Ndi chitukuko chachangu cha ukadaulo wapamwamba wopaka, TGV (Kudzera mu Glass Via) pang'onopang'ono ikukhala njira yofunika kwambiri yolumikizirana ndi magalasi. Pogwiritsa ntchito ubwino wake wochepa wa kutayika kwa dielectric, kukhazikika kwabwino kwa kutentha, kulondola kwambiri kwa makina, komanso mphamvu zoteteza kutentha, TGV yawonetsa magwiridwe antchito abwino kwambiri mu kulumikizana kwa optical, MEMS, masensa, ndi maulumikizidwe othamanga kwambiri, ndipo tsopano ikukula kupita ku zochitika zapamwamba kwambiri zogwiritsira ntchito.
Komabe, kusintha kwa kapangidwe ka TGV kumabweretsanso mavuto atsopano opanga: kucheperako kudzera m'ma diameter, ma geometries ovuta kwambiri, komanso kuwonjezeka kwa ma aspect ratios. Makamaka, pansi pa mikhalidwe ya 30 μm kudzera m'ma diameter ndi ma aspect ratios opitilira 10:1, kukwaniritsa kuyika kwa mbeu zofanana mkati mwa through-via kwadziwika kale ngati chimodzi mwazovuta zofunika kwambiri. Ngakhale sizikuwoneka bwino mu unyolo wa njira, sitepe iyi imatsimikizira mwachindunji magwiridwe antchito amagetsi a chipangizocho komanso kudalirika kwa nthawi yayitali.
Mavuto Atsopano a Micro-Via Coating
Mu njira za TGV ndi TSV, ma diameter wamba amatha kukhala ang'onoang'ono ngati 30 μm, ndipo chiŵerengero cha aspect ratio chimafunika kuposa 10:1. Pansi pa izi, njira zophikira zachikhalidwe zimakumana ndi zopinga zingapo:
Kuika madera opanda mpweya: Zotsatira zamphamvu za mthunzi kudzera m'makoma am'mbali nthawi zambiri zimapangitsa kuti mafilimu asapitirire, zomwe zimawononga mphamvu ya mpweya komanso kusakhala ndi mpweya wokwanira.
Kusafanana kwa makulidwe a filimu: Kusiyana kwakukulu kwa kuchuluka kwa ma depositi pakati pa malo otseguka ndi pansi kumabweretsa mavuto a resistivity yapafupi.
Kusagwirizana kokwanira kwa zinthu zambiri: Mukayika zinthu zingapo monga Cu, Ti, W, Ni, ndi Pt pa galasi kapena silicon substrates, zimakhala zovuta kuonetsetsa kuti zonse zimagwirizana komanso zimagwirizana pazigawo zonse.
Mavutowa amakhudza mwachindunji phindu, amawonjezera chiopsezo chokonzanso ntchito ndi ndalama zogwirira ntchito, komanso amaletsa magwiridwe antchito apamwamba opanga zinthu.
Nambala 2. ZHENHUA Vacuum Deep-Via Coating Solution
Ubwino wa Zipangizo:
Chophimba Chozama Chopangidwa Bwino
Ndi ukadaulo wapadera wa ZHENHUA wopaka utoto wozama kudzera m'madzi, kuyika kwa mbeu mofanana kumatha kuchitika ngakhale m'ma vias ang'onoang'ono ngati 30 μm m'mimba mwake, ndi ma aspect ratios opitilira 10:1—kuthana ndi zovuta zakale mu utoto wozama kudzera m'madzi.
Kusintha Komwe Kukufunika, Thandizo la Substrate Yamitundu Yambiri
Yokhoza kukonza ma substrates agalasi osiyanasiyana, kuphatikizapo 600×600 mm, 510×515 mm, ndi ma format akuluakulu.
Kusinthasintha kwa Njira ndi Kugwirizana kwa Zinthu Zambiri
Dongosololi limathandizira mafilimu opyapyala oyendetsera magetsi komanso ogwira ntchito monga Cu, Ti, W, Ni, ndi Pt, zomwe zimathandiza kuti pakhale njira zoyendetsera magetsi komanso zotsutsana ndi dzimbiri.
Magwiridwe Abwino a Zida Zokhazikika ndi Kusamalira Kosavuta
Chokhala ndi makina owongolera anzeru, chipangizochi chimalola kusintha kwa magawo okhazikika komanso kuyang'anira nthawi yeniyeni makulidwe a filimu. Kapangidwe ka modular kamatsimikizira kuti kukonza kumakhala kosavuta komanso kumachepetsa nthawi yogwira ntchito.
Chiwerengero cha Ntchito:
Imagwira ntchito pa njira zopakira za TGV/TSV/TMV, zomwe zimathandiza kuti mbewu zizitha kuphimba zinthu m'magawo ozungulira omwe ali ndi chiŵerengero cha zinthu mpaka 10:1.
Pamene msika wapamwamba wa ma CD ukupitilira kukula, kufunikira kwa ma micro-vias ndi mawonekedwe apamwamba kudzawonjezeka kwambiri. Ukadaulo wa ZHENHUA Vacuum wopaka utoto wozama umapereka yankho losavuta komanso lokonzeka kupanga zinthu zambiri ku zovuta zazikulu za ma CD mu TGV ndi njira zina zopaka utoto za m'badwo wotsatira, zomwe zimapangitsa kuti ma CD azigwira bwino ntchito komanso kuti zinthu zizigwirizana.
—Nkhaniyi yafalitsidwa ndi zida zophikira zotsukira wopanga Zhenhua Vacuum
Nthawi yotumizira: Ogasiti-18-2025

