Hunhu hwePlasma muCathodic Arc Deposition

Ongororo yeUnyanzvi kubva kuMaitiro neMaonero eMidziyo

Kuisa arc yeCathodicn inozivikanwa zvakanyanya se tekinoroji yePVD ine ionization yakawanda inokwanisa kugadzira machira akaomarara, anonamatira zvakanyanya, uye akaomarara zvakanyanya.
Pakati peiyi nzira pane plasma yakasarudzika inogadzirwa ne cathodic arc discharges, ine hunhu hwayo hunoisiyanisa zvakanyanya ne magnetron sputtering nedzimwe nzira dzePVD.

Kunzwisisa maitiro eplasma mumasisitimu e cathodic arc kwakakosha pakudzora chimiro chekuputira, mashandiro, uye kugadzikana kwenguva refu kwemaitiro.

1. Kwakatangira Cathodic Arc Plasma

Mu cathodic arc deposition, plasma inogadzirwa panzvimbo dzinoonekwa ne microscopic cathode spots dzakagadzirwa pamusoro pechinhu chinotarirwa kana arc discharge ine simba rakawanda, ine voltage shoma inotanga.

Zvinhu zvakakosha zve cathode spots zvinosanganisira:

1. Kuwanda kwesimba remagetsi munzvimbo (10⁶–10⁸ A/cm²)

2.Kupisa kwakanyanya munzvimbo

3. Kukurumidza kuputika kwemvura inoputika yezvinhu zve cathode

Maitiro aya anogadzira plasma ine zvinhu zvakashandiswa zvakanyanya, kwete maatomu asina kwaakarerekera.

2. Dhigirii reIonization repamusoro: Hunhu Hunotsanangura

Chimwe chezvinhu zvinonyanya kukosha mu cathodic arc plasma ndechekuti ine ionization yakawanda.

Mwero weionization yemhando dzesimbi unogona kudarika 70–90% uye Chikamu chikuru chemaion chinowedzerwa chaji (M²⁺, M³⁺)

Iyi ionization level yakakwira inobvumira:

1. Kudyidzana kwakasimba kwemaion-substrate

2. Kuwedzerwa kwesimba remafirimu

3. Kunamatira kwepamusoro-soro kunyangwe patembiricha yakaderera ye substrate

Kubva pamaonero einjiniya, ionization yakawanda inopa mukana wakakura uye wakasimba wekushanda, kunyanya kune machira akaomarara uye anodzivirira.

3. Simba reIon Yakawanda uye Kutungamira

Plasma yeCathodic arc inoratidza simba guru remaion, rinowanzo bva pamakumi akati wandei kusvika pamazana emaelectron volts.

Migumisiro yeplasma iyi ine simba inosanganisira:

1. Kushanda uye kuchenesa pamusoro zvinobudirira

2. Kuwedzera kwekufamba kweadatom pa substrate

3. Kuumbwa kwemafirimu akakora, akapfava kana asina chimiro

Kana ikasanganiswa ne substrate biasing, simba reion rinogona kugadziriswa nemazvo kuti rienzane:

1. Kuwanda kwemafirimu

2. Kudzora kushushikana kwasara

3. Kunamatira kwekuputira

Kugona kudzora uku mukana mukuru we cathodic arc systems mumashandisirwo emaindasitiri.

4. Kuwanda kwePlasma uye Hunhu hweKutakura

Zvichienzaniswa nedzimwe plasma dzePVD, plasma ye cathodic arc inoratidza:

1. Kuwanda kwakanyanya kweplasma

2. Kuwedzera kwakasimba kweplasma inotungamirwa yega kubva panzvimbo ye cathode

Kutakurwa kweplasma kunokonzerwa ne: Arc current; Magnetic steering fields; Chamber geometry;

Kutungamirirwa kweplasma kwakakodzera kunovimbisa: Ukobvu hwekuvhara hwakafanana; Mwero wekuisa wakasimba; Hunhu hwekuvhara hwakafanana pakati pemabheti

5. Macroparticles: Dambudziko rePlasma rekuzvarwa naro

Chinhu chakasiyana che cathodic arc plasma ndiko kugadzirwa kwema macroparticles (madonhwe) panguva imwe chete.

Zvidimbu izvi zvakanyungudutswa kana kuti zvakasimba zvinobva ku: Kubuda kwezvinhu zvinoputika panzvimbo dzinobuda macathode; Macroparticles zvinogona kukanganisa:; Kuoma kwenzvimbo; Hunhu hwemaziso; Kushanda kwetribological

Kuti zvigadziriswe izvi, masisitimu emaindasitiri anowanzo batanidza:

Masisitimu eplasma e "arc plasma" ane magineti kana kuti "duct-type"

Nzira dzekufambisa nzvimbo dze cathode dzakagadziriswa zvakanaka

Tekinoroji ye arc yakaseferwa inobvumira kuchengetedza mabhenefiti akawanda eionization uku ichideredza zvakanyanya kusvibiswa kwezvikamu.

–Chinyorwa ichi chakabudiswa namidziyo yekunamira ye vacuummugadziri Zhenhua Vacuum