Ukuhlaziywa Kobuchwepheshe Okuvela Emibonweni Yenqubo Nemishini
Idiphozithi ye-arc ye-CathodicI-n yaziwa kabanzi njengobuchwepheshe be-PVD obusebenzisa i-ionization ephezulu obukwazi ukukhiqiza izembozo eziqinile, ezinamathelayo kakhulu, neziqinile kakhulu.
Ingqikithi yale nqubo itholakala i-plasma eyingqayizivele ekhiqizwa yi-cathodic arc discharges, izici zayo ezihlukanisa ngokuyisisekelo i-magnetron sputtering kanye nezinye izindlela ze-PVD.
Ukuqonda ukuziphatha kwe-plasma ezinhlelweni ze-cathodic arc kubalulekile ekulawuleni isakhiwo sokumboza, ukusebenza, kanye nokuzinza kwenqubo yesikhathi eside.
1. Umsuka we-Cathodic Arc Plasma
Ekubekweni kwe-cathodic arc, i-plasma ikhiqizwa ezindaweni ezincane ze-cathode ezakhiwe ebusweni obuqondiwe lapho kuqala ukukhishwa kwe-arc enamandla aphezulu, aphansi.
Izici ezibalulekile zezindawo ze-cathode zifaka:
1. Ubuningi bamanje bendawo obuphezulu kakhulu (10⁶–10⁸ A/cm²)
2. Izinga lokushisa eliphezulu kakhulu lendawo
3. Ukuhwamuka okusheshayo kwezinto ze-cathode
Le nqubo ikhiqiza i-plasma equkethe ikakhulukazi izinto eziqondiwe ze-ionized, kunokuba kube ama-athomu angathathi hlangothi.
2. Idigri Ephakeme Ye-Ionization: Isici Esichazayo
Esinye sezici ezibaluleke kakhulu ze-cathodic arc plasma yingxenyana yayo ephezulu kakhulu ye-ionization.
Amazinga okufakwa kwe-ion kwezinhlobo zensimbi angadlula u-70–90% futhi Ingxenye enkulu yama-ion ishajwa ngokuphindaphindeka (M²⁺, M³⁺)
Leli zinga eliphezulu le-ionization lenza:
1. Ukusebenzisana okunamandla kwe-ion-substrate
2. Ukuqina kwefilimu okuthuthukisiwe
3. Ukunamathela okuphezulu kokumboza ngisho nasezingeni lokushisa eliphansi kakhulu le-substrate
Ngokombono wobunjiniyela, i-ionization ephezulu inikeza iwindi lenqubo ebanzi neqinile, ikakhulukazi kwezembozo eziqinile nezivikelayo.
3. Amandla aphezulu e-Ion kanye nokuqondiswa
I-plasma ye-arc ye-cathodic ibonisa amandla aphezulu e-ion angaphakathi, ngokuvamile asukela kumashumi amaningana kuya kuma-volts angaphezu kwekhulu e-electron.
Imiphumela yale plasma enamandla ihlanganisa:
1. Ukusebenza kahle kobuso kanye nokuhlanza
2. Ukwanda kokuhamba kwe-adatom ku-substrate
3. Ukwakheka kwezakhiwo zefilimu eziminyene, ezincane noma ezingenasimo
Uma kuhlanganiswa nokwakheka kwe-substrate, amandla e-ion angalungiswa ngokunembile ukuze alingane:
1. Ukuqina kwefilimu
2. Ukulawula ukucindezeleka okusele
3. Ukunamathela kokumboza
Lokhu kulawulwa kuyinzuzo enkulu yezinhlelo ze-cathodic arc ekusetshenzisweni kwezimboni.
4. Ubuningi be-Plasma kanye nezici Zokuthutha
Uma kuqhathaniswa namanye ama-plasma e-PVD, i-cathodic arc plasma iveza:
1. Ukuminyana kwe-plasma okuphezulu kakhulu
2. Ukwanda kwe-plasma okuziqhubayo okuqinile kusuka endaweni ye-cathode
Ukuthuthwa kwe-plasma kuthonywa yi: Amandla kagesi e-Arc; Amasimu okuqondisa e-magnetic; i-geometry yegumbi;
Isiqondiso esifanele se-plasma siqinisekisa: Ubukhulu be-coating obufanayo; Amazinga okufakwa okuzinzile; Izakhiwo ze-coating ezihlala njalo kuzo zonke izinqwaba
5. Ama-Macroparticles: Inselele Ye-Plasma Engokwemvelo
Isici esihlukile se-cathodic arc plasma ukukhiqizwa kwama-macroparticles (amaconsi) ngesikhathi esisodwa.
Lezi zinhlayiya ezincibilikisiwe noma eziqinile zivela ku: Ukukhishwa kwezinto eziqhumayo ezindaweni ze-cathode; Ama-Macroparticles angathinta kabi:; Ubulukhuni bendawo; Ikhwalithi yokubona; Ukusebenza kwe-tribological
Ukuze kuxazululwe lokhu, izinhlelo zezimboni zivame ukuhlanganisa:
Izinhlelo ze-plasma ze-arc ezihlungiwe ze-magnetic noma ze-duct
Izindlela zokuqondisa indawo ye-cathode ezilungiselelwe
Ubuchwepheshe be-arc obuhlungiwe buvumela ukugcinwa kwezinzuzo eziphezulu ze-ionization ngenkathi kunciphisa kakhulu ukungcoliswa kwezinhlayiya.
–Lesi sihloko sishicilelwe nguimishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Jan-12-2026