1. Lub tshuab txheej cathode ion hollow thiab lub tshuab txheej hlau kub arc ion Lub phom cathode hollow thiab rab phom hlau kub arc tau teeb tsa rau saum lub chamber txheej, lub anode tau teeb tsa rau hauv qab, thiab ob lub electromagnetic coils tau teeb tsa rau saum thiab hauv qab ntawm lub chamber txheej pe...
1. Ion beam sputtering txheej Qhov saum npoo ntawm cov khoom siv yog bombarded nrog lub zog nruab nrab ion beam, thiab lub zog ntawm cov ions tsis nkag mus rau hauv lub lattice siv lead ua ntawm cov khoom siv, tab sis hloov lub zog mus rau lub hom phiaj atoms, ua rau lawv sputter deb ntawm qhov chaw ntawm cov khoom siv, thiab tom qab ntawd ...