He aha te take e whakamahia ai te mīhini horoi ngote?
Te Ārai i te Parahanga: I roto i te korehau, ko te korenga o te hau me ētahi atu hau ka ārai i te tauhohenga o te rauemi whakatakotoranga ki ngā hau o te āhuarangi, ka poke pea te kiriata.
Te Piripiri Pai Ake: Ko te kore o te hau te tikanga ka piri tika te kiriata ki te papa, kāore he pute hau, he hau rānei i waenganui i te papa ka ngoikore ai te hononga.
Kounga Kiriata: Mā ngā āhuatanga korehau ka pai ake te whakahaere i te tukanga whakatakotoranga, ka hua ake he kiriata ōrite ake, he kounga teitei ake hoki.
Te Whakatakotoranga i te Pāmahana Iti: Ka pirau, ka tauhohe rānei ētahi rauemi i ngā pāmahana e hiahiatia ana mō te whakatakotoranga mēnā ka pāngia e ngā hau o te āhuarangi. I roto i te korehau, ka taea te whakatakoto i ēnei rauemi i ngā pāmahana iti iho.
Ngā Momo Tukanga Paninga Korehau
Te Whakatakotoranga Kohu Tūturu (PVD)
Te mimiti wera: Ka whakamahanatia te rauemi i roto i te korehau kia mimiti rā anō, kātahi ka whakatōtō ki runga i te papa.
Te pupuhi: Ka pupuhihia he rauemi ūnga e te hihi katote kaha-nui, ka panaia ngā ngota ka whakatakotoria ki runga i te papa.
Te Whakatakotoranga Taiaho Pūoro (PLD): Ka whakamahia he hihi taiaho kaha-teitei hei mimiti i ngā rauemi mai i tētahi ūnga, kātahi ka whakapūmau ki runga i te papa.
Te Whakatakotoranga Kohu Matū (CVD)
CVD Pēhanga Iti (LPCVD): Ka mahia i te pēhanga iti ki ngā pāmahana iti iho, hei whakapai ake i te kounga o te kiriata.
CVD Whakarei-Plasma (PECVD): Ka whakamahi i te plasma hei whakahohe i ngā tauhohenga matū i ngā pāmahana iti iho i te CVD tuku iho.
Te Whakatakotoranga Papanga Atomika (ALD)
Ko te ALD he momo CVD e whakatakoto ana i ngā kiriata kia kotahi te paparanga ngota i ia wā, e whakarato ana i te mana whakahaere pai rawa atu ki te matotoru me te hanganga o te kiriata.
Ngā Taputapu i Whakamahia i roto i te Paninga Korehau
Rūma Korehau: Ko te wāhanga matua e whakahaerehia ai te tukanga paninga.
Ngā Papu Korehau: Hei waihanga me te pupuri i te taiao korehau.
Pūmau Papa: Hei pupuri i te papa kia kore e neke i te wāhi i te wā e pania ana.
Ngā Pūtake Whakamātao, Ngā Pūtake Ruku rānei: Kei runga i te tikanga PVD i whakamahia.
Ngā Pūnaha Hiko: Hei whakamahi i te pūngao ki ngā pūtake mimiti, hei whakaputa rānei i te plasma i roto i te PECVD.
Ngā Pūnaha Whakahaere Pāmahana: Mō te whakamahana i ngā papa, mō te whakahaere rānei i te pāmahana o te tukanga.
Ngā Pūnaha Aroturuki: Hei ine i te matotoru, te ōritetanga, me ētahi atu āhuatanga o te kiriata kua whakatakotoria.
Ngā Whakamahinga o te Paninga Korehau
Paninga Whatu: Mō ngā paninga ārai-whakaata, whakaata, tātari rānei i runga i ngā karāhe arotahi, ngā whakaata me ētahi atu wāhanga whatu.
Paninga Whakapaipai: Mō te whānuitanga o ngā hua, tae atu ki ngā whakapaipai, ngā wati, me ngā wāhanga motuka.
Paninga Mārō: Hei whakapai ake i te ātete ki te kakahu me te roa o ngā taputapu tapahi, ngā wāhanga miihini, me ngā taputapu hauora.
Paninga Ārai: Hei ārai i te waikura, i te urunga rānei ki runga i ngā papa whakarewa, kirihou, karāhe rānei.
Paninga Hiko: Mō te hanga i ngā ara iahiko whakauru, ngā pūtau rā, me ētahi atu taputapu hiko.
Ngā Painga o te Paninga Korehau
Te Tika: Mā te paninga korehau ka taea te whakahaere tika i te matotoru me te hanganga o te kiriata.
Te ōritetanga: Ka taea te whakatakoto i ngā kiriata kia ōrite ki runga i ngā āhua uaua me ngā wāhi whānui.
Whai huatanga: Ka taea te whakahaere aunoa i te tukanga, ā, he pai mō te whakaputa nui.
He Ātaahua ki te Taiao: He iti ake ngā matū e whakamahia ana e te paninga korehau, ā, he iti ake hoki ngā para e puta mai ana i ērā atu tikanga paninga.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: 15 o Ākuhata-2024