Njirimara Plasma na Ndoputa Arc Cathodic

Nnyocha Teknụzụ site na Echiche Usoro na Ngwaọrụ

Oghere Cathodic arcA maara n nke ọma dị ka teknụzụ PVD dị elu nke nwere ike imepụta mkpuchi siri ike, nke na-arapara nke ọma, ma sie ike nke ukwuu.
Isi ihe dị na usoro a bụ plasma pụrụ iche nke ihe ndị na-agbapụta arc nke cathodic na-emepụta, nke àgwà ya dị iche na magnetron sputtering na usoro PVD ndị ọzọ.

Ịghọta omume plasma dị na sistemụ arc cathodic dị mkpa maka ijikwa nhazi mkpuchi, arụmọrụ, na nkwụsi ike usoro ogologo oge.

1. Mmalite nke Cathodic Arc Plasma

N'ihe gbasara cathodic arc, a na-emepụta plasma na obere ntụpọ cathode nke e guzobere n'elu ihe mgbaru ọsọ mgbe a malitere iwepụ arc dị elu, nke nwere obere voltaji.

Ihe ndị dị mkpa nke ntụpọ cathode gụnyere:

1. Oke njupụta ọkụ eletrik mpaghara (10⁶–10⁸ A/cm²)

2.Okpomọkụ mpaghara dị oke elu

3. Ngwa ngwa mgbawa nke ihe cathode

Usoro a na-emepụta plasma nke nwere ihe ndị e ji ion mee, kama atọm ndị na-anọpụ iche.

2. Ogo Ionization Dị Elu: Njirimara Nkọwapụta

Otu n'ime ihe kacha pụta ìhè na plasma arc nke Cathodic bụ oke ionization ya dị elu nke ukwuu.

Ọnụego ionization nke ụdị ígwè nwere ike gafere 70–90%, a na-anakwa nnukwu oke ion chajị ọtụtụ (M²⁺, M³⁺)

Ọkwa ionization dị elu a na-enye ohere:

1. Mmekọrịta siri ike nke ion-substrate

2. Mmepe nke ihe nkiri ka mma

3. Mgbakwunye mkpuchi dị elu ọbụlagodi na okpomọkụ dị ala nke substrate

Site n'echiche nke injinia, ionization dị elu na-enye usoro nhazi sara mbara ma sie ike, ọkachasị maka mkpuchi siri ike na nke nchebe.

3. Ike ion dị elu na ntụziaka

Plasma Cathodic arc na-egosipụta ike ion dị elu, nke na-abụkarị site na ọtụtụ iri ruo ihe karịrị otu narị volt elektrọn.

Ihe ndị si na plasma ike a pụta gụnyere:

1. Mmelite na nhicha elu dị irè

2. Mmụba mmegharị adamom na substrate ahụ

3. Nhazi nke ihe owuwu ihe nkiri dị oke arọ, nke nwere mkpụrụ osisi mara mma ma ọ bụ nke amorphous

Mgbe ejikọtara ya na ntụgharị uche nke substrate, enwere ike ịhazi ike ion kpọmkwem ka ọ bụrụ nguzozi:

1. Njupụta nke ihe nkiri

2. Njikwa nrụgide fọdụrụ

3. Nrapado mkpuchi

Njikwa a bụ nnukwu uru nke sistemụ arc cathodic na ngwa ụlọ ọrụ mmepụta ihe.

4. Njirimara Njupụta Plasma na Njem

Ma e jiri ya tụnyere plasma PVD ndị ọzọ, plasma cathodic arc na-egosipụta:

1. Oke njupụta plasma dị elu

2. Mgbasa plasma siri ike nke na-achịkwa onwe ya site na ntụpọ kathode

Njem Plasma na-emetụta: Ọwara Arc; Ebe ndọta magnetik; Ọdịdị ụlọ;

Ntuziaka plasma kwesịrị ekwesị na-eme ka o doo anya: Ọkpụrụkpụ mkpuchi otu; Ọnụego nkwụnye siri ike; Njirimara mkpuchi na-adịgide adịgide n'ofe otu

5. Macroparticles: Ihe ịma aka dị n'ime plasma

Ihe pụrụ iche nke plasma cathodic arc bụ mmepụta nke macroparticles (mmiri ntapu) n'otu oge.

Ihe ndị a gbazere agbaze ma ọ bụ ihe siri ike sitere na: Mwepụ ihe mgbawa na ntụpọ kathode; Macroparticles nwere ike imetụta:; Ọdịdị elu; Ogo anya; Arụmọrụ Tribological

Iji dozie nke a, sistemụ ụlọ ọrụ na-ejikọtakarị:

Sistemụ plasma arc a na-eme ka ọ dị ka magnetik ma ọ bụ duct

Usoro nhazi ntụpọ cathode kachasị mma

Teknụzụ arc a kpụchara akpụ na-enye ohere idobe uru ionization dị elu ebe ọ na-ebelata mmetọ nke ukwuu.

–E bipụtara akụkọ a site n'aka onye bipụtara yaakụrụngwa mkpuchi agụụonye nrụpụta Zhenhua Vacuum