Incamake y'Inzira zo Gusiga Irangi mu Gifu

Mu buhanga bwo mu buso bugezweho, Gukuraho Umuyaga Ufatika (PVD) byagaragaye nk'ikoranabuhanga ry'ingenzi rikoreshwa mu gusiga ifu bitewe n'imikorere myiza ya firime n'imiterere yabyo itangiza ibidukikije. Iyi nkuru itanga isesengura ryimbitse ry'amahame, ibyiciro, n'ikoreshwa risanzwe ry'ikoranabuhanga rya PVD, itanga ubumenyi mu bya tekiniki ku banyamwuga muri urwo rwego.

Amahame shingiro ya No.1 y'ikoranabuhanga rya PVD
PVD ni igikorwa gikorerwa mu buryo bw'umwuka (ubusanzwe ≤10⁻³ Pa), aho ibikoresho byo gusiga bihinduka umwuka hanyuma bigashyirwa ku buso bw'ubutaka kugira ngo bikore firime ntoya cyane. Ubu buryo burangwa na:

Ubushyuhe bwo gushyiramo amazi buri hasi cyane (muri rusange <500°C)

Ifite ubuziranenge bwinshi kandi ikora neza

Birinda ibidukikije (nta mazi yanduye asohoka)

Igenzura ry'ubuziranenge ku rwego rwa nanometero

Ibyiciro bya No.2 byaIbikoresho bya PVDtInzira
1. Gusiga irangi ry'umwuka mu cyuma gishyuha
Gushyushya ibikoresho byo gutwikira hakoreshejwe vacuum cleaner bikubiyemo gushyushya ibikoresho byo gutwikira kugeza bigeze ku gitutu cy’umwuka wuzuye hanyuma bigashira. Ubwoko busanzwe burimo:

Gushyuha birwanya umwuka uva mu kirere
Ikoresha ibyuma bishyushya nka tungsten cyangwa molybdenum. Ikwiriye ibikoresho bifite aho bishongesha cyane nka aluminiyumu (Al) na feza (Ag).

Guhinduka kw'umuraba wa Electron Beam (EB-PVD)
Ikoresha imbunda ya electron (10–30 kV) kugira ngo irase ibikoresho by’ingenzi, itange ubushyuhe buri ahantu runaka buri hejuru ya 3000°C. Ni nziza cyane kuri oxyde zishongesha cyane.

Epitaksi y'umuraba wa molekile (MBE)
Uburyo bunoze cyane bukoreshwa munsi y'ubushyuhe bwinshi cyane (≤10⁻⁸Pa), butuma habaho kugenzura urwego rwa atome kugira ngo filime ya epitaxial ikure.

2. Gutanga impumuro mbi
Gutera amazi mu mazi bikubiyemo uduce dukoresha ingufu nyinshi tugatera ikintu runaka, tugasohora atome zinjira mu kintu runaka. Ubwoko bw'ingenzi bwo gutera amazi mu mazi burimo:

DC Sputtering (Umuyoboro w'amashanyarazi utaziguye)
Uburyo bw'ibanze bwo gusukamo amazi; intego igomba kuba ikoresha amashanyarazi.

Gukoresha RF (Radio Frequency)
Ikora kuri 13.56 MHz, ituma ibikoresho bikingira ubushyuhe bitangira gushonga.

Kunyunyuza Magnetron

Ubwoko buringaniye: Ingufu za rukuruzi za Gauss 100–300 ku buso bugenewe

Ubwoko butaringaniye: Gukwirakwiza neza kwa plasma kugira ngo inyure neza

Ingano y'udusimba twin Cathode: Ikemura ikibazo cy' "uburozi bugamije" mu gutera sputtering

Gukoresha ingufu nyinshi mu gukwirakwiza amashanyarazi mu buryo bwa "High Power Impulse Magnetron Sputtering" (HIPIMS): Igipimo cya "Ionization" kiri hejuru ya 90%, bigatuma habaho filime nyinshi cyane, zitari mu buryo bwa "columnar"

No.3. Ikoreshwa risanzwe ry'ikoranabuhanga rya PVD
Imyambaro yo gupfuka ibikoresho
Ibyuma bikomeye nka TiN, TiAlN (ubukomere >3000 HV)

Ikoreshwa cyane mu gukata no kunoza ubuso bw'ibihumyo

Amavuta yo gusigamo imitako
Irangi rimeze nk'irya zahabu rikoreshejwe ZrN, TiZrN

Bishyirwa ku materefone agendanwa, ibikoresho byo mu bwiherero, n'ibicuruzwa bikoreshwa

Filime ntoya zikora neza
Filimi ziyobora urumuri za ITO (Indium Tin Oxide) zifite ubushobozi bwo guhangana n'urumuri <10 Ω/□

Irangi ririnda urumuri rigaragara rifite ubushobozi bwo kohereza urumuri rugaragara >99%

Gupakira ibikoresho bya semiconductor
Uburyo bwo gukora ibyuma ku rwego rwa Wafer (Al, Cu)

Gushyira urwego rw'inzitizi hakoreshejwe TaN, TiN mu kurwanya gukwirakwira kw'amazi

-Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushye Zhenhua Vacuum.