Muinjiniya yemazuva ano yekumusoro, Physical Vapor Deposition (PVD) yave tekinoroji huru yekubvisa vacuum nekuda kwekushanda kwayo kwakanaka kwemafirimu uye hunhu hwayo husingakuvadzi nharaunda. Chinyorwa chino chinopa ongororo yakadzama yemisimboti, kupatsanurwa, uye mashandisirwo akajairika etekinoroji yePVD, ichipa ruzivo rwehunyanzvi kune nyanzvi dziri mubasa iri.
Nhamba 1 Nheyo Dzekutanga dzeTekinoroji yePVD
PVD inzira inoitwa pasi pemamiriro e "vacuum condition" (kazhinji ≤10⁻³ Pa), umo chinhu chinoputirwa chinopfungaira mumuviri wobva wabatanidzwa pamusoro pe substrate kuti chigadzire firimu rakatetepa. Iyi nzira inoratidzwa ne:
Tembiricha yakaderera yekuisa (kazhinji <500°C)
Kuchena kwakanyanya kwemafirimu uye kurongeka kwekugadzirwa
Inochengetedza nharaunda (hapana mvura inobuda)
Kudzora kwakarurama kwemazinga eNanometer
Nhamba 2 Kupatsanurwa kweMidziyo yePVDtMaitiro
1. Kuputira kweVacuum Evaporation
Kupisa kwevacuum cleaner kunosanganisira kupisa chifukidziro kusvika chasvika pakumanikidzwa kweutsi hwakazara uye hwapera. Mhando dzakajairika dzinosanganisira:
Kupisa Kunodzivirira Kubuda Kwemvura
Inoshandisa simbi dzinoramba kupisa dzakadai setungsten kana molybdenum. Yakakodzera zvinhu zvisinganyungudike zvakanyanya sealuminium (Al) nesirivha (Ag).
Kubuda Kwemaerekitironi (EB-PVD)
Inoshandisa pfuti yemaerekitironi (10–30 kV) kuputira chinhu chainoda, ichigadzira tembiricha iri panzvimbo inodarika 3000°C. Yakanakira maokisijeni ane nzvimbo dzakanyanya kunyunguduka.
Molecular Beam Epitaxy (MBE)
Nzira yakanyatsogadzirwa inoitwa pasi pevacuum yakakwira zvakanyanya (≤10⁻⁸ Pa), ichibvumira kudzora nhanho yemaatomu ekukura kwefirimu re epitaxial.
2. Kuisa Madonhwe muMashoko
Kusvipa kunosanganisira zvidimbu zvine simba guru zvinoputira chinhu chaunoda, zvichiburitsa maatomu anodonhera pachigadziko. Mhando huru dzekusvipa dzinosanganisira:
DC Sputtering (Yakananga Kusvika)
Nzira huru yekuspotera; chinangwa chinofanira kunge chichifambisa magetsi.
Kukuruma kweRF (Mafambiro eRadio)
Inoshanda pa13.56 MHz, ichibvumira kuyerera kwezvinhu zvinodzivirira kupisa.
Kusvuta kweMagnetron
Rudzi Rwakaenzanirana: Simba remagineti re100–300 Gauss pamusoro penzvimbo yakanangwa
Rudzi Rusina Kuenzana: Kupararira kweplasma kwakawedzerwa kuti pave nekuiswa kwakanaka
Mid-Frequency Twin Cathode: Inogadzirisa nyaya ye "chinangwa chehupfu" mukupopota kwe reactive
Kupisa Kwemagetsi Kwesimba Repamusoro (HIPIMS): Mwero weIonization >90%, zvichigadzira mafirimu akakora, asiri ekoramu
Nhamba 3 Mashandisirwo Akajairika eTekinoroji yePVD
Kuputira Zvishandiso
Mapendi akaomarara akadai seTiN, TiAlN (kuomarara >3000 HV)
Inoshandiswa zvakanyanya pakucheka maturusi uye kugadzirisa pamusoro pechiumbwa
Mapfekero Ekushongedzera
Kupedzisa kwakafanana negoridhe uchishandisa ZrN, TiZrN
Zvinoshandiswa pamafuremu efoni, zvigadziko zvekugezera, nezvinhu zvevatengi
Mafirimu Matete Anoshanda
Mafirimu eITO (Indium Tin Oxide) anopinza zvinhu zvinopenya ane resistance yepepa <10 Ω/□
Machira ekudzivirira kupenya kwemaziso ane chiedza chinoonekwa >99%
Kurongedza Semiconductor
Kugadziriswa kwesimbi kwechikamu chewafer (Al, Cu zvinobatana)
Kuisa chipingamupinyi chezvipingamupinyi uchishandisa TaN, TiN kudzivirira kupararira
-Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coating Zhenhua Vacuum.
Nguva yekutumira: Chikumi-18-2025