Mu vacuum clothing, kuwongolera mlengalenga ndi chimodzi mwazinthu zofunika kwambiri zomwe zimakhudza khalidwe la filimu ndi kukhazikika kwa njira. Ngakhale chipinda chophikira chimagwira ntchito pansi pa vacuum, malo osungiramo zinthu si malo "opanda mpweya" konse. Mipweya yotsalira, mipweya yopangira zinthu, mipweya yogwira ntchito, kayendedwe ka mpweya, kuthamanga kwa ntchito, ndi momwe mpweya umapopedwera nthawi zonse zimagwirizana ndi plasma ndi mitundu yosungiramo zinthu.
Mu kupanga kwenikweni, zolakwika zambiri zophimba zomwe zimawoneka kuti zikugwirizana ndi cholinga, cathode, substrate, kapena magetsi zimatha kutsatiridwa ndi kuwongolera kosakhazikika kwa mlengalenga. Mavuto monga mtundu wosakhazikika wa filimu, kusagwirizana bwino, kukana kwachilendo kwa filimu, kupindika kwambiri, makulidwe osafanana a filimu, mabowo ang'onoang'ono, ndi kusiyana kwa batch-to-batch nthawi zambiri zimagwirizanitsidwa kwambiri ndi kusintha kwa mlengalenga wa ndondomeko.
Chifukwa chake, pamakina a PVD a mafakitale, kulamulira mlengalenga sikuyenera kuonedwa ngati kungosintha mita yoyezera kuyenda kwa mpweya. Ndi njira yogwirizana yokhudza kuthamanga kwa mpweya, kapangidwe ka mpweya wotsalira, kuyenda kwa mpweya wa process-gas, kuthamanga kwa ntchito, kuthamanga kwa mpweya pang'ono, kupompa kwa mpweya, momwe plasma imagwirira ntchito, ndi kuyankha kwa mpweya woyankha.
1. Gawo Loyamba Si Kulowetsa Mpweya, Koma Kulamulira Chitsulo Chotsukira Madzi
Cholakwika chofala kwambiri pakupanga ndi kuyang'ana kwambiri pa magawo a process-gas pamene mukunyalanyaza momwe chipinda chotsukira mpweya chilili.
Musanalowetse mpweya wopangira, chipinda chophikira chiyenera kufika pa mphamvu yoyenera ya maziko. Kupanikizika kochepa kokwanira kwa maziko kumathandiza kuchepetsa mpweya wotsalira, nthunzi ya madzi, ma hydrocarbon, ndi zina zodetsa. Mpweya wotsalirawu ukhoza kutenga nawo mbali mu ndondomeko yoyikamo ndikuphatikizidwa mu filimu yomwe ikukula, zomwe zimakhudza kapangidwe ka filimu, kapangidwe kake kakang'ono, kugwirizana, ndi mphamvu zamagetsi kapena zamagetsi.
Izi ndizofunikira kwambiri pa njira zosinthira za PVD. Mwachitsanzo, poika nitrides kapena oxides, mpweya wosinthika womwe ukufuna kusinthidwa uyenera kusiyanitsidwa ndi mpweya wosalamulirika kapena nthunzi yamadzi yomwe yatsala m'chipindamo. Kupanda kutero, mlengalenga weniweni wosinthika ungasiyane kwambiri ndi njira yopangira ngakhale kuti chowongolera kuchuluka kwa madzi chikugwira ntchito bwino.
Pakupanga kogwira ntchito, ngati njira yomweyo yatulutsa zotsatira zosiyana za utoto, funso loyamba siliyenera kukhala nthawi zonse ngati mphamvu yofunikira yasintha. Ndikofunikiranso kuwona ngati mphamvu ya pansi, nthawi yotsika kwa mpweya, ukhondo wa chipinda, ndi mpweya wotsalira zasintha.
2. Khalidwe Lopopera Ndi Chizindikiro Chofunika Kwambiri cha Njira
Dongosolo labwino la vacuum liyenera kukhala ndi mawonekedwe okhazikika komanso obwerezabwereza a pompu.
Ngati chipindacho chimatenga nthawi yayitali kuposa masiku onse kuti chifike pamlingo wofunikira, izi zitha kusonyeza kukwera kwa mpweya wotuluka, kuipitsidwa, kutuluka kwa vacuum, kugwira ntchito kwa pampu yoipa, kapena chinyezi chochuluka mkati mwa chipindacho.
Magwero ofala a mpweya wotuluka ndi monga zinthu zapansi panthaka, zida zomangira, zotsalira za polima, mafuta otayira mpweya, malo oipitsidwa a chipinda, ndi chinyezi choyamwa. Zinthu zina zimatha kupitiriza kutulutsa mpweya chipindacho chikafika pamlingo wovomerezeka, zomwe zimapangitsa kuti zinthu zisayende bwino panthawi yoyika mpweya.
Chifukwa chake, ubale pakati pa nthawi yopopera ndi kutsika kwa mpweya, kupanikizika komaliza, kukwera kwa kuthamanga kwa mpweya, ndi kukhazikika kwa njira zogwirira ntchito kungapereke chidziwitso chofunikira chokhudza momwe makina oyeretsera mpweya alili.
Pa zipangizo zopangira, kuyang'anira momwe kuthamanga kwa mpweya kumakwera pambuyo popachika makina opopera madzi kungathandizenso kusiyanitsa pakati pa kutuluka kwa mpweya weniweni ndi kutuluka kwa mpweya wabwinobwino. Izi ndizothandiza makamaka panthawi yothetsa mavuto.
3. Kupanikizika kwa Ntchito Kumazindikira Malo Oyendera
Pambuyo pokonza vacuum yoyenera, mpweya wopangira umayikidwa ndipo chipindacho chimalowa mu dongosolo la kuthamanga kwa ntchito.
Kupanikizika kogwira ntchito kumakhudza mwachindunji njira yapakati ya maatomu, ma ayoni, ndi ma elekitironi otayidwa. Chifukwa chake zimakhudza mawonekedwe a plasma, kuchuluka kwa malo otayidwa, ionization, kufalikira kwa tinthu tating'onoting'ono, ndi kufalikira kwa angular kwa malo otayidwa.
Pakakhala ndi mphamvu yochepa, mitundu yotupa imatha kuyenda m'chipindamo popanda kugundana kwambiri, zomwe zimapangitsa kuti malo osungiramo zinthu aziyenda molunjika. Izi zitha kukhala zothandiza pa ntchito zina koma zitha kuwonjezera mthunzi pazigawo zovuta zamitundu itatu.
Pamene kupanikizika kukukwera, kugundana pakati pa mitundu ya mpweya ndi mamolekyu a mpweya kumakhala kofala kwambiri. Kutuluka kwa mpweya kumafalikira kwambiri, zomwe zingathandize kuti malo obisika azitha kufalikira bwino komanso zingachepetse mphamvu ya mpweya ndikusintha mawonekedwe a filimu.
Chifukwa chake, kuthamanga kwa ntchito sikuyenera kuonedwa ngati mtengo womwe uyenera "kukhazikitsidwa bwino." Ndi kusintha kwa njira komwe kumakhudza mwachindunji kayendedwe ka kayendedwe ka mitundu yosungidwa.
4. Kuyenda kwa Gasi ndi Kupanikizika Sizifanana
Mu ntchito yeniyeni ya PVD, kuyenda kwa mpweya nthawi zambiri kumayendetsedwa pogwiritsa ntchito chida chowongolera kuchuluka kwa mpweya (MFC), pomwe kuthamanga kwa mpweya m'chipinda kumatsimikiziridwa ndi mulingo womwe ulipo pakati pa mpweya wolowera ndi mphamvu yopopera.
Kusiyana kumeneku n'kofunika kwambiri.
Kuthamanga kwa mpweya komweko sikuti kumabweretsa kuthamanga komweko kogwira ntchito pansi pa mikhalidwe yosiyanasiyana ya vacuum-system. Ngati liwiro la kupompa, malo a throttle-valve, kayendedwe ka chipinda, kapena njira yamkati ya mpweya isintha, kuthamanga komwe kumachitika kungasinthenso.
Mwachitsanzo, ngati valavu yopumira kapena makina opopera mpweya akugwira ntchito molakwika, wogwiritsa ntchitoyo angawonjezere kuyenda kwa mpweya kuti akwaniritse kusintha kwa kuthamanga kwa mpweya. Ngakhale kuti kuthamanga kwa mpweya kungabwerere kwakanthawi ku mtengo womwe mukufuna, kuyenda kwa mpweya weniweni ndi plasma zitha kukhala zitasintha kale.
Chifukwa chake, mainjiniya odziwa bwino ntchito nthawi zambiri amawunika kuyenda kwa mpweya ndi kuthamanga kwa chipinda pamodzi, m'malo mogwiritsa ntchito gawo lililonse paokha ngati njira yokhayo yodziwira.
5. Kulamulira kwa Gasi Kogwira Ntchito Kumakhala Kovuta Kwambiri
Pa njira zosinthira za PVD monga TiN, CrN, TiAlN, Al₂O₃, SiO₂, ndi zina zophimba, kulamulira mlengalenga kumakhala kovuta kwambiri.
Mpweya wochitapo kanthu umatenga nawo mbali mwachindunji pakupanga filimuyi. Nayitrogeni, mpweya, acetylene, methane, kapena mpweya wina wochitapo kanthu ukhoza kuchitapo kanthu ndi mtundu wa nthunzi kapena wothira madzi kuti udziwe kapangidwe ka filimuyo komaliza.
Kusintha pang'ono kwa mphamvu ya mpweya wochita kusintha pang'ono kungapangitse kusintha kwakukulu kwa mawonekedwe a filimu.
Mwachitsanzo, kusayenda bwino kwa nayitrogeni kungayambitse nitridation yosakwanira, pomwe nayitrogeni wochuluka angakhudze kuchuluka kwa mpweya woyikidwa, mawonekedwe a plasma, khalidwe la chandamale, ndi kapangidwe ka filimu. Mu reactive magnetron sputtering, reactive-gas increase ingayambitsenso poizoni wa chandamale, momwe gawo la compound limapangika pamwamba pa chandamale ndikusintha mawonekedwe a madzi otuluka.
Ichi ndichifukwa chake kupopera mankhwala nthawi zambiri kumafuna kuwongolera kwambiri njira kuposa kuyika kwachitsulo m'njira yachizolowezi.
6. Kupha Poizoni Pachilombo Ndi Vuto Lodziwika Bwino Lolamulira Mpweya
Mu kupopera kwa magnetron komwe kumachitika chifukwa cha kuukira kwa mpweya, kupha poizoni ndi chimodzi mwa zinthu zomwe zimafala kwambiri pakuwongolera mpweya.
Pamene mphamvu yochepa ya mpweya wochitapo kanthu ikakwera kupitirira mtunda winawake, pamwamba pa chinthucho pakhoza kuphimbidwa ndi gawo losakanikirana. Kenako chinthucho chimasanduka kuchoka pa chitsulo chomwe chimatuluka m'thupi kupita ku poizoni.
Kusinthaku kungayambitse kusintha kwa kuchuluka kwa ma sputtering, mphamvu yotulutsa ma spure, mphamvu yotulutsa ma spure, mphamvu yotulutsa ma elekitironi ena, mphamvu yotulutsa ma spure, ndi kapangidwe ka filimu.
Vutoli limakhala lovuta kwambiri chifukwa ubale pakati pa kayendedwe ka mpweya wosinthika ndi momwe zinthu zilili nthawi zambiri umakhala wosagwirizana. Kusintha pang'ono kwa kayendedwe ka mpweya kungapangitse kusintha kwakukulu kwambiri mu mkhalidwe wa njira.
Pakupanga kwakukulu, kudalira kokha pa kayendedwe ka mpweya wokhazikika kungakhale kosakwanira. Makina apamwamba kwambiri amatha kugwiritsa ntchito njira yowongolera yotsekedwa kutengera kutulutsa kwa kuwala, mawonekedwe otulutsa, muyeso wa kupanikizika pang'ono, kapena zizindikiro zina za njira kuti zikhazikitse zenera loyikamo mpweya wokhazikika.
7. Ukhondo wa Chipinda Umakhudza Mwachindunji Kukhazikika kwa Mpweya
Kulamulira mpweya sikudalira kokha njira yoperekera mpweya. Mkhalidwe wa mkati mwa chipinda chophikira ndi wofunikanso.
Pakachitika zinthu mobwerezabwereza, zinthu zokutira zimasonkhana pang'onopang'ono pamakoma a chipinda, zishango, zida zapansi panthaka, ndi zinthu zina zamkati. Zinthu zimenezi zimatha kukhala magwero a kuipitsidwa kwa tinthu tating'onoting'ono kapena kutulutsa mpweya. Zinthu zina zimathanso kuchitapo kanthu ndi mpweya wopangidwa kapena kutulutsa mpweya womwe unayamwa kale panthawi yotenthetsera ndi ntchito ya plasma.
Izi zitha kusintha pang'onopang'ono mlengalenga weniweni wa chipinda ngakhale njira yopangira zinthu ikadali yosasinthika.
Pachifukwa ichi, kuyeretsa chipinda nthawi zonse, kusintha chishango, kukonza zida, ndi kuyang'anira chisindikizo cha vacuum ndi zinthu zofunika kwambiri pakuwongolera mlengalenga.
Njira yokhazikika ya PVD si zotsatira chabe za njira yokhazikika, koma zimadalira kusunga malo okhazikika mkati mwa chipindacho.
8. Kugawa Gasi N'kofunika Monga Kuchuluka kwa Gasi
Vuto lina lothandiza ndilakuti kuchuluka kwa mpweya wolowa m'chipindamo sikutsimikizira kuti zinthu zidzakhala bwino mofanana.
Kapangidwe ndi malo a malo olowera mpweya, mutu wa shawa, chotchingira mpweya, chopopera mpweya, valavu yotulutsira mpweya, ndi chogwirira cha substrate zimatsimikizira momwe mpweya umagawidwira mkati mwa chipindacho.
Kugawanika kwa mpweya koipa kungapangitse kusiyana kwa m'deralo kwa kuchuluka kwa mpweya woyankha kapena kuchuluka kwa plasma. Zotsatira zake zingakhale mapangidwe osiyanasiyana a filimu kapena makulidwe m'malo osiyanasiyana pa substrate.
Izi ndizofunikira kwambiri pamakina ophikira okhala ndi malo akuluakulu komanso zida zopangira zinthu zomwe zimakhala ndi mphamvu zambiri zonyamula katundu.
Chifukwa chake, pokonza makina ophikira vacuum, kapangidwe ka kayendedwe ka mpweya kuyenera kuganiziridwa pamodzi ndi kapangidwe ka plasma-source, kuzungulira kwa substrate, geometry yopompa, ndi kapangidwe ka chipinda.
9. Pamene chophimbacho chasintha mwadzidzidzi, choyamba yang'anani mlengalenga
Mu kupanga kwenikweni, mavuto ophimba nthawi zambiri amawoneka ngati kusintha kwadzidzidzi kwa mtundu, kuuma, kumatira, makulidwe a filimu, kapena magwiridwe antchito amagetsi.
Izi zikachitika, zimakhala zovuta kusintha nthawi yomweyo mphamvu ya malo osungiramo zinthu, kutengera kwa substrate, kapena nthawi yosungiramo zinthu. Komabe, zinthu zokhudzana ndi mlengalenga ziyenera kuyang'aniridwa kaye.
Njira yothandiza yothetsera mavuto ndiyo kuyerekeza deta yopangidwa ndi momwe zinthu zilili panopa: mphamvu yoyambira, nthawi yopumira, mphamvu yogwirira ntchito, kuyenda kwa mpweya wa process, kuyenda kwa mpweya wochitapo kanthu, malo a throttle-valve, mphamvu yotulutsa mphamvu/yamagetsi, kutentha kwa substrate, ndi kuchuluka kwa mpweya woikidwa.
Ngati chimodzi mwa zinthuzi chasintha, chingapereke kufotokozera momveka bwino kusiyana ndi kungosintha njira yophikira.
Makamaka, ngati kayendedwe ka mpweya sikasintha koma kuthamanga kwa mpweya m'chipindamo kwasintha, vuto likhoza kukhala pa makina opopera mpweya, valavu yowongolera kuthamanga kwa mpweya, mpweya wotuluka m'chipindamo, kapena momwe mpweya umatulutsidwira, osati pa zinthu zophikira zokha.
10. Kulamulira Mlengalenga Ndi Vuto Lolamulira Dongosolo
Chidziwitso chogwira ntchito chomwe chasonkhanitsidwa kuchokera ku zokutira vacuum zamafakitale chikuwonetsa kuti kulamulira mlengalenga sikungalekanitsidwe ndi makina onse ogwiritsira ntchito vacuum.
Mapampu otulutsa mpweya amatsimikiza mphamvu ya chipinda chopopera mpweya. Dongosolo lotumizira mpweya limatsimikiza momwe mpweya umalowera. Valavu yopopera mpweya imawongolera ubale pakati pa kuyenda kwa mpweya ndi kuthamanga kwa mpweya m'chipinda. Gwero la plasma limatsimikiza momwe mpweya umakhalira ndi ayoni ndipo limalumikizana ndi mitundu yoyikidwa. Dongosolo la substrate limatsimikiza momwe ntchitoyo imagwirira ntchito ndi plasma.
Machitidwewa amagwira ntchito nthawi imodzi, ndipo kusintha kwa gawo limodzi kungakhudze ena angapo.
Chifukwa chake, njira yokhwima ya PVD iyenera kukhazikitsa njira yokhazikika m'malo modalira pa parameter imodzi yokhazikika. Cholinga chake ndikuwonetsetsa kuti kuthamanga kwa vacuum, kuyenda kwa mpweya, mawonekedwe a plasma, momwe zinthu zilili pansi pa nthaka, ndi magawo oyika zinthu azikhala mkati mwa mulingo wolamulidwa panthawi yonse yopangira.
Mapeto
Kulamulira mlengalenga ndi chimodzi mwa zinthu zofunika kwambiri pakuphimba vacuum mokhazikika. Kuyambira kupsinjika kwapansi ndi kasamalidwe ka mpweya wotsalira mpaka kupsinjika kogwira ntchito, kuyenda kwa mpweya, kupsinjika pang'ono kwa mpweya woyankha, poizoni wofunidwa, ndi ukhondo wa chipinda, chinthu chilichonse chingakhudze chophimba chomaliza.
Pakuyika kwa PVD mwachizolowezi, mlengalenga wokhazikika umapereka maziko oti filimu ikule mobwerezabwereza. Pakutulutsa mpweya wobwerezabwereza komanso njira zina zothandizira plasma, kuwongolera bwino mlengalenga kumakhala kofunikira kwambiri chifukwa kapangidwe ka mpweya kamathandizira mwachindunji pakupanga filimu.
Cholinga chenicheni cha kuwongolera mlengalenga sikuti kungosunga mphamvu inayake kapena kuchuluka kwa mpweya woyenda, koma kukhazikitsa malo okhazikika komanso obwerezabwereza momwe plasma, mitundu yosungira, gawo lapansi, ndi mlengalenga wochitapo kanthu zimakhalirabe mu mkhalidwe wolamulidwa.
Pa zipangizo zophikira vacuum zamafakitale, izi zimafuna kapangidwe kogwirizana ka makina opopera vacuum, makina operekera mpweya, makina owongolera kuthamanga, gwero la plasma, kapangidwe ka chipinda, ndi mapulogalamu owongolera njira.
-Nkhaniyi yasindikizidwa ndiwopanga zida zophikira vacuumZhenhua Vacuum
Nthawi yotumizira: Ogasiti-08-2026