanganisira kumanikidzwa kwebase, kuumbwa kwegasi rinosara, kuyerera kweprose-gasi, kumanikidzwa kwekushanda, kumanikidzwa kwegasi zvishoma, kufambiswa kwepombi, mamiriro eplasma, uye mhinduro yegasi rinoita basa.
1. Danho rekutanga harisi jekiseni regesi, asi kudzora base vacuum
Chikanganiso chinowanzoitika mukugadzirwa ndechekutarisa pane zvinogadzirisa process-gas uku uchitarisa mamiriro emukamuri we vacuum pachayo.
Magasi ekugadzira asati aiswa, imba yekufukidza inofanira kusvika padanho rakakodzera. Kumanikidzwa kwakaderera zvakakwana kunobatsira kuderedza okisijeni yakasara, utsi hwemvura, mahydrocarbon, nezvimwe zvinosvibisa. Magasi aya akasara anogona kutora chikamu mukuita kwekuisa okisijeni uye kupinda mufirimu rinokura, zvichikanganisa kuumbwa kwefirimu, chimiro che microstructure, kunamira, uye hunhu hwe optical kana hwemagetsi.
Izvi zvakakosha zvikuru pamaitiro ePVD anochinja. Semuenzaniso, pakuisa nitrides kana oxides, gasi rinochinja rinofanira kusiyaniswa neokisijeni risingadzoreki kana utsi hwemvura hunosara mukamuri. Zvikasadaro, mamiriro chaiwo ekuchinja anogona kusiyana zvakanyanya nemaitiro ekugadzirisa kunyangwe mudziyo unodzora kufamba kwemafuta uchishanda zvakanaka.
Mukugadzirwa kwezvinhu, kana nzira imwe chete yekubika ikangoerekana yaburitsa mhedzisiro dzakasiyana dzekuputira, mubvunzo wekutanga haufanirwe kugara uri wekuti simba rechinangwa rachinja here. Zvakakoshawo kutarisa kana simba repasi, nguva yekudonhedza pombi, kuchena kwekamuri, uye mamiriro egasi akasara achinja.
2. Maitiro eKudzikisa Pump-Down Chiratidzo Chinokosha Chekuita
Sisitimu yekubvisa mvura ine hutano inofanira kunge iine hunhu hwakagadzikana uye hunodzokororwa hwekudonhedza mvura.
Kana kamuri ikatora nguva yakareba kupfuura yakajairika kuti isvike pakumanikidzwa kwakakodzera, izvi zvinogona kuratidza kuwedzera kwegasi rinobuda, kusvibiswa, kubuda kwevacuum, kushanda kwepombi kwakashata, kana hunyoro hwakawanda mukati mekamuri.
Zvinhu zvinowanzoita kuti gasi ribude zvinosanganisira zvinhu zvepasi, zvigadziriso, marara epolymer, mafuta evacuum, nzvimbo dzakasvibiswa dzemakamuri, uye hunyoro hunotorwa. Zvimwe zvinhu zvinogona kuramba zvichiburitsa magasi mushure mekunge kamuri rasvika pakumanikidzwa kwakakodzera, zvichikonzera mamiriro asina kugadzikana ekushanda panguva yekuiswa.
Saka, hukama huripo pakati penguva yekudzika kwepombi, kumanikidzwa kwekupedzisira, kukwira kwesimba, uye kugadzikana kwemaitiro zvinogona kupa ruzivo rwakakosha nezvemamiriro emuchina wekubvisa mvura.
Pamichina yekugadzira, kutarisa maitiro ekuwedzera kwesimba mushure mekubviswa kubva mupombi kunogonawo kubatsira kusiyanisa pakati pekubuda kwemhepo chaiyo nekubuda kwemhepo kwakajairika. Izvi zvinonyanya kubatsira panguva yekugadzirisa matambudziko.
3. Kumanikidzwa Kushanda Kunosarudza Nzvimbo Yekutakura
Mushure mekushandisa vacuum yakakodzera, gasi rinogadzirwa rinoiswa uye kamuri rinopinda muhurongwa hwekushanda-hwekumanikidza.
Kumanikidzwa kwekushanda kunokanganisa zvakananga nzira yakasununguka yemaatomu, maion, nemaerekitironi akaputirwa. Saka zvinokanganisa hunhu hweplasma, mwero wekuisa, ionization, kupararira kwezvikamu, uye kugoverwa kwemakona kwekuisa.
Kana paine kumanikidzwa kwakaderera, mhando dzakapfava dzinogona kufamba nemukamuri nekusangana kushoma, zvichikonzera kuyerera kwenzvimbo yacho zvakananga. Izvi zvinogona kubatsira kune mamwe mashandisirwo asi zvinogona kuwedzera mhedzisiro yemumvuri pazvikamu zvakaoma zvemativi matatu.
Sezvo kumanikidzwa kuchiwedzera, kupopotedzana pakati pemhando dzemagasi nemamorekuru egasi kunowedzera kuwanda. Kuyerera kwemagasi kunowedzera kupararira, izvo zvinogona kuvandudza kufukidza panzvimbo dzakadzika asi zvinogonawo kuderedza kushanda kwemagasi uye kuchinja chimiro chefirimu.
Nekuda kweizvozvo, kumanikidzwa kwekushanda hakufanirwe kutorwa sehuwandu hunofanira "kugadziriswa nemazvo." Ipfungwa inochinja-chinja iyo inokanganisa zvakananga kinetics yekutakura kwemhando yedeposition.
4. Kuyerera kweGasi uye Kumanikidzwa Hazvina Kufanana
Mukushanda kwePVD, kuyerera kwegasi kunowanzo dzorwa uchishandisa muchina unodzora kuyerera kwemafuta (MFC), nepo kumanikidzwa kwemukamuri kuchitsanangurwa nechiyero chiri pakati pekupinda kwegasi uye kugona kupomba.
Kusiyana uku kwakakosha zvikuru.
Mwero mumwe chete wekufamba kwegasi hausi hawo unoburitsa kumanikidzwa kwakafanana kwekushanda mumamiriro akasiyana e-vacuum-system. Kana kumhanya kwekupomba, nzvimbo yethrottle-valve, kufambisa kwekamuri, kana nzira yemukati yekuyerera kwegasi ikachinja, kumanikidzwa kunoitika kunogonawo kuchinja.
Semuenzaniso, kana vharuvhu ye throttle kana sisitimu yekupomba ichishanda zvisina kujairika, mushandi anogona kuwedzera kuyerera kwegasi kuti atsive kutsauka kwekumanikidzwa. Kunyangwe kumanikidzwa kungadzokera kwenguva pfupi kune chinangwa, mamiriro chaiwo ekuyerera kwegasi uye mamiriro eplasma angave atochinja.
Saka, mainjiniya vane ruzivo rwekugadzira zvinhu vanowanzo tarisa kuyerera kwegasi nekumanikidzwa kwemukamuri pamwe chete, pane kushandisa chero parameter yega yega senzira yekutarisa maitiro acho.
5. Kudzora Gasi Rinoshanda Kwakanyanya Kunzwisisika
Pamaitiro ePVD anoshandiswa kuita shanduko akadai seTiN, CrN, TiAlN, Al₂O₃, SiO₂, nedzimwe coatings dzakasanganiswa, kudzora mhepo kunova kwakaoma zvikuru.
Gasi rinoita basa rinoita basa zvakananga mukuumbwa kwefirimu. Nitrogen, oxygen, acetylene, methane, kana mamwe magasi anogona kuita basa nemarudzi akapwanyika kana akasvinwa kuti aone kuti firimu racho rakaumbwa sei.
Kuchinja kudiki mukumanikidzwa kwechikamu chegasi rinoita basa kunogona kukonzera shanduko huru muhunhu hwefirimu.
Semuenzaniso, kuyerera kwenitrogen yakakwana kunogona kukonzera nitridation isina kukwana, nepo nitrogen yakawandisa inogona kukanganisa mwero wekuisa, hunhu hweplasma, maitiro echinangwa, uye kuumbwa kwefirimu. Mukuputa kwemagnetron inopindira, kupinza kwegasi rinopindira kunogonawo kutungamira muchetura wechinangwa, umo layer yecompound inoumbwa pamusoro pechinangwa uye inochinja hunhu hwekuputa.
Ndosaka kusveta kwesimbi kunowanzoda kudzora maitiro kupfuura kuisirwa kwesimbi kwakajairika.
6. Kuuraya Chepfu Pachinangwa Dambudziko Rakajairika Rekudzora Mhepo
Mukurwisa magnetron, chepfu inouraya zvinhu idambudziko rinowanzoitika pakudzora mhepo.
Kana kumanikidzwa kwegasi rinoita basa remagetsi kwawedzera kupfuura mwero wakati, nzvimbo yacho inogona kuvharwa nechikamu chakasanganiswa. Chinhu chinozobva chashanduka kubva pakuva chesimbi ichienda kukuva chepfu.
Kuchinja uku kunogona kukonzera shanduko muhuwandu hwema "sputtering", "discharge voltage", "discharge current", "secondary-electron emission", "deposition rate", uye "film structure".
Dambudziko rinova rakaoma zvikuru nekuti hukama huripo pakati pekuyerera kwegasi rinoita reactive nemamiriro echinangwa kazhinji hahuna kurongeka. Kuchinja kudiki mukuyerera kwegasi kunogona kukonzera shanduko huru isingaenzaniswi mumamiriro ekushanda.
Pakugadzirwa kwehuwandu hwakawanda, kuvimba chete nekuyerera kwegasi rinoita reactive-gas kunogona kusakwana. Masisitimu epamusoro-soro anogona kushandisa kudzora kwe closed-loop zvichibva pa optical emission, discharge characteristics, partial-pressure measurement, kana mamwe ma process signals kuti agadzikane reactive deposition window.
7. Kuchena Kwekamuri Kunokanganisa Zvakanangana Nekugadzikana Kwemhepo
Kudzora mamiriro ekunze hakungotsamiri chete pahurongwa hwekupa gasi. Mamiriro emukati mekamuri rekuputira akakosha zvakaenzana.
Munguva yekugadzirwa kwakawanda, zvinhu zvekufukidza zvinoungana zvishoma nezvishoma pamadziro emakamuri, nhoo, zvigadziko zvepasi, nezvimwe zvikamu zvemukati. Zvinhu izvi zvinogona kukonzera kusvibiswa kwezvikamu kana kubuda kwegasi. Zvimwe zvinhu zvinogonawo kuita nemagasi emagetsi kana kuburitsa magasi akambotorwa panguva yekupisa uye kushanda kweplasma.
Izvi zvinogona kuchinja zvishoma nezvishoma mamiriro chaiwo emukamuri kunyangwe kana nzira yekubika ikaramba isina kuchinja.
Nechikonzero ichi, kuchenesa makamuri nguva dzose, kutsiva nhoo, kugadzirisa zvinhu, uye kuongorora vacuum-seal zvikamu zvakakosha pakutarisira mhepo.
Maitiro ePVD akagadzikana haasi kungokonzerwa neresipi yakagadzikana chete. Zvinoenderana nekuchengetedza mamiriro ekunze akagadzikana mukati mekamuri.
8. Kugoverwa kweGasi Kunokosha Sehuwandu hweGasi
Imwe nyaya inoshanda ndeyekuti huwandu hwese hwegasi hunopinda mukamuri hahuvimbisi mamiriro akafanana ekushanda.
Magadzirirwo nenzvimbo yemuchina wekupinda gasi, shawa, baffle, pombi yekupomba, throttle valve, uye substrate holder zvinosarudza kuti gasi rinoparadzirwa sei mukati mekamuri.
Kupararira kusina kunaka kwegasi kunogona kukonzera kusiyana kwenzvimbo muhuwandu hwegasi rinoita reactive kana huwandu hweplasma. Mugumisiro wacho unogona kunge uri musanganiswa wefirimu kana ukobvu hwakasiyana munzvimbo dzakasiyana pa substrate.
Izvi zvakakosha zvikuru kune masisitimu ekuputira munzvimbo huru uye michina yekugadzira ine simba rekutakura rakawanda.
Saka, pakugadzirisa muchina we vacuum coating, dhizaini yekuyerera kwegasi inofanira kufungwa pamwe chete ne plasma-source configuration, substrate rotation, pombing geometry, uye chamber structure.
9. Kana Coating Yachinja Kamwe Kamwe, Tarisa Mhepo Kutanga
Mukugadzirwa chaiko, matambudziko ekuputira anowanzoonekwa sekuchinja kamwe kamwe kweruvara, kuomarara, kunamira, ukobvu hwefirimu, kana mashandiro emagetsi.
Kana izvi zvikaitika, zvinokwezva kukurumidza kugadzirisa simba rekuisa, kusarura kwe substrate, kana nguva yekuisa. Zvisinei, zvinhu zvine chekuita nemhepo zvinofanira kutanga zvatariswa.
Nzira inoshanda yekugadzirisa matambudziko ndeyekuenzanisa data rekugadzira razvino nemamiriro ezvinhu akajairwa: kumanikidzwa kwebase, nguva yekupomba-pasi, kumanikidzwa kwekushanda, kuyerera kweprocess-gas, kuyerera kwereactive-gas, nzvimbo yethrottle-valve, voltage/current yekuburitsa, tembiricha yesubstrate, uye chiyero chekuisa.
Kana chimwe chezvinhu izvi chakachinja, chinogona kupa tsananguro yakananga pane kungochinja resipi yekuputira.
Zvikuru sei, kana mamiriro ekuyerera kwegasi asina kuchinja asi kumanikidzwa kwemukamuri kwachinja, dambudziko rinogona kunge riri musystem yekupomba, vharuvhu yekudzora kumanikidzwa, kupihwa kwegasi, kufambiswa kwemukamuri, kana mamiriro ekubuda kwemvura, kwete muzvinhu zvinoputira.
10. Kudzora Mhepo Pakupedzisira Idambudziko Rekudzora Masisitimu
Ruzivo rwakawanikwa kubva mukuputira vacuum mumaindasitiri runoratidza kuti kudzora mhepo hakugone kuparadzaniswa nehurongwa hwese hwe vacuum.
Mapombi evacuum anoona kugona kwemukamuri kupomba. Sisitimu yekuendesa gasi ndiyo inoona kuti gasi rinopinda sei. Vharuvhu yethrottle inodzora hukama huripo pakati pekuyerera kwegasi nekumanikidzwa kwemukamuri. Soko replasma rinoona kuti gasi rinoiswa sei ion uye rinoshanda sei nemarudzi ekuisa. Sisitimu ye substrate inoona kuti workpiece inoshanda sei neplasma.
Masisitimu aya anoshanda panguva imwe chete, uye shanduko mune imwe parameter inogona kukanganisa mamwe akawanda.
Saka, maitiro ePVD akakura anofanira kugadzira hwindo remaitiro akagadzikana pane kuvimba neparameter imwe chete yakatarwa. Chinangwa ndechekuona kuti kumanikidzwa kwevacuum, kuyerera kwegasi, hunhu hweplasma, mamiriro e substrate, uye ma parameter ekuisa zvinhu zvinoramba zviri mukati mehuwandu hwakadzorwa panguva yekugadzirwa.
Mhedziso
Kudzora mhepo ndechimwe chezvinhu zvakakosha pakuputira mhepo yakasimba. Kubva pakumanikidzwa kwepasi uye kutarisirwa kwegasi rinosara kusvika pakumanikidzwa kushanda, kuyerera kwegasi, kumanikidzwa kwegasi rinoita reactive-gas, chepfu inovavarira, uye kuchena kwekamuri, chimwe nechimwe chinogona kukanganisa kuputira kwekupedzisira.
Pakuiswa kwePVD kwakajairika, mamiriro ekunze akagadzikana anopa hwaro hwekukura kwefirimu kunodzokororwa. Pakubuda kwemhepo inoputika uye mamwe maitiro anobatsira muplasma, kudzora mhepo kwakanyatsojeka kunonyanya kukosha nekuti kuumbwa kwegasi kunobatanidzwa zvakananga mukuumbwa kwefirimu.
Chinangwa chaicho chekudzora mhepo hachisi chekungochengetedza kumanikidzwa kwakati kana kukosha kwekuyerera kwegasi. Chinangwa ndechekugadzira nzvimbo yakagadzikana uye inodzokororwa umo plasma, mhando dzekuisa, substrate, uye mhepo inopindura inoramba iri mumamiriro ekudzorwa.
Pamichina yekuputira vacuum yeindasitiri, izvi zvinoda dhizaini yakarongeka yesystem yekupomba vacuum, system yekuendesa gasi, system yekudzora kumanikidzwa, plasma source, chamber structure, uye process-control software.
-Chinyorwa ichi chakabudiswa namugadziri wemidziyo yekuputira vacuumZhenhua Vacuum
Nguva yekutumira: Nyamavhuvhu-08-2026