Ka whakamahia e te mīhini paninga ira-ā-iona aunoa katoa ngā whanaketanga hou o te hangarau paninga ira-ā-iona hei whakarato i tētahi tukanga paninga maeneene me te whai hua. Mā ōna āheinga aunoa katoa, ka tukuna e te mīhini te tino tika me te ōritetanga, kia tino kounga ai te paninga...
Ko te whakamahinga o ngā mīhini paninga korehau ā-matimati whakarewa he whanaketanga nui i roto i te hangarau tiaki mata. Mā te whakakotahi i te hangarau korehau me ngā paninga motuhake, ka hangaia e ēnei mīhini he paparanga angiangi, ātete-kakahu i runga i ngā mata whakarewa e tiaki ana i ngā matimati me ētahi atu āhuatanga kino...
I roto i ngā mara o te hanga matatau me te whakaputa ahumahi, kei te piki haere te hiahia mō ngā mīhini paninga korehau whai hua. Kei te hurihia e ēnei mīhini hou te huarahi e pania ai ngā momo rauemi, e whakarato ana i te pakari, te mahi me te ataahua kua whakarei ake. I roto i tēnei blog po...
I te whanaketanga haere o te hangarau paninga pupuhi, inā koa te hangarau paninga pupuhi magnetron, i tēnei wā, ka taea te whakarite mō tetahi rauemi mā te kiriata ūnga pupuhi katote, nā te mea ka pupuhi te ūnga i roto i te tukanga paninga ki tētahi momo papa, ko te kounga o...
A. Te tere o te pupuhi. Hei tauira, i te wa e pupuhi ana te SiO2, ka taea te tere o te whakatakotoranga ki te 200nm/min, tae atu ki te 10~100nm/min. Ā, ko te tere o te hanganga kiriata he rite tonu ki te mana auau teitei. B. Ko te piri i waenga i te kiriata me te papa he nui ake i te mimiti korehau...
He wāhanga nui ngā raina whakaputa kiriata rama motuka o te umanga hanga motuka. Ko ēnei raina whakaputa te kawenga mō te paninga me te hanga kiriata rama motuka, e whai wāhi nui ana ki te whakarei ake i te ataahua me te mahi o ngā rama motuka. I te mea kei te piki haere te hiahia mō ngā kiriata kounga teitei...
Ko te nuinga o te wā, ko te kawe i te plasma tukunga, te whakairo ūnga, te whakatakotoranga kiriata angiangi me ētahi atu tukanga, ka pā te papa aukume ki te tukanga whakamau magnetron. I roto i te pūnaha whakamau magnetron me te papa aukume orthogonal, ka pāngia ngā irahiko e te...
Ko ngā whakaritenga taketake o te mīhini paninga korehau i runga i te pūnaha papu: (1) Me nui te tere papu o te pūnaha paninga korehau, e kore e tere noa te papu i ngā hau i tukuna mai i te papa me ngā rauemi mimiti me ngā wāhanga i roto i te korehau...
Ka whakamahia e te mīhini paninga whakapaipai PVD tētahi tukanga e mōhiotia ana ko te Physical Vapor Deposition (PVD) hei pani i tētahi paninga angiangi engari pakari ki runga i ngā whakapaipai. Kei roto i tēnei tukanga te whakamahinga o ngā konganuku totoka, he tino parakore, ka mimitia i roto i te taiao korehau. Kātahi ka whakamahanahia te kohu konganuku e puta mai ana...
Ko tētahi o ngā painga matua o ngā mīhini paninga korehau PVD iti ngāwari ko tōna maha o ngā whakamahinga. Kua hangaia ēnei mīhini hei whakauru i ngā momo rahi me ngā āhua o te papa, ā, he mea tino pai mō ngā tukanga hanga iti, hanga ritenga rānei. Hei tāpiri, ko tōna rahi kiato me tōna ngāwari...
I roto i te umanga hanga e whanake tonu ana, he mea nui te mahi a ngā taputapu tapahi ki te hanga i ngā hua e whakamahia ana e tātou i ia rā. Mai i te tapahi tika i roto i te umanga rererangi ki ngā hoahoa uaua i roto i te ao hauora, kei te piki haere tonu te hiahia mō ngā taputapu tapahi kounga teitei. Hei whakatutuki i tēnei hiahia, ko te US...
Ina tīmata te whakatakotoranga o ngā ngota kiriuhi, ka pāngia te hononga o te kiriuhi/papa e te pupuhi katote e whai ake nei. (1) Te whakaranu ā-tinana. Nā te werohanga katote pūngao-nui, te pupuhi o ngā ngota kua whakatakotoranga me te werohanga hoki o ngā ngota mata me te āhuatanga tukinga hū, ka...
Ko te pupuhi he āhuatanga e pā ai ngā matūriki pūngao (ko te nuinga he katote pai o ngā hau) ki te mata o tētahi mea totoka (e kiia ana ko te rauemi ūnga i raro nei), ka puta ai ngā ngota (ngota rānei) i runga i te mata o te rauemi ūnga mai i a ia. I kitea tēnei āhuatanga e Grove i te tau 1842 i te wā...
Ngā āhuatanga o te paninga magnetron sputtering (3) Te sputtering iti o te pūngao. Nā te iti o te ngaohiko cathode e pā ana ki te ūnga, ka herea te plasma e te papa aukume i te wāhi e tata ana ki te cathode, ā, ka ārai i ngā matūriki utu nui-pūngao ki te taha o te papa i pupuhihia e te tangata. Ko te...
Ki te whakatauritea ki ētahi atu hangarau paninga, ko ngā āhuatanga e whai ake nei o te paninga magnetron sputtering: he nui te whānuitanga whakarerekētanga hihiri o te tere whakatakotoranga paninga me te matotoru (te āhua o te rohe paninga) ka taea te whakahaere ngāwari, ā, kāore he hoahoa...