A cikin 'yan shekarun nan, fasahar kere-kere ta wucin gadi, tuƙi mai sarrafa kansa, da kuma na'urorin kwamfuta masu aiki da yawa sun mamaye yanayin semiconductor. Yayin da aikin guntu ke ci gaba da ƙaruwa, marufi na al'ada mai girma biyu (2D) ba zai iya biyan buƙatun da ke ƙaruwa na yawan haɗin kai da sarrafa zafi ba. Masana'antar tana ci gaba da sauri zuwa zamanin haɗakar abubuwa uku (3D).
Domin daidaita yawan kwamfuta da haɗin kai a cikin ɗan gajeren sarari, rawar da substrate na marufi ya taka ta zama mafi mahimmanci fiye da kowane lokaci. Fasaha ta Through-Silicon Via (TSV) a da tana wakiltar marufi na 3D, duk da haka tsadarsa mai yawa, ƙarancin kayan aiki, da ƙuntatawa na kayan aiki sun hana karɓuwa sosai. Yanzu, wani sabon mai fafatawa yana tasowa - fasahar haɗin gwiwa ta Through-Glass Via (TGV).
Babban ƙa'idar TGV ita ce a ƙera ƙananan hanyoyin lantarki ta hanyar amfani da gilashin da ke rufewa, sannan a cika ƙarfe don kafa hanyoyin da ke aiki a tsaye tsakanin guntu ko substrates. Duk da cewa manufar ta yi kama da mai sauƙi, tsarin ya ƙunshi matakai da yawa na daidaito inda kowane mataki ke shafar aminci kai tsaye. Daga cikin waɗannan, ajiyar Layer na iri - wanda galibi ana watsi da shi - yana aiki a matsayin tushen ɓoye wanda ke tantance nasarar gaba ɗaya na aikin ƙarfe.
1. Tsarin Gudanar da TGV: Tsarin Iri—“Gada” Mai Gudanar da Ƙarfe
Tsarin TGV na yau da kullun ya ƙunshi:
Shirye-shiryen gilashin → Daidaito ta hanyar haƙa → Ajiye Layer na iri → Cika Electroplating → Tsarin saman.
Tsarin iri a zahiri siriri ne mai sarrafa kansa wanda aka ajiye a bangon ciki na gilashin da ba sa sarrafa shi. Idan ana kallon tsarin TGV a matsayin "gada" a tsaye don haɗa wutar lantarki, to layin iri yana aiki azaman kebul na farko na ƙarfe da ke ɗaure wannan gadar. Ba tare da shi ba, ba za a iya fara amfani da wutar lantarki ba, kuma haɗakar ƙarfe a cikin hanyar sadarwa zai zama ba zai yiwu ba.
Duk da haka, ingancin adana wannan Layer ya dogara sosai akan yanayin geometric na via kanta. Siffofi daban-daban suna haifar da ƙalubale daban-daban wajen cimma daidaiton rufewar Layer iri.
2. Ta hanyar Tsarin Halitta: Babban Kalubale don Rufe Tsarin Iri Iri iri ɗaya
TGV ta hanyar bayanan martaba ya bambanta dangane da tsarin haƙa da kuma ƙera shi. Yanayin ƙasa da aka saba gani sun haɗa da hanyoyin da ke siffar malam buɗe ido, makafi, tsaye, da kuma hanyoyin V, kowannensu yana haifar da matsaloli na musamman na adanawa:
Malam Bulaliya ta hanyar: Tsakiyar da aka takaita yana haifar da tasirin inuwa, yana hana ƙwayoyin ƙarfe isa yankin tsakiya. Wannan yana haifar da "wuraren matattu" waɗanda ba a rufe su ba inda ake rasa ci gaban electroplating.
Makaho ta hanyar: Da ƙasan da aka rufe, kwararar iskar gas tana da iyaka kuma kuzarin ion yana raguwa, wanda ke haifar da siriri da rashin mannewa sosai waɗanda zasu iya lalacewa a ƙarƙashin matsin lamba na gaba.
Ta tsaye: An san ta da babban rabon fuska da kuma gefen gefe madaidaiciya, ƙwayoyin ƙarfe suna tafiya a layi kuma sau da yawa ba sa shafa ƙasan via yadda ya kamata, suna samar da hanyoyin da ba su cika aiki ba ko kuma ramukan rufi.
Siffar V ta hanyar: Siffar siffa mai kauri tana inganta daidaiton kusurwar ajiya zuwa wani mataki, amma yawan tauri na iya haifar da rashin daidaiton kauri na fim da kuma yawan damuwa, wanda ke lalata amincin sigina.
A dukkan yanayi, babban ƙalubalen shine a cimma ci gaba, daidaito, da kuma kyakkyawan rufin ƙarfe a kan saman gilashi mai girman gaske tare da ƙarancin kuzarin saman. Duk wani katsewa ko rashin mannewa a cikin layin iri yana haifar da gurɓataccen abu, tsagewa, ko wargajewa yayin amfani da wutar lantarki, wanda ke haifar da ƙaruwar juriyar haɗin gwiwa, jinkirin sigina, ko gazawar na'urar gaba ɗaya.
Magance waɗannan ƙalubalen yana buƙatar kayan aikin rufewa mai inganci da kwanciyar hankali waɗanda za su iya cimma nasarar zurfafawa ta hanyar ƙarfe. Nan ne mafita ta rufewa ta TGV ta ZHENHUA Vacuum ta shigo.
3. Maganin TGV na ZHENHUA Vacuum ta hanyar amfani da Metallization
Amfanin Kayan Aiki:
Inganta Rufin Zurfi ta Hanyar Juyawa
Fasaha mai zurfi ta rufin gida tana ba da damar adana nau'ikan iri ...
Ana iya keɓancewa don Girman Substrate daban-daban
Ya dace da gilashin da aka yi da girman 600 × 600 mm, 510 × 515 mm, da manyan tsare-tsare don biyan buƙatun samarwa daban-daban.
Sassaucin Tsarin Aiki A Faɗin Kayayyaki Da Dama
Yana tallafawa adana Cu, Ti, W, Ni, Pt da sauran siraran fina-finai masu aiki ko masu aiki, yana biyan buƙatun lantarki da juriya ga tsatsa daban-daban.
Aiki Mai Kyau & Sauƙin Gyara
An sanye shi da tsarin sarrafawa mai wayo don daidaita sigogi ta atomatik da kuma sa ido kan kauri fim a ainihin lokaci. Tsarin zamani yana tabbatar da sauƙin kulawa da rage lokacin aiki.
Tsarin Aikace-aikace:
Ya dace da marufi na zamani na TGV/TSV/TMV, wanda ke ba da damar yin amfani da ingantaccen shafi na iri a cikin hanyoyin da ke da rabon siffofi har zuwa 10:1.
Kammalawa: Kwarewa a Tsarin Iri—Mataki Zuwa Ga Haɗakar 3D ta Gaskiya
Darajar fasahar TGV ba wai kawai tana cikin samar da sabuwar hanyar haɗin kai tsaye ba, har ma tana cikin samar da ingantaccen tsarin haɗin kai mai girma uku.
A tsakiyar wannan sauyi, aikin ƙarfe na Layer iri shine mafi mahimmanci amma galibi ana watsi da shi.
Sai lokacin da wannan "tushen mai amfani da wutar lantarki" marar ganuwa ya cimma daidaito, yawa, da kuma mannewa mai ƙarfi za a iya tabbatar da aikin lantarki da haɗin kai na gaba. Samun ingantaccen ajiyar ƙarfe a cikin gilashin micron ya zama ma'aunin ƙarfin marufi na zamani.
Ta hanyar ci gaba da kirkire-kirkire da ci gaban kayan aiki, ZHENHUA Vacuum yana samar da ingantattun hanyoyin samar da rufin TGV mai inganci, wanda ke ba wa masana'antun marufi damar motsawa cikin aminci daga gwaji zuwa samarwa mai yawa, yana hanzarta cimma cikakken haɗin 3D.
A cikin wannan zamani da ƙarfin lissafi da yawan haɗin kai ke ƙaruwa, wannan ya fi ƙarfin kayan aiki - yana wakiltar wani muhimmin mataki zuwa ga balagar fasahar marufi ta 3D ta zamani.
—An buga wannan labarin ne ta hannunkayan aikin shafa injinmasana'anta Zhenhua injin injin
Lokacin Saƙo: Oktoba-13-2025