Ib qho ntawm cov txiaj ntsig tseem ceeb ntawm cov tshuab nqus tsev PVD me me uas yoog tau yog lawv qhov ua tau ntau yam. Cov tshuab no tau tsim los kom haum rau ntau qhov loj me thiab cov duab ntawm cov khoom siv, ua rau lawv zoo tagnrho rau cov txheej txheem tsim khoom me me lossis kev cai. Tsis tas li ntawd, nws qhov loj me me thiab kev teeb tsa yooj ywm ...
Cov yam ntxwv ntawm magnetron sputtering txheej (3) Lub zog qis sputtering. Vim yog qhov cathode voltage qis siv rau lub hom phiaj, cov plasma raug khi los ntawm lub zog sib nqus hauv qhov chaw ze ntawm cathode, yog li inhibiting cov khoom me me uas them rau sab ntawm cov substrate neeg tua. Lub...