Makhalidwe a Plasma mu Cathodic Arc Deposition

Kusanthula Kwaukadaulo Kuchokera ku Malingaliro a Njira ndi Zipangizo

Cathodic arc deposition imadziwika kwambiri ngati ukadaulo wa PVD wopangidwa ndi ma ion ambiri womwe ungathe kupanga zokutira zolimba, zolimba kwambiri, komanso zolimba kwambiri.
Pakati pa ndondomekoyi pali plasma yapadera yomwe imapangidwa ndi kutuluka kwa cathodic arc, yomwe makhalidwe ake amasiyanitsa ndi magnetron sputtering ndi njira zina za PVD.

Kumvetsetsa momwe plasma imagwirira ntchito m'ma cathodic arc system ndikofunikira kwambiri powongolera kapangidwe ka zokutira, magwiridwe antchito, komanso kukhazikika kwa nthawi yayitali.

1. Chiyambi cha Cathodic Arc Plasma

Mu cathodic arc deposition, plasma imapangidwa pa madontho a microscopic cathode omwe amapangidwa pamwamba pa cholinga pamene kutuluka kwa arc yamphamvu komanso yotsika kwambiri kumayamba.

Zinthu zazikulu za malo a cathode ndi izi:

1. Kuchulukana kwa mphamvu yamagetsi m'deralo (10⁶–10⁸ A/cm²)

2. Kutentha kwakukulu kwambiri komwe kumakhalapo

3. Kutuluka kwa zinthu za cathode mwachangu

Njira imeneyi imapanga plasma yokhala ndi zinthu zomwe zimayikidwa mu ionized, osati maatomu osalowerera.

2. Digiri Yapamwamba ya Ionization: Khalidwe Lodziwika

Chimodzi mwazinthu zofunika kwambiri za plasma ya cathodic arc ndi gawo lake la ionization lalikulu kwambiri.

Kuchuluka kwa ma ion a mitundu ya zitsulo kumatha kupitirira 70–90% ndipo gawo lalikulu la ma ion limachulukitsidwa (M²⁺, M³⁺)

Mlingo wapamwamba wa ionization uwu umalola:

1. Kugwirizana kwamphamvu kwa ayoni ndi substrate

2. Kuchulukitsa kwa filimu

3. Kuphimba kwapamwamba kwambiri ngakhale kutentha kochepa kwa substrate

Kuchokera ku lingaliro la uinjiniya, ionization yapamwamba imapereka njira yayikulu komanso yolimba yogwirira ntchito, makamaka pazophimba zolimba komanso zoteteza.

3. Mphamvu ndi Malangizo a High Ion

Plasma ya Cathodic arc imakhala ndi mphamvu zambiri za ma ion, zomwe nthawi zambiri zimakhala kuyambira pa ma volts makumi angapo mpaka kupitirira zana limodzi.

Zotsatira za plasma yamphamvu iyi ndi izi:

1. Kutsegula ndi kuyeretsa bwino pamwamba

2. Kuwonjezeka kwa kayendedwe ka adatom pa substrate

3. Kupanga kapangidwe ka filimu yokhuthala, yopyapyala kapena yopanda mawonekedwe

Mphamvu ya ion ikaphatikizidwa ndi kusiyanitsa kwa substrate, imatha kusinthidwa bwino kuti ikhale yofanana:

1. Kuchulukana kwa filimu

2. Kulamulira kupsinjika maganizo kotsalira

3. Kuphimba kumamatira

Kuwongolera kumeneku ndi ubwino waukulu wa machitidwe a cathodic arc mu ntchito zamafakitale.

4. Kuchuluka kwa Plasma ndi Makhalidwe Oyendera

Poyerekeza ndi ma plasma ena a PVD, plasma ya cathodic arc imapezeka:

1. Kuchulukana kwambiri kwa plasma

2. Kuwonjezeka kwamphamvu kwa plasma yodziyendetsa yokha kuchokera pamalo a cathode

Kuyenda kwa plasma kumakhudzidwa ndi: Mphamvu ya Arc; Minda yoyendetsera maginito; mawonekedwe a chipinda;

Malangizo oyenera a plasma amatsimikizira kuti: Kukhuthala kofanana kwa chophimba; Kuchuluka kokhazikika kwa malo oyikapo; Makhalidwe okhazikika a chophimba m'magulu onse

5. Macroparticles: Vuto Lobadwa Nalo la Plasma

Mbali yapadera ya cathodic arc plasma ndi kupanga ma macroparticles (madontho) nthawi imodzi.

Tinthu tosungunuka kapena tolimba timeneti timachokera ku: Kutuluka kwa zinthu zophulika pa malo a cathode; Macroparticles ingakhudze moyipa:; Kukhwima kwa pamwamba; Ubwino wa kuwala; Kugwira ntchito kwa tribological

Pofuna kuthana ndi izi, machitidwe a mafakitale nthawi zambiri amaphatikiza:

Machitidwe a plasma opangidwa ndi maginito kapena ma duct-type filtered arc plasma

Njira zoyendetsera malo a cathode zabwino kwambiri

Ukadaulo wosefedwa wa arc umalola kusunga ubwino wambiri wa ionization pomwe umachepetsa kwambiri kuipitsidwa kwa tinthu.

– Nkhaniyi yafalitsidwa ndizida zophikira zotsukirawopanga Zhenhua Vacuum