Hoʻolauna pōkole a me nā pono o nā lako hana pena ʻana o ka magnetron

ʻO ke kumumanaʻo sputtering Magnetron: kuʻi nā electrons me nā ʻātoma argon i ke kaʻina hana o ka wikiwiki ʻana i ka substrate ma lalo o ka hana o ke kahua uila, e ionizing ana i ka nui o nā ion argon a me nā electrons, a lele nā ​​​​electrons i ka substrate. Hoʻolalelale ka ion argon e hoʻopō i ka mea pahuhopu ma lalo o ka hana o ke kahua uila, e pīpī ana i ka nui o nā ʻātoma pahuhopu, i waiho ʻia ma luna o ka substrate ma ke ʻano he mau ʻātoma pahuhopu kūlike ʻole (a i ʻole nā ​​​​mole) e hana i kahi kiʻiʻoniʻoni. Ke wikiwiki ka electron lua e lele i ka substrate, ma lalo o ka mana o ka ikaika Lorentz o ke kahua magnetic, hōʻike ia i kahi ʻano hui spiral a me cycloid e hana i kahi moʻo o nā neʻe pōʻai ma ka ʻili pahuhopu. ʻAʻole wale ka electron i kahi ala lōʻihi o ka neʻe ʻana, aia nō ia ma ka ʻāpana plasma kokoke i ka ʻili pahuhopu e ke kukuna kumumanaʻo kahua electromagnetic, kahi i ionized ai ka nui o Ar e hoʻopō i ka pahuhopu, no laila kiʻekiʻe ka helu waiho ʻana o ka mea uhi sputtering magnetron.

Pēlā, henā lako hana uhi magnetron sputteringua hoʻomohala ʻia, kahi e hoʻohui ai i ka ʻenehana magnetron sputtering a me ka uhi ʻana ion, a hāʻawi i kahi hopena no ka hoʻomaikaʻi ʻana i ke kūlike o ke kala a me https://www.zhenhuavac.com/wp-admin/post.php?post=5107&action=edit&message=1#ke kūpaʻa o ka helu deposition a me ka haku mele hui. Wahi a nā koi huahana like ʻole, hiki ke koho ʻia ka ʻōnaehana hoʻomehana, ka ʻōnaehana bias, ka ʻōnaehana ionization a me nā mea hana ʻē aʻe. Hiki ke hoʻoponopono maʻalahi ʻia ka hoʻolaha pahuhopu, a ʻoi aku ka maikaʻi o ke ʻano like o ke kiʻiʻoniʻoni. Me nā mea pahuhopu like ʻole, hiki ke hoʻomākaukau ʻia kahi kiʻiʻoniʻoni hui me ka hana maikaʻi aʻe. Loaʻa i ka uhi i hoʻomākaukau ʻia e nā lako nā pono o ka ikaika hui ikaika a me ka compactness, hiki ke hoʻomaikaʻi maikaʻi i ke kūpaʻa ʻana o ka paʻakai paʻakai, ke kūpaʻa ʻana i ka ʻaʻahu a me ka paʻakikī o ka ʻili o ka huahana, a hoʻokō i nā koi o ka hoʻomākaukau uhi hana kiʻekiʻe.
Nui nā mea kūpono i loko o kēia lako, hiki ke hoʻohana ʻia no nā lako kila kila/ʻāpana plastik i uhi ʻia me ka wai, ke aniani, nā keramika a me nā mea ʻē aʻe. Hoʻohana nui ʻia ia no nā lako o nā huahana uila, nā uaki a me nā wati kiʻekiʻe, nā mea hoʻonaninani kiʻekiʻe a me nā lako o nā waiwai ʻili lama a me nā huahana waiwai ʻē aʻe.