Ngokuthuthuka okusheshayo kobuchwepheshe bokupakisha obuthuthukisiwe, i-TGV (Through Glass Via) kancane kancane iba yisisombululo esiyinhloko sokuxhumana kwezingxenye zeglasi. Isebenzisa izinzuzo zayo zokulahlekelwa yi-dielectric ephansi, ukuzinza okuhle kakhulu kokushisa, ukunemba okuphezulu komshini, kanye nezakhiwo zokuvikela eziqinile, i-TGV ibonise ukusebenza okuvelele ekuxhumaneni kwe-optical, i-MEMS, izinzwa, kanye nokuxhumana kwesivinini esikhulu, futhi manje iyanda ibe yizimo zohlelo lokusebenza olusezingeni eliphezulu.
Kodwa-ke, ukuvela kwezakhiwo ze-TGV kuletha nezinselele ezintsha zokukhiqiza: ezincane ngokusebenzisa ububanzi, amajiyometri ayinkimbinkimbi kakhulu, kanye nokwanda okuqhubekayo kwezilinganiso zesici. Ikakhulukazi, ngaphansi kwezimo ezingama-30 μm ngokusebenzisa ububanzi kanye nezilinganiso zesici ezidlula u-10:1, ukufeza ukufakwa kwengqimba yembewu efanayo ngaphakathi kwe-through-via sekuyisikhathi eside kuqashelwa njengenye yezingqinamba ezibaluleke kakhulu. Nakuba kungabonakali kangako kuchungechunge lwenqubo, lesi sinyathelo sinquma ngqo ukusebenza kukagesi kwedivayisi kanye nokuthembeka kwesikhathi eside.
Izinselele Zamanje Ezingu-1 ku-Micro-Via Coating
Ezinqubweni ze-TGV kanye ne-TSV, ububanzi obujwayelekile bungaba buncane njengo-30 μm, kanye nezidingo zesilinganiso sobukhulu obungaphezu kuka-10:1. Ngaphansi kwalezi zimo, izindlela zokumboza ezivamile zibhekene nemikhawulo eminingana:
Izindawo ezifile zokubeka: Imiphumela enamandla yokufihla umthunzi ngokusebenzisa izindonga eziseceleni ivame ukuholela kumafilimu angaqhubeki, okuphazamisa ukuhanjiswa komoya kanye nokungangeni komoya.
Ukungalingani kobukhulu befilimu: Umehluko omkhulu wezinga lokufakwa phakathi kokuvula kanye nokuphuma kwefilimu kuholela ezinkingeni zokumelana nendawo.
Ukuhambisana kwezinto eziningi okwanele: Uma ubeka izinto eziningi ezifana ne-Cu, Ti, W, Ni, kanye ne-Pt ezingcezu zengilazi noma ze-silicon, kunzima ukuqinisekisa ukunamathela kanye nokufana kuzo zonke izendlalelo.
Lezi zinkinga zithinta ngqo isivuno, zandisa ingozi yokuphinda kusebenze kanye nezindleko zenqubo, futhi zinciphise ukusebenza kahle kokukhiqiza okuphezulu.
Isixazululo Sokumboza Okujulile Nge-ZHENHUA Vacuum No.2
Izinzuzo Zemishini:
Ukugqoka Okujulile Okuthuthukisiwe
Ngobuchwepheshe be-ZHENHUA bokumboza ngokujulile obuyi-deep-via, ukufakwa kwengqimba yembewu efanayo kungafinyelelwa ngisho nasezingcezu ezincane njengobubanzi obungu-30 μm, ngezilinganiso zesici ezidlula u-10:1—ukunqoba izinselele zesikhathi eside ekumbozeni okujulile okuyinkimbinkimbi.
Ukwenza Ngokwezifiso Uma Kudingeka, Ukusekelwa Kwe-Substrate Yosayizi Ohlukahlukene
Iyakwazi ukucubungula osayizi abahlukene bezinto ezisetshenziswayo zengilazi, okuhlanganisa amafomethi angu-600×600 mm, 510×515 mm, kanye namafomethi amakhulu.
Ukuzivumelanisa Nezimo Kwenqubo Ngokuhambisana Nezinto Eziningi
Uhlelo lusekela amafilimu amancane aqhubayo futhi asebenzayo njenge-Cu, Ti, W, Ni, kanye ne-Pt, okuvumela izixazululo ezenzelwe wena kokubili izidingo zokuqhuba kukagesi kanye nokumelana nokugqwala.
Ukusebenza Kwemishini Ezinzile Nokulungiswa Okulula
Ifakwe uhlelo lokulawula oluhlakaniphile, imishini ivumela ukulungiswa kwamapharamitha okuzenzakalelayo kanye nokuqapha ngesikhathi sangempela ukufana kobukhulu befilimu. Ukwakheka kwe-modular kuqinisekisa ukuthi kulula ukugcinwa futhi kunciphisa isikhathi sokungasebenzi.
Ububanzi Bokusetshenziswa:
Kusebenza ezinqubweni zokupakisha ezithuthukisiwe ze-TGV/TSV/TMV, okuvumela ukumbozwa kwezingqimba zembewu ezakhiweni ezijulile ezinezilinganiso zobukhulu obufika ku-10:1.
Njengoba imakethe yokupakisha ethuthukisiwe iqhubeka nokukhula, isidingo sama-micro-via kanye nezakhiwo zesilinganiso esiphakeme sizokhula kakhulu. Ubuchwepheshe bokumboza obujulile be-ZHENHUA Vacuum buhlinzeka ngesisombululo esingalinganiswa, esilungele ukukhiqizwa ngobuningi ezinseleleni ezibalulekile zokumboza ku-TGV nakwezinye izinqubo zokupakisha zesizukulwane esilandelayo, okuthuthukisa ukusebenza kahle kokumboza kanye nokuvumelana komkhiqizo.
—Lesi sihloko sishicilelwe ngu imishini yokumboza nge-vacuum umenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Agasti-18-2025