Intangiriro muri make nibyiza bya magnetron sputtering ibikoresho byo gutwikira

Ihame rya magnetron ihindagurika: electron zigongana na atome ya argon mugikorwa cyo kwihuta kugera kuri substrate munsi yumurima wumuriro wamashanyarazi, ionizing umubare munini wa argon ion na electron, na electron ziguruka kuri substrate. Iion ya argon yihutisha gutera ibisasu intego yibikorwa byumurima wamashanyarazi, ikwirakwiza umubare munini wa atome yintego, zishyirwa kuri substrate nka atome zidafite aho zibogamiye (cyangwa molekile) kugirango ikore firime. Iyo electron ya kabiri yihuta kuguruka kuri substrate, iyobowe ningufu za Lorentz yumurima wa magneti, irerekana uburyo bwa spiral na cycloid compte kugirango ikore urukurikirane rwizunguruka hejuru yintego. Electron ntabwo ifite inzira ndende gusa yo kugenda, Iracyari mukarere ka plasma hafi yubuso bwerekanwe nigitekerezo cya electromagnetic field theory beam, aho umubare munini wa Ar ionion kugirango utere igitego, bityo igipimo cyo guta ibikoresho bya magnetron gisohora ibikoresho ni kinini.

Rero, aibikoresho bya magnetron bisohora ibikoreshoyatejwe imbere, ihuza ikoranabuhanga rya magnetron hamwe na tekinoroji ya ion, ikanatanga igisubizo cyo kunoza amabara hamwe na https://www.zhenhuavac.com/wp-admin/post.php?post=5107&action=edit&message=1# ihame ryikigero cyo kubitsa hamwe nibigize ibice. Ukurikije ibicuruzwa bitandukanye bisabwa, sisitemu yo gushyushya, kubogama, sisitemu ya ionisation nibindi bikoresho birashobora gutoranywa. Intego yo gukwirakwiza irashobora guhindurwa byoroshye, kandi uburinganire bwa firime burarenze. Hamwe nibikoresho bitandukanye bigenewe, firime igizwe nibikorwa byiza irashobora gutegurwa. Ipitingi yateguwe nibikoresho ifite ibyiza byo guhuza imbaraga hamwe no guhuzagurika, bishobora kunoza neza kurwanya imiti yumunyu, kwambara no gukomera kubicuruzwa, kandi byujuje ibisabwa kugirango hategurwe neza.
Ibikoresho bikungahaye ku bikoresho bifatika, bishobora gukoreshwa mu byuma bitarimo ibyuma / ibikoresho bya pulasitike, ibirahure, ububumbyi n'ibindi bikoresho. Ikoreshwa cyane cyane mubikoresho byibikoresho bya elegitoronike, amasaha yo mu rwego rwo hejuru n'amasaha, imitako yo mu rwego rwo hejuru hamwe nibikoresho byibicuruzwa byuruhu nibindi bicuruzwa bikize.