He Tātari Hangarau mai i ngā Tirohanga Tukanga me ngā Taputapu
Te whakatakotoranga pewa katoteE mōhiotia whānuitia ana te n hei hangarau PVD whakakoi-teitei e kaha ana ki te whakaputa paninga matotoru, piri kaha, me te tino mārō.
Kei te ngako o tēnei tukanga ko te plasma ahurei i hangaia e ngā tukunga pewa cathodic, ā, ko ōna āhuatanga e wehewehe ana i a ia mai i te magnetron sputtering me ētahi atu tikanga PVD.
He mea nui te mārama ki te whanonga o te parāma i roto i ngā pūnaha pewa katote hei whakahaere i te hanganga paninga, te mahi, me te pumau o te tukanga mō te wā roa.
1. Te Pūtake o te Plasma Āwhata Katorika
I roto i te whakatakotoranga pewa katote, ka whakaputaina te parāoa toto i ngā ira katote moroiti e hangaia ana i runga i te mata ūnga ina tīmatahia he tukunga pewa iahiko-tiketike, iahiko-iti.
Ko ngā āhuatanga matua o ngā ira katote ko:
1. Te mātotoru o te au o te rohe tino teitei (10⁶–10⁸ A/cm²)
2. Te pāmahana ā-rohe tino teitei
3. Te mimiti tere o te rauemi katote
Ka puta i tēnei tukanga he parāuma e titoa ana te nuinga mai i ngā rauemi ūnga kua whakakatia, kaua i ngā ngota kūpapa.
2. Teitei o te Ionization: He Āhuatanga Matua
Ko tētahi o ngā āhuatanga tino hira o te plasma pewa katote ko tōna wāhanga ionization tino tiketike.
Ka taea e ngā tere whakakoi o ngā momo konganuku te neke atu i te 70–90%, ā, he nui te wāhanga o ngā katote he maha ngā utu (M²⁺, M³⁺)
Mā tēnei taumata ionization teitei ka taea:
1. Ngā taunekeneke kaha o te katote-papa
2. Te whakanui ake i te matotoru o te kiriata
3. He pai ake te piri o te paninga ahakoa i ngā pāmahana papa iti
Mai i te tirohanga hangarau, he whānui, he pakari hoki te tukanga e whakaratohia ana e te ionization teitei, inā koa mō ngā paninga mārō me ngā paninga tiaki.
3. Te Pūngao Ātiona Teitei me te Aronga
He nui te pūngao katote ā-roto o te plasma pewa katote, mai i ngā tekau ki te neke atu i te kotahi rau ngāohiko irahiko.
Ko ngā hua o tēnei pūmua hihiko ko:
1. Te whakahohe me te horoi mata whai hua
2. Te pikinga o te nekenekehanga ā-mate i runga i te papa
3. Te hanganga o ngā hanganga kiriata matotoru, pai te āhua, te āhua kore rānei
Ina honoa ki te whakahāngaitanga o te papa, ka taea te whakarite tika i te kaha katote kia taurite:
1. Te whakakīkī i te kiriata
2. Te whakahaere i te ahotea toenga
3. Te piri o te paninga
Ko tēnei āheinga whakahaere tētahi o ngā painga nui o ngā pūnaha pewa katote i roto i ngā tono ahumahi.
4. Te Kiato o te Plasma me ngā Āhuatanga Kawe
Ki te whakatauritea ki ētahi atu plasma PVD, ka whakaatuhia e te plasma arc cathodic:
1. Te tino tiketike o te kiato plasma
2. Te whakawhānui kaha o te plasma whaiaro-peia mai i te wāhi cathode
Ko te kawe i te parāoa toto ka pāngia e: te iahiko āwhata; ngā mara urungi aukume; te āhua o te rūma;
Mā te arataki tika o te parāuma ka whakarite kia: Matotoru ōrite te paninga; Ngā tere whakatakotoranga pumau; Ngā āhuatanga paninga ōrite puta noa i ngā puranga
5. Ngā Matūriki: He Wero Plasma Tūturu
Ko tētahi āhuatanga motuhake o te plasma pewa katotika ko te whakaputanga o ngā matūriki nui (ngā pata) i te wā kotahi.
I ahu mai ēnei matūriki rewa, totoka rānei i: Te panga rauemi pahū i ngā wāhi katote; Ka pā kino pea ngā matūriki nui ki:; Te taratara o te mata; Te kounga whatu; Te mahi ā-iwi
Hei whakatika i tēnei, ka whakauruhia e ngā pūnaha ahumahi:
Ngā pūnaha plasma pewa kua tātarihia he aukume, he momo paipa rānei
Ngā tikanga urungi ira cathode kua arotauhia
Mā te hangarau pewa tātari ka taea te pupuri i ngā painga nui o te ionization me te whakaiti nui i te parahanga matūriki.
–Nātaputapu paninga korehaukaihanga Zhenhua Vacuum
Wā tuku: Hanuere-12-2026