Chidule cha Njira Zophikira Vacuum

Mu uinjiniya wamakono wa pamwamba, Physical Nthunzi Yotulutsa (PVD) yakhala ukadaulo waukulu wopaka vacuum chifukwa cha magwiridwe ake abwino kwambiri a filimu komanso makhalidwe ake abwino kwa chilengedwe. Nkhaniyi ikupereka kusanthula kwakuya kwa mfundo, magulu, ndi momwe ukadaulo wa PVD umagwiritsidwira ntchito, popereka chidziwitso chaukadaulo kwa akatswiri pantchitoyi.

Mfundo Zoyambira za Ukadaulo wa PVD Nambala 1
PVD ndi njira yomwe imachitika pansi pa vacuum condition (nthawi zambiri ≤10⁻³ Pa), momwe chophimba chimapukutidwa ndi nthunzi kenako n’kupindika pamwamba pa substrate kuti chipange filimu yopyapyala yolimba. Njira imeneyi imadziwika ndi:

Kutentha kochepa kwambiri (nthawi zambiri <500°C)

Kuyera kwambiri kwa filimu ndi kapangidwe kowongoka

Yosamalira chilengedwe (palibe madzi otayira)

Kuwongolera molondola pamlingo wa nanometer

Nambala 2 Magulu aZipangizo za PVDtNjira
1. Chophimba Chotulutsa Mpweya mu Vacuum
Kutenthetsa vacuum kumaphatikizapo kutentha zinthu zophimba mpaka zitafika pa mphamvu yake yokhuta ya nthunzi ndikusanduka nthunzi. Mitundu yodziwika bwino ndi iyi:

Kutentha Kosasinthika
Imagwiritsa ntchito zitsulo zosalimba monga tungsten kapena molybdenum ngati zinthu zotenthetsera. Yoyenera zinthu zosasungunuka kwambiri monga aluminiyamu (Al) ndi siliva (Ag).

Kutuluka kwa Mpweya wa Electron Beam (EB-PVD)
Amagwiritsa ntchito mfuti ya electron (10–30 kV) kuphulitsa chinthu chomwe akufuna, ndikupanga kutentha kwapafupi kuposa 3000°C. Yabwino kwambiri pa ma oxides okwera kwambiri.

Molecular Beam Epitaxy (MBE)
Njira yolondola kwambiri yochitidwa pansi pa vacuum yokwera kwambiri (≤10⁻⁸ Pa), yomwe imalola kuwongolera mulingo wa atomiki kuti filimu ya epitaxial ikule.

2. Kutulutsa Madontho
Kutulutsa madzi kumaphatikizapo tinthu tamphamvu kwambiri tomwe timagunda chinthu chomwe chikufunidwa, kutulutsa maatomu omwe amagwera pa substrate. Mitundu yayikulu ya kutulutsa madzi ndi iyi:

Kutulutsa kwa DC (Mwachindunji)
Njira yoyambira yothira madzi; cholinga chiyenera kukhala choyendetsa magetsi.

Kutulutsa kwa RF (Mafupipafupi a Radio)
Imagwira ntchito pa 13.56 MHz, zomwe zimathandiza kuti zinthu zotetezera kutentha zizitha kuphulika.

Kutulutsa Magnetron

Mtundu Woyenera: Mphamvu ya maginito ya 100–300 Gauss kudutsa pamwamba pa cholinga

Mtundu Wosalinganika: Kufalikira kwa plasma kowonjezereka kuti kukhale bwino

Mid-Frequency Twin Cathode: Imathetsa vuto la "poizoni wofunikira" pakutulutsa mawu mwachangu

Kutulutsa Magnetron Yokhala ndi Mphamvu Yaikulu (HIPIMS): Kuchuluka kwa ma ionization >90%, kupanga mafilimu okhuthala kwambiri, osakhala a columnar

Nambala 3 Kugwiritsa Ntchito Kwachizolowezi kwa Ukadaulo wa PVD
Zophimba Zida
Zophimba zolimba monga TiN, TiAlN (kulimba >3000 HV)

Amagwiritsidwa ntchito kwambiri podulira zida ndi kukulitsa pamwamba pa nkhungu

Zophimba Zokongoletsera
Zomaliza ngati golide pogwiritsa ntchito ZrN, TiZrN

Yogwiritsidwa ntchito pa mafelemu a foni yam'manja, zimbudzi, ndi zinthu zogulira

Makanema Oonda Ogwira Ntchito
Mafilimu owongolera owonekera a ITO (Indium Tin Oxide) okhala ndi kukana kwa pepala <10 Ω/□

Zophimba zowala zotsutsana ndi kuwala zomwe zimadutsa kuwala kooneka >99%

Kupaka Semiconductor
Kupangidwa kwa zitsulo pamlingo wa wafer (Al, Cu)

Kuyika kwa chotchinga pogwiritsa ntchito TaN, TiN polimbana ndi kufalikira

-Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuum Zhenhua Vacuum.