Uru nke akụrụngwa
1. Nhazi Ọrụ A Na-agbanwe Agbanwe
Site na iji nhazi usoro ihe owuwu modular, ọ na-akwado ụdị mmepụta ngwa ngwa nke ukwuu, na-enye ohere maka mgbakwunye ngwa ngwa, iwepụ, na nhazi nke ụlọ ọrụ bara uru. Enwere ike ịgbanwe nhazi nke ahịrị mmepụta ahụ n'ụzọ dị mfe dịka mkpa mmepụta si dị.
2.Ngwọta Teknụzụ Mkpuchi Nkezi
Jiri teknụzụ sputtering nke nwere obere akụkụ na-agbagharị agbagharị yana ngwọta magnetik kachasị mma iji nweta njupụta dị irè nke usoro oghere.
3. Nnabata nke Nhazi Ebumnuche Na-agbagharị
Nhazi a na-azọpụta mfu ihe mkpuchi ma na-eme ka ojiji ihe mgbaru ọsọ ka mma. Ọ na-ebelatakwa usoro nnọchi ebumnuche, si otú a na-eme ka arụmọrụ mmepụta dịkwuo mma.
4. Uru Njikwa Usoro
Site na njikarịcha nke magnetron sputtering paramita na teknụzụ nkwụnye ihe abụọ, arụmọrụ mkpuchi nke ihe owuwu dị mgbagwoju anya ka mma nke ukwuu, ebe ọnụego ọnwụ ihe onwunwe na-ebelata.
Ngwa:Nwere ike ịkwadebe ọtụtụ ihe nkiri ígwè dị iche iche dịka Ti, Cu, Al, Sn, Cr, Ag, Ni, wdg. A na-ejikarị ya eme ihe na ihe eletrọniki semiconductor, dịka ihe ndị e ji seramiiki DPC mee, ihe ndị e ji seramiiki mee, ihe ndị e ji thermistors mee, ihe ndị e ji seramiiki LED mee, wdg.