I roto i te hangarau mata o ēnei rā, kua puta te Physical Vapor Deposition (PVD) hei hangarau paninga korehau matua nā tōna mahi kiriata pai me ōna āhuatanga taiao. Ka whakaratohia e tēnei tuhinga he tātaritanga hōhonu o ngā mātāpono, ngā whakarōpūtanga, me ngā tono noa o te hangarau PVD, e tuku ana i ngā māramatanga hangarau mō ngā tohunga o te ao.
Ngā Mātāpono Taketake Nama 1 o te Hangarau PVD
He tukanga te PVD e mahia ana i raro i ngā āhuatanga korehau (te tikanga ≤10⁻³ Pa), e mimitihia ai te rauemi paninga, kātahi ka whakawhāitihia ki runga i te mata o te papa hei hanga i tētahi kiriata angiangi totoka. Ko ngā āhuatanga o tēnei tikanga ko:
Te pāmahana whakatō iti rawa (te nuinga o te wā <500°C)
He tino parakore te kiriata me te hanganga ka taea te whakahaere
He pai mō te taiao (kāore he tukunga wai para)
Mana whakahaere tika taumata-nanomita
Nama 2 Ngā Whakarōpūtanga oNgā Taputapu PVDtNgā Tukanga
1. Paninga Whakamātao Korehau
Ko te mimiti korehau ko te whakamahana i te rauemi paninga kia tae rā anō ki tōna pēhanga mamaoa kua mātotoru, kātahi ka mimiti. Ko ngā momo noa ko:
Te Whakamahana Ātete i te Whakamātao
Ka whakamahia ngā konganuku ātete-wera pērā i te tungsten, te molybdenum rānei hei wāhanga whakamahana. He pai mō ngā rauemi iti te ira rewa pērā i te konumohe (Al) me te hiriwa (Ag).
Te Whakamomona o te Hiko Irahiko (EB-PVD)
Ka whakamahi i te pū irahiko (10–30 kV) hei pupuhi i te rauemi ūnga, ka whakaputa i ngā pāmahana ā-rohe neke atu i te 3000°C. He pai mō ngā waikura rewa-teitei.
Te Epitaxy Hiko Irahiko (MBE)
He tikanga tino tika e mahia ana i raro i te korehau tino teitei (≤10⁻⁸ Pa), e āhei ai te whakahaere taumata-atomika mō te tipu o te kiriata epitaxial.
2. Te Whakatakotoranga Pupuhi
Ko te whakapūpū he whakauru i ngā matūriki kaha-teitei ki tētahi rauemi ūnga, ka panaia ngā ngota e putu ana ki runga i te papa. Ko ngā momo whakapūpū matua ko:
Te Pupuhitanga DC (Au Tika)
Tikanga whakapūpū taketake; me kawe hiko te ūnga.
Te Whakapūtanga RF (Auautanga Reo Irirangi)
E mahi ana i te 13.56 MHz, e āhei ai te pupuhi o ngā rauemi whakamahana.
Te Pupuhitanga o te Magnetron
Momo Taurite: Te kaha o te papa aukume o te 100–300 Gauss puta noa i te mata ūnga
Momo Kore Taurite: Te horapa o te toto kua whakarei ake kia pai ake ai te whakatakotoranga
Katote Mahanga Auau-Waenga: Ka whakatau i te take "paitini ūnga" i roto i te pupuhi tauhohe
Te Whakapūtanga Matū Whakapūtanga Mana Teitei (HIPIMS): Ngā tere whakapūtanga >90%, e whakaputa ana i ngā kiriata tino matotoru, kore-pou
Nama 3 Ngā Whakamahinga Noa o te Hangarau PVD
Ngā Paninga Utauta
Ngā paninga mārō pērā i te TiN, TiAlN (mārō >3000 HV)
He whānuitia te whakamahinga mō ngā taputapu tapahi me te whakapai ake i te mata o te pokepokea ai
Ngā Paninga Whakapaipai
Ngā whakaotinga rite ki te koura mā te whakamahi i te ZrN, TiZrN
Whakamahia ki ngā anga waea pūkoro, ki ngā taputapu kaukau, me ngā taonga kaihoko
Ngā Kiriata Angiangi Mahi
Ngā kiriata arataki mārama ITO (Indium Tin Oxide) me te ātete rau <10 Ω/□
Ngā paninga ārai-whakaata whatu me te whakawhiti mārama kitea >99%
Tākai Ārai-Haumaru
Te whakarewatanga taumata-wafer (ngā hononga Al, Cu)
Te whakatakoto paparanga ārai mā te whakamahi i te TaN, TiN hei ātete horapa
-Nā tekaihanga mīhini paninga korehau Pūrere horoi horoi Zhenhua.
Wā tuku: Pipiri-18-2025