Isimiso sokuphalaza i-Magnetron: ama-electron angqubuzana nama-athomu e-argon enkambisweni yokusheshisa ukuya ku-substrate ngaphansi kwesenzo sensimu kagesi, okwenza inani elikhulu lama-ion e-argon nama-electron liyi-ion, bese ama-electron endizela ku-substrate. I-argon ion iyasheshisa ukuze ihlasele izinto eziqondiwe ngaphansi kwesenzo sensimu kagesi, ichithe inani elikhulu lama-athomu aqondiwe, abekwa ku-substrate njengama-athomu aqondiwe angathathi hlangothi (noma ama-molecule) ukuze akhe ifilimu. Lapho i-electron yesibili ishesha ukuze indize iye ku-substrate, ngaphansi kwethonya lamandla e-Lorentz ensimu yamagnetic, iveza ifomu elihlanganisiwe elijikelezayo neliyi-cycloid ukuze lenze uchungechunge lokunyakaza okujikelezayo ebusweni obuqondiwe. I-electron ayinayo nje indlela ende yokunyakaza, isesesendaweni ye-plasma eduze kwendawo okuqondiwe kuyo ngomsebe we-electromagnetic field theory, lapho inani elikhulu le-Ar liyi-ionized ukuze lihlasele i-target, ngakho-ke izinga lokufakwa kwedivayisi yokumboza i-magnetron sputtering liphezulu.
Ngakho-ke,imishini yokumboza i-magnetron sputteringKuthuthukiswe, okuhlanganisa ubuchwepheshe bokubhoboza i-magnetron kanye nobuchwepheshe bokumboza i-ion, futhi kunikeza isisombululo sokuthuthukisa ukuhambisana kombala kanye nokuqina kwesilinganiso sokufakwa kanye nokwakheka kwenhlanganisela. Ngokwezidingo ezahlukene zomkhiqizo, uhlelo lokushisa, uhlelo lokubandlulula, uhlelo lokufaka i-ion kanye namanye amadivayisi kungakhethwa. Ukusatshalaliswa okuqondiwe kungalungiswa kalula, futhi ukufana kwefilimu kuphakeme. Ngezinto eziqondiwe ezahlukene, ifilimu ehlanganisiwe esebenza kangcono ingalungiswa. Ingubo elungiselelwe yimishini inezinzuzo zamandla aqinile ahlanganisiwe kanye nokuqina, okungathuthukisa ngempumelelo ukumelana nokufuthwa kukasawoti, ukumelana nokuguguleka kanye nobunzima bomphezulu womkhiqizo, futhi kuhlangabezane nezidingo zokulungiselela indwangu esebenza kahle.
Imishini icebile ngezinto ezifanele, ezingasetshenziselwa izingxenye zehadiwe/zepulasitiki ezimbozwe ngamanzi zensimbi engagqwali, ingilazi, izinto zobumba nezinye izinto. Isetshenziswa kakhulu kwihadiwe yemikhiqizo ye-elekthronikhi, amawashi namawashi asezingeni eliphezulu, ubucwebe obusezingeni eliphezulu kanye nehadiwe yezimpahla zesikhumba zomkhiqizo kanye neminye imikhiqizo ecebile.
Isikhathi sokuthunyelwe: Feb-07-2023