Imiterere ya Plasma mu Gushyiramo Arc ya Cathodic

Isesengura rya Tekiniki ryavuye mu Mikorere n'Ibikoresho

Gushyiramo arc ya Cathodicn izwi cyane nk'ikoranabuhanga rya PVD rikoresha ionization nyinshi rishobora gukora irangi ryinshi, rifata cyane kandi rikomeye cyane.
Ishingiro ry'iyi gahunda ni plasma yihariye ikorwa n'imiyoboro ya cathodic arc, imiterere yayo ikaba itandukanya cyane na magnetron sputtering n'ubundi buryo bwa PVD.

Gusobanukirwa imyitwarire ya plasma muri sisitemu ya cathodic arc ni ingenzi mu kugenzura imiterere y'igitambaro, imikorere, n'uburyo inzira ihoraho ihagaze.

1. Inkomoko ya Plasma ya Cathodic Arc

Mu gusohora arc ya cathodic, plasma ikorerwa ahantu hanini hakozwe ku buso bw’ikintu iyo hatangiye gusohora arc ifite ingufu nyinshi kandi ifite voltage nke.

Ibintu by'ingenzi bigize ahantu hafite cathode birimo:

1. Ubucucike bw'amazi yo mu gace kacu buri hejuru cyane (10⁶–10⁸ A/cm²)

2. Ubushyuhe buri hejuru cyane mu gace runaka

3. Guhumeka vuba kw'ibikoresho bya cathode

Ubu buryo butanga plasma igizwe ahanini n'ibintu bya ionized, aho kuba atome zidafite aho zibogamiye.

2. Impamyabushobozi yo hejuru ya Ionization: Ikiranga gisobanutse

Kimwe mu bintu by'ingenzi biranga plasma ya cathodic arc ni uko igice cyayo cya ionization kiri hejuru cyane.

Igipimo cya Ionization y'ubwoko bw'ibyuma gishobora kurenza 70–90% kandi igice kinini cya iyoni zishyuzwa inshuro nyinshi (M²⁺, M³⁺)

Uru rwego rwo hejuru rwa ionization rutuma:

1. Ikorana rikomeye rya iyoni n'ibice byayo

2. Kongera ubucucike bwa firime

3. Gufata neza cyane nubwo haba hari ubushyuhe buke cyane

Mu rwego rw'ubuhanga, ionization nyinshi itanga inzira nini kandi ikomeye yo gukora, cyane cyane ku bijyanye n'imyambaro ikomeye kandi irinda.

3. Ingufu nyinshi za Ion n'icyerekezo

Plasma ya arc ya Cathodic igaragaza ingufu nyinshi za iyoni, ubusanzwe kuva kuri volti nyinshi kugeza kuri volti zirenga ijana.

Ingaruka z'iyi plasma ifite ingufu zirimo:

1. Gukoresha neza ubuso no kubusukura

2. Kongera uburyo adatome igenda ku gice cy'imbere cy'ubutaka

3. Gushinga imiterere y'urusobe rw'amafilimi rufite ubugari, ruto cyangwa rudafite ishusho

Iyo bihujwe na substrate biasing, ingufu za iyoni zishobora guhindurwa neza kugira ngo zihuzwe:

1. Gucukura firime

2. Kugenzura imihangayiko isigaye

3. Gufata neza irangi

Uku kugenzura ni inyungu ikomeye ya sisitemu ya cathodic arc mu bikorwa by'inganda.

4. Ubucucike bwa Plasma n'imiterere y'ubwikorezi

Ugereranyije n'izindi plasma za PVD, plasma ya arc cathodic igaragaza:

1. Ubucucike bwinshi cyane bwa plasma

2. Kwaguka cyane kwa plasma ikoresheje ikoranabuhanga ryo kwikorera uvuye kuri cathode

Gutwara plasma bigengwa na: Umuyoboro w'amazi ugana ku mugozi; Imiyoboro y'amashanyarazi ya magnetike; Imiterere y'icyumba;

Ubuyobozi bukwiye bwa plasma butuma: Ubugari bw'igitambaro bungana; Igipimo cyo gushyiramo gihamye; Imiterere ihoraho yo gutwikira mu byiciro byose

5. Uduce duto twa Macro: Ikibazo cy'amatembabuzi y'amaraso

Ikintu cyihariye cya plasma ya cathodic arc ni uko uduce duto (ibitonyanga) dukora icyarimwe.

Utu duce dushongeshejwe cyangwa dukomeye dukomoka kuri: Gusohora ibintu biturika ku duce twa cathode; Uduce duto dushobora kugira ingaruka mbi ku: Ubushyuhe bw'ubuso; Ubwiza bw'amaso; Imikorere ya tribological

Kugira ngo ibi bikemuke, sisitemu z'inganda zikunze guhuzwa:

Sisitemu za plasma za arc ziyunguruye za magnetic cyangwa duct-type

Uburyo bwiza bwo kuyobora cathode spot

Ikoranabuhanga rya arc riyunguruye rituma habaho inyungu nyinshi za ionization mu gihe rigabanya cyane ubwandu bw'udukoko.

–Iyi nkuru yasohotse naibikoresho byo gusiga irangi ry'umwukauruganda rwa Zhenhua Vacuum