Gutsinda ikibazo cyo gusiga irangi rya Micro-Via Coating rya 30 μm — ZHENHUA Vacuum TGV Deep-Via Coating Solution

Bitewe n’iterambere ryihuse ry’ikoranabuhanga rigezweho ryo gupakira, TGV (By Through Glass Via) igenda ihinduka igisubizo cy’ingenzi cyo guhuza ingirabuzimafatizo z’ibirahure. Ikoresheje ibyiza byayo byo gutakaza ingufu nke z’amashanyarazi, kudahindagurika cyane mu bushyuhe, gukoresha neza imashini, no kugira ubushobozi bukomeye bwo gukingira, TGV yagaragaje imikorere myiza mu itumanaho ry’amajwi, MEMS, sensors, na interconnects zihuta cyane, none ubu iri kwaguka ikagera ku buryo bworoshye bwo gukoresha.

Ariko, iterambere ry’imiterere ya TGV rizana kandi imbogamizi nshya mu nganda: ntoya binyuze mu bunini bw’umurambararo, imiterere y’ubuso igoye cyane, no kongera buri gihe ibipimo by’ubuso. By’umwihariko, mu gihe cy’ubugari bwa μm 30 binyuze mu bugari n’ibipimo by’ubuso birenga 10:1, kugera ku butaka bungana mu buryo bumwe bw’imbuto imbere mu bugari byamaze igihe kinini byemerwa nk’imwe mu mbogamizi zikomeye cyane. Nubwo bitagaragara cyane mu ruhererekane rw’ibikorwa, iyi ntambwe igena mu buryo butaziguye imikorere y’amashanyarazi y’igikoresho n’uburyo kirambye bwo kugikora.

Imbogamizi za mbere zihari muri Micro-Via Coating

Mu buryo bwa TGV na TSV, uburebure busanzwe bushobora kuba buto kugeza kuri 30 μm, kandi igipimo cy'ubuso kirenze 10: 1. Muri ibi bihe, uburyo busanzwe bwo gusiga bufite imbogamizi nyinshi:

Gushyira ahantu hatameze neza: Ingaruka zikomeye zo gutwikira igicucu binyuze ku nkuta z'impande akenshi zitera filime zidakomeza, bigahungabanya ubushobozi bwo gutwara amashanyarazi no kutagera ku rusobe rw'amazi.

Ubugari bwa firime ntibungana: Itandukaniro rikomeye ry’umuvuduko wo gushyiramo hagati y’imyobo inyura mu gice cyo hasi n’aho iherereye ritera ibibazo byo kwangirika kw’aho iherereye.

Kudahuza neza kw'ibikoresho byinshi: Iyo ushyize ibikoresho byinshi nka Cu, Ti, W, Ni, na Pt ku kirahuri cyangwa silicon substrates, biragoye kwemeza ko bifatanye kandi bingana ku byiciro byose.

Ibi bibazo bigira ingaruka ku musaruro, byongera ibyago byo kuvugurura imirimo no ku giciro cyo kuyitunganya, kandi bikagabanya imikorere myiza y’inganda.

No 2. Umuti wo gusiga ifu ya ZHENHUA Vacuum Deep-Via Coating

Ibyiza by'Ibikoresho:

Uburyo bwo gutwikira mu buryo bwimbitse (Deep-Via Coating) bwakozwe neza
Hamwe n'ikoranabuhanga rya ZHENHUA ryo gusiga imbuto mu buryo budasanzwe, imbuto zishobora gushyirwa mu buryo bumwe ndetse no mu duce duto twa metero 30 z'umurambararo, hamwe n'ibipimo birenga 10: 1—kurwanya imbogamizi zimaze igihe kirekire mu gusiga imbuto mu buryo bugoye.

Guhindura ibintu mu buryo bukenewe, Inkunga y'ibice byinshi
Ishobora gutunganya ingano zitandukanye z'ibirahure, harimo 600×600 mm, 510×515 mm, n'imiterere minini.

Uburyo bworoshye bwo gukora ibintu hamwe n'uburyo ibintu byinshi bihuzwa
Iyi sisitemu ishyigikira filime nto ziyobora kandi zikora neza nka Cu, Ti, W, Ni, na Pt, bigatuma habaho ibisubizo byihariye ku bijyanye no gutwara amashanyarazi no kwirinda ingese.

Imikorere y'ibikoresho ihamye no kubikora byoroshye
Ibi bikoresho bifite sisitemu yo kugenzura ifite ubwenge, bituma habaho guhindura ibipimo byikora no kugenzura mu buryo nyabwo ubugari bwa filime. Igishushanyo mbonera cy’uburyo bworoshye bwo kubungabunga no kugabanya igihe cyo kudakora.

Ingano y'Ikoreshwa:
Ikoreshwa mu buryo bwo gupakira bugezweho bwa TGV/TSV/TMV, ituma imbuto zishyirwa mu buryo bwimbitse kandi bungana na 10:1.

Uko isoko ry’ibipfunyika rikomeje kwaguka, icyifuzo cya micro-vias n’imiterere y’ibipimo by’ubuso buhanitse kizakomeza kwiyongera. Ikoranabuhanga rya ZHENHUA Vacuum ryo gupfunyika mu buryo bwimbitse ritanga igisubizo gishoboka kandi cyiteguye gukorwa ku bwinshi ku bibazo bikomeye byo gupfunyika mu buryo bwa TGV n’izindi gahunda zo gupfunyika mu gihe kizaza, bikongera imikorere myiza yo gupfunyika no guhuza ibicuruzwa.

—Iyi nkuru yasohotse na ibikoresho byo gusiga irangi ry'umwuka uruganda rwa Zhenhua Vacuum