Cov yam ntxwv ntawm cov ntshav hauv Cathodic Arc Deposition

Kev Tshawb Fawb Txog Kev Siv Tshuab Los Ntawm Cov Txheej Txheem Thiab Cov Khoom Siv

Cathodic arc depositionn yog dav lees paub tias yog ib qho thev naus laus zis PVD siab-ionization uas muaj peev xwm tsim cov txheej txheem ntom ntom, nplaum zoo, thiab tawv heev.
Hauv plawv ntawm cov txheej txheem no yog cov plasma tshwj xeeb uas tsim los ntawm cathodic arc discharges, uas nws cov yam ntxwv sib txawv ntawm magnetron sputtering thiab lwm yam txheej txheem PVD.

Kev nkag siab txog tus cwj pwm plasma hauv cov kab ke cathodic arc yog qhov tseem ceeb rau kev tswj cov qauv txheej, kev ua tau zoo, thiab kev ruaj khov mus sij hawm ntev.

1. Keeb kwm ntawm Cathodic Arc Plasma

Hauv cathodic arc deposition, plasma yog tsim los ntawm cov cathode me me uas tsim rau ntawm qhov chaw ntawm lub hom phiaj thaum lub sijhawm tso tawm arc siab, qis-voltage.

Cov yam ntxwv tseem ceeb ntawm cov cathode spots muaj xws li:

1. Qhov ceev tam sim no hauv zos siab heev (10⁶–10⁸ A/cm²)

2. Kub siab heev

3. Kev tawg sai ntawm cov khoom siv cathode

Cov txheej txheem no tsim cov plasma uas muaj cov khoom siv ionized feem ntau, es tsis yog cov atoms nruab nrab.

2. Qib Siab Ionization: Ib qho Cim Qhia

Ib qho ntawm cov yam ntxwv tseem ceeb tshaj plaws ntawm cathodic arc plasma yog nws cov ionization fraction siab heev.

Cov nqi ionization ntawm cov hom hlau tuaj yeem tshaj 70–90% thiab Feem ntau ntawm cov ions raug them ntau (M²⁺, M³⁺)

Qib siab ionization no ua rau:

1. Kev sib cuam tshuam ntawm cov ion thiab cov substrate muaj zog

2. Kev ua kom cov yeeb yaj kiab zoo dua

3. Kev nplaum zoo heev txawm tias nyob rau qhov kub qis dua ntawm cov substrate

Los ntawm qhov pom ntawm engineering, ionization siab muab lub qhov rais txheej txheem dav thiab ruaj khov, tshwj xeeb tshaj yog rau cov txheej txheem tawv thiab tiv thaiv.

3. Lub zog Ion siab thiab kev coj ua

Cathodic arc plasma qhia txog lub zog ion siab, feem ntau yog txij li ntau kaum txog ntau tshaj ib puas electron volts.

Cov txiaj ntsig ntawm cov plasma zog no suav nrog:

1. Kev ua kom zoo thiab ntxuav qhov chaw

2. Ua kom cov adatom txav mus los ntawm cov substrate ntau dua

3. Kev tsim cov qauv zaj duab xis ntom ntom, zoo-grained lossis amorphous

Thaum ua ke nrog kev cuam tshuam ntawm cov substrate, lub zog ion tuaj yeem raug kho kom raug kom sib npaug:

1. Kev ua kom cov yeeb yaj kiab tuab

2. Kev tswj kev ntxhov siab seem

3. Kev nplaum txheej

Qhov kev tswj tau no yog qhov zoo dua ntawm cov kab ke cathodic arc hauv kev siv hauv kev lag luam.

4. Cov yam ntxwv ntawm Plasma thiab kev thauj mus los

Piv rau lwm cov PVD plasmas, cathodic arc plasma exhibits:

1. Cov ntshav siab heev

2. Muaj zog ntawm tus kheej tsav plasma nthuav dav los ntawm qhov chaw cathode

Kev thauj mus los ntawm cov plasma yog cuam tshuam los ntawm: Arc current; Magnetic steering fields; Chamber geometry;

Kev taw qhia plasma kom zoo ua kom ntseeg tau tias: Cov tuab txheej sib xws; Cov nqi tso dej ruaj khov; Cov khoom txheej sib xws thoob plaws cov pawg

5. Macroparticles: Ib qho kev sib tw ntawm Plasma uas muaj nyob hauv

Ib qho tshwj xeeb ntawm cathodic arc plasma yog tib lub sijhawm ntawm macroparticles (droplets).

Cov khoom me me uas yaj los yog khov no pib los ntawm: Cov khoom tawg tawm ntawm cov cathode; Macroparticles tuaj yeem cuam tshuam tsis zoo rau:; Qhov roughness ntawm qhov chaw; Qhov zoo ntawm qhov muag; Kev ua tau zoo ntawm Tribological

Yuav kom daws tau qhov no, cov txheej txheem kev lag luam feem ntau sib koom ua ke:

Cov tshuab sib nqus lossis cov kav dej lim dej arc plasma

Cov txheej txheem tswj hwm cathode zoo tshaj plaws

Cov thev naus laus zis lim dej tso cai rau kev khaws cia cov txiaj ntsig ionization siab thaum txo cov khoom me me.

– Tsab xov xwm no tau luam tawm los ntawmcov khoom siv nqus tsev txheejChaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev